FR2853645B1 - Procede de fabrication d'un composant electronique incluant une structure micro-electromecanique - Google Patents

Procede de fabrication d'un composant electronique incluant une structure micro-electromecanique

Info

Publication number
FR2853645B1
FR2853645B1 FR0304651A FR0304651A FR2853645B1 FR 2853645 B1 FR2853645 B1 FR 2853645B1 FR 0304651 A FR0304651 A FR 0304651A FR 0304651 A FR0304651 A FR 0304651A FR 2853645 B1 FR2853645 B1 FR 2853645B1
Authority
FR
France
Prior art keywords
manufacturing
electronic component
component including
microelectromechanical structure
microelectromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0304651A
Other languages
English (en)
Other versions
FR2853645A1 (fr
Inventor
Lionel Girardie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memscap SA
Original Assignee
Memscap SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memscap SA filed Critical Memscap SA
Priority to FR0304651A priority Critical patent/FR2853645B1/fr
Publication of FR2853645A1 publication Critical patent/FR2853645A1/fr
Application granted granted Critical
Publication of FR2853645B1 publication Critical patent/FR2853645B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00126—Static structures not provided for in groups B81C1/00031 - B81C1/00119
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0089—Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems, e.g. of movable element to substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
FR0304651A 2003-04-14 2003-04-14 Procede de fabrication d'un composant electronique incluant une structure micro-electromecanique Expired - Fee Related FR2853645B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0304651A FR2853645B1 (fr) 2003-04-14 2003-04-14 Procede de fabrication d'un composant electronique incluant une structure micro-electromecanique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0304651A FR2853645B1 (fr) 2003-04-14 2003-04-14 Procede de fabrication d'un composant electronique incluant une structure micro-electromecanique

Publications (2)

Publication Number Publication Date
FR2853645A1 FR2853645A1 (fr) 2004-10-15
FR2853645B1 true FR2853645B1 (fr) 2005-07-08

Family

ID=33041850

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0304651A Expired - Fee Related FR2853645B1 (fr) 2003-04-14 2003-04-14 Procede de fabrication d'un composant electronique incluant une structure micro-electromecanique

Country Status (1)

Country Link
FR (1) FR2853645B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69734280D1 (de) * 1997-07-10 2006-02-09 St Microelectronics Srl Verfahren zur Herstellung von hochempfindlichen, kapazitiven und resonierenden integrierten Sensoren, insbesondere Beschleunigungsmesser und Kreisel, und damit hergestellte Sensoren
DE19800745A1 (de) * 1998-01-12 1999-07-15 Bosch Gmbh Robert Design- und Herstellungsverfahren für eine mikromechanische Vorrichtung
US6690040B2 (en) * 2001-09-10 2004-02-10 Agere Systems Inc. Vertical replacement-gate junction field-effect transistor

Also Published As

Publication number Publication date
FR2853645A1 (fr) 2004-10-15

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20051230