FR2794443B1 - Procede de transfert d'elements et dispositif permettant ledit transfert - Google Patents

Procede de transfert d'elements et dispositif permettant ledit transfert

Info

Publication number
FR2794443B1
FR2794443B1 FR9906951A FR9906951A FR2794443B1 FR 2794443 B1 FR2794443 B1 FR 2794443B1 FR 9906951 A FR9906951 A FR 9906951A FR 9906951 A FR9906951 A FR 9906951A FR 2794443 B1 FR2794443 B1 FR 2794443B1
Authority
FR
France
Prior art keywords
transferring elements
providing same
providing
same
transferring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9906951A
Other languages
English (en)
French (fr)
Other versions
FR2794443A1 (fr
Inventor
Michel Bruel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9906951A priority Critical patent/FR2794443B1/fr
Priority to PCT/FR2000/001507 priority patent/WO2000075968A1/fr
Priority to EP00938871A priority patent/EP1183714A1/de
Priority to JP2001502148A priority patent/JP2003501827A/ja
Publication of FR2794443A1 publication Critical patent/FR2794443A1/fr
Application granted granted Critical
Publication of FR2794443B1 publication Critical patent/FR2794443B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
FR9906951A 1999-06-02 1999-06-02 Procede de transfert d'elements et dispositif permettant ledit transfert Expired - Fee Related FR2794443B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9906951A FR2794443B1 (fr) 1999-06-02 1999-06-02 Procede de transfert d'elements et dispositif permettant ledit transfert
PCT/FR2000/001507 WO2000075968A1 (fr) 1999-06-02 2000-05-31 Procede de transfert d'elements et dispositif permettant ledit transfert
EP00938871A EP1183714A1 (de) 1999-06-02 2000-05-31 Verfahren und vorrichtung zur übertragung von elementen
JP2001502148A JP2003501827A (ja) 1999-06-02 2000-05-31 要素を移送するための方法およびそのような移送を可能とするための装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9906951A FR2794443B1 (fr) 1999-06-02 1999-06-02 Procede de transfert d'elements et dispositif permettant ledit transfert

Publications (2)

Publication Number Publication Date
FR2794443A1 FR2794443A1 (fr) 2000-12-08
FR2794443B1 true FR2794443B1 (fr) 2001-06-22

Family

ID=9546278

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9906951A Expired - Fee Related FR2794443B1 (fr) 1999-06-02 1999-06-02 Procede de transfert d'elements et dispositif permettant ledit transfert

Country Status (4)

Country Link
EP (1) EP1183714A1 (de)
JP (1) JP2003501827A (de)
FR (1) FR2794443B1 (de)
WO (1) WO2000075968A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7045878B2 (en) 2001-05-18 2006-05-16 Reveo, Inc. Selectively bonded thin film layer and substrate layer for processing of useful devices
US7163826B2 (en) 2001-09-12 2007-01-16 Reveo, Inc Method of fabricating multi layer devices on buried oxide layer substrates
US6875671B2 (en) 2001-09-12 2005-04-05 Reveo, Inc. Method of fabricating vertical integrated circuits
DE102004027489B4 (de) * 2004-06-04 2017-03-02 Infineon Technologies Ag Verfahren zum Anordnen von Chips eines ersten Substrats auf einem zweiten Substrat
JP5740939B2 (ja) * 2010-11-29 2015-07-01 住友電気工業株式会社 半導体装置の製造方法
US9308649B2 (en) 2013-02-25 2016-04-12 LuxVue Techonology Corporation Mass transfer tool manipulator assembly
CN105074899B (zh) 2013-02-25 2017-06-09 苹果公司 质量转移工具操纵器组件和具有集成位移传感器的微型拾取阵列支座
CN109449102B (zh) * 2018-11-09 2021-03-19 京东方科技集团股份有限公司 驱动基板的制作方法、驱动基板、显示面板及显示装置
KR102156263B1 (ko) * 2019-02-27 2020-09-16 서울대학교산학협력단 전사장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5851530A (ja) * 1981-09-22 1983-03-26 Toshiba Corp 半導体ペレツト配列装置および方法
JPS5984438A (ja) * 1982-11-04 1984-05-16 Nec Corp シ−ト拡張装置
JPS6226833A (ja) * 1985-07-26 1987-02-04 Mitsubishi Electric Corp ダイボンデング装置
JPS6323334A (ja) * 1987-05-29 1988-01-30 Sony Corp 半導体素子処理方法
JPH03212940A (ja) * 1990-01-17 1991-09-18 Rohm Co Ltd リードフレームに対する半導体チップの供給方法

Also Published As

Publication number Publication date
WO2000075968A1 (fr) 2000-12-14
FR2794443A1 (fr) 2000-12-08
JP2003501827A (ja) 2003-01-14
EP1183714A1 (de) 2002-03-06

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20060228