FR2821160B1 - Capteur d'humidite du type capacitif, et procede de fabrication dudit capteur - Google Patents

Capteur d'humidite du type capacitif, et procede de fabrication dudit capteur

Info

Publication number
FR2821160B1
FR2821160B1 FR0201929A FR0201929A FR2821160B1 FR 2821160 B1 FR2821160 B1 FR 2821160B1 FR 0201929 A FR0201929 A FR 0201929A FR 0201929 A FR0201929 A FR 0201929A FR 2821160 B1 FR2821160 B1 FR 2821160B1
Authority
FR
France
Prior art keywords
humidity sensor
manufacturing same
capacitive type
type humidity
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0201929A
Other languages
English (en)
Other versions
FR2821160A1 (fr
Inventor
Inao Toyoda
Hajime Matsuhashi
Kazushi Asami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2821160A1 publication Critical patent/FR2821160A1/fr
Application granted granted Critical
Publication of FR2821160B1 publication Critical patent/FR2821160B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/14—Organic dielectrics
    • H01G4/18—Organic dielectrics of synthetic material, e.g. derivatives of cellulose
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture

Landscapes

  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR0201929A 2001-02-20 2002-02-15 Capteur d'humidite du type capacitif, et procede de fabrication dudit capteur Expired - Fee Related FR2821160B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001043973A JP2002243690A (ja) 2001-02-20 2001-02-20 容量式湿度センサおよびその製造方法

Publications (2)

Publication Number Publication Date
FR2821160A1 FR2821160A1 (fr) 2002-08-23
FR2821160B1 true FR2821160B1 (fr) 2005-01-28

Family

ID=18906047

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0201929A Expired - Fee Related FR2821160B1 (fr) 2001-02-20 2002-02-15 Capteur d'humidite du type capacitif, et procede de fabrication dudit capteur

Country Status (4)

Country Link
US (1) US20020114125A1 (fr)
JP (1) JP2002243690A (fr)
DE (1) DE10207147A1 (fr)
FR (1) FR2821160B1 (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6867602B2 (en) * 2002-07-09 2005-03-15 Honeywell International Inc. Methods and systems for capacitive balancing of relative humidity sensors having integrated signal conditioning
JP4498836B2 (ja) * 2004-06-23 2010-07-07 株式会社デンソー 容量素子
JP2006019589A (ja) * 2004-07-02 2006-01-19 Denso Corp 半導体装置
JP4229885B2 (ja) * 2004-08-18 2009-02-25 株式会社デンソー 容量式物理量検出装置
US7181966B2 (en) * 2004-09-08 2007-02-27 Nippon Soken, Inc. Physical quantity sensor and method for manufacturing the same
JP2006084232A (ja) * 2004-09-14 2006-03-30 Denso Corp 容量式湿度センサ
JP4455286B2 (ja) * 2004-11-09 2010-04-21 株式会社日本自動車部品総合研究所 静電容量式湿度センサ
JP2006133192A (ja) * 2004-11-09 2006-05-25 Nippon Soken Inc 静電容量式湿度センサおよびその製造方法
JP4609173B2 (ja) * 2005-04-22 2011-01-12 株式会社デンソー 容量式湿度センサおよびその製造方法
JP4860793B2 (ja) * 2005-05-19 2012-01-25 株式会社日本自動車部品総合研究所 湿度センサの製造方法
JP4674529B2 (ja) * 2005-11-07 2011-04-20 株式会社デンソー 湿度センサ装置及びその製造方法
JP4650246B2 (ja) * 2005-12-06 2011-03-16 株式会社デンソー 湿度センサ
JP4770530B2 (ja) * 2006-03-13 2011-09-14 株式会社デンソー 容量式湿度センサ
JP4947348B2 (ja) * 2006-09-13 2012-06-06 アイシン精機株式会社 車両用ドアハンドル装置
US8425287B2 (en) * 2007-01-23 2013-04-23 Schneider Electric It Corporation In-row air containment and cooling system and method
JP4386295B2 (ja) 2007-04-20 2009-12-16 株式会社日本自動車部品総合研究所 湿度センサ
JP2009092633A (ja) * 2007-10-12 2009-04-30 Denso Corp インピーダンスセンサ
BRPI0907020A2 (pt) 2008-03-26 2015-07-07 Denso Corp Dispositivo sensor de concentração, dispositivo de cálculo da relação de mistura, métodos para calcular uma ralação de mistura do líquido de mistura e para detectar concentrações do fluido e, dispositivo de detecção de concentração
CN103154715B (zh) 2010-10-04 2015-07-22 阿尔卑斯电气株式会社 湿度检测传感器及其制造方法
CN103213942B (zh) * 2013-04-08 2016-03-23 东南大学 一种无源无线电容式湿度传感器的制备方法
CN103698367B (zh) * 2013-11-27 2015-11-25 北京长峰微电科技有限公司 一种加热式湿度传感器及其制作方法
WO2015105531A1 (fr) * 2014-01-08 2015-07-16 Hzo, Inc. Procédés, appareils et systèmes de détection de l'exposition de dispositifs électroniques à l'humidité
CN107144609B (zh) * 2017-04-01 2020-03-13 上海申矽凌微电子科技有限公司 湿敏传感器的制造方法以及使用该方法制造的湿敏传感器
DE102019133190A1 (de) * 2019-12-05 2021-06-10 Bayerische Motoren Werke Aktiengesellschaft Klimaanlage für ein Kraftfahrzeug und Verfahren zum Betreiben einer Klimaanlage

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57153254A (en) * 1981-03-17 1982-09-21 Nissan Motor Co Ltd Electrostatic capacity sensor
DE3339276A1 (de) * 1983-10-28 1985-05-09 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Kapazitiver feuchtefuehler und verfahren zu seiner herstellung
US4603372A (en) * 1984-11-05 1986-07-29 Direction De La Meteorologie Du Ministere Des Transports Method of fabricating a temperature or humidity sensor of the thin film type, and sensors obtained thereby
DE19917717C2 (de) * 1999-04-20 2002-10-17 Joerg Mueller Kapazitiver Feuchtesensor

Also Published As

Publication number Publication date
FR2821160A1 (fr) 2002-08-23
DE10207147A1 (de) 2002-08-29
US20020114125A1 (en) 2002-08-22
JP2002243690A (ja) 2002-08-28

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20151030