FR2788386B1 - Procede de fabrication d'un micro-actionneur en utilisant une photolithographie - Google Patents
Procede de fabrication d'un micro-actionneur en utilisant une photolithographieInfo
- Publication number
- FR2788386B1 FR2788386B1 FR9908082A FR9908082A FR2788386B1 FR 2788386 B1 FR2788386 B1 FR 2788386B1 FR 9908082 A FR9908082 A FR 9908082A FR 9908082 A FR9908082 A FR 9908082A FR 2788386 B1 FR2788386 B1 FR 2788386B1
- Authority
- FR
- France
- Prior art keywords
- photolithography
- actuator
- micro
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000000206 photolithography Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/081—Shaping or machining of piezoelectric or electrostrictive bodies by coating or depositing using masks, e.g. lift-off
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR19980060643 | 1998-12-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2788386A1 FR2788386A1 (fr) | 2000-07-13 |
FR2788386B1 true FR2788386B1 (fr) | 2005-08-05 |
Family
ID=19567408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9908082A Expired - Fee Related FR2788386B1 (fr) | 1998-12-30 | 1999-06-24 | Procede de fabrication d'un micro-actionneur en utilisant une photolithographie |
Country Status (5)
Country | Link |
---|---|
US (1) | US6265139B1 (fr) |
JP (1) | JP3393093B2 (fr) |
DE (1) | DE19928807B4 (fr) |
FR (1) | FR2788386B1 (fr) |
GB (1) | GB2345380B (fr) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3208386B2 (ja) * | 1999-09-29 | 2001-09-10 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 圧電センサの取り付け方法、アクチュエータアーム、ディスク装置及び接続検査方法 |
KR100398363B1 (ko) * | 2000-12-05 | 2003-09-19 | 삼성전기주식회사 | Fbar 소자 및 그 제조방법 |
JP3957528B2 (ja) * | 2002-03-05 | 2007-08-15 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
DE10302518B4 (de) * | 2003-01-23 | 2005-07-21 | Robert Bosch Gmbh | Verfahren zur bereichsweisen Erzeugung einer Mikrostruktur auf einem Grundkörper |
KR100519764B1 (ko) * | 2003-03-20 | 2005-10-07 | 삼성전자주식회사 | 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법 |
KR100612852B1 (ko) * | 2003-07-18 | 2006-08-14 | 삼성전자주식회사 | GoF/GoP의 질감 표현 방법과, 이를 이용한GoF/GoP 검색 방법 및 장치 |
JP4977946B2 (ja) * | 2004-06-29 | 2012-07-18 | 富士ゼロックス株式会社 | インクジェット記録ヘッドの製造方法 |
US7401403B2 (en) * | 2004-12-20 | 2008-07-22 | Palo Alto Research Center Incorporated | Method for forming ceramic thick film element arrays with fine feature size, high-precision definition, and/or high aspect ratios |
JP5023515B2 (ja) * | 2006-03-06 | 2012-09-12 | Tdk株式会社 | 圧電素子の製造方法。 |
JP2008205048A (ja) * | 2007-02-16 | 2008-09-04 | Seiko Epson Corp | 圧電素子の製造方法及び液体噴射ヘッドの製造方法 |
US8085508B2 (en) * | 2008-03-28 | 2011-12-27 | Hitachi Global Storage Technologies Netherlands B.V. | System, method and apparatus for flexure-integrated microactuator |
CN101714607B (zh) * | 2009-09-22 | 2011-06-22 | 华南理工大学 | 金属铝电极压电陶瓷元件及其制备方法 |
JP2011088422A (ja) * | 2009-10-21 | 2011-05-06 | Samsung Electro-Mechanics Co Ltd | インクジェットヘッドの製造方法 |
JP2014533975A (ja) * | 2011-09-26 | 2014-12-18 | ノースイースタン・ユニバーシティ | カスタマイズ可能な埋め込みセンサ |
KR101280349B1 (ko) | 2012-02-29 | 2013-07-01 | 국방과학연구소 | Mems 공진기 및 그 제조방법 |
EP2765456B1 (fr) * | 2013-02-08 | 2016-05-04 | ams AG | Procédé de masquage pour dispositifs semi-conducteurs avec topographie de surface élevée |
RU2677723C1 (ru) * | 2018-04-27 | 2019-01-21 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Пензенский государственный университет" | Способ получения пьезокерамического материала |
CN109336630B (zh) * | 2018-08-29 | 2021-06-11 | 宁波华源精特金属制品有限公司 | 一种支架及其制备方法 |
CN113851577B (zh) * | 2021-09-23 | 2024-02-20 | 业成光电(深圳)有限公司 | 压电传感器的制作方法 |
DE102021128880B3 (de) | 2021-11-05 | 2022-09-08 | Infineon Technologies Ag | Integriertes energy-harvesting-system |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0464224B1 (fr) * | 1990-01-25 | 2000-10-11 | Dai Nippon Insatsu Kabushiki Kaisha | Procede et matiere pour former des films epais textures |
US5089739A (en) * | 1990-03-19 | 1992-02-18 | Brother Kogyo Kabushiki Kaisha | Laminate type piezoelectric actuator element |
DE69310022T2 (de) * | 1992-06-05 | 1997-08-21 | Seiko Epson Corp | Tintenstrahlaufzeichnungskopf |
JP3140223B2 (ja) * | 1992-11-11 | 2001-03-05 | キヤノン株式会社 | マイクロアクチュエータおよびその作製方法 |
JP3047661B2 (ja) * | 1993-02-16 | 2000-05-29 | ブラザー工業株式会社 | 液滴噴射装置 |
JP2924664B2 (ja) * | 1994-09-28 | 1999-07-26 | 住友電気工業株式会社 | 微細セラミックス構造体の形成方法 |
JP3890634B2 (ja) * | 1995-09-19 | 2007-03-07 | セイコーエプソン株式会社 | 圧電体薄膜素子及びインクジェット式記録ヘッド |
NL1004016C2 (nl) * | 1996-09-12 | 1998-03-13 | Oce Tech Bv | Inktstraal-drukkop. |
JP3820665B2 (ja) * | 1997-02-17 | 2006-09-13 | コニカミノルタホールディングス株式会社 | インクジェットヘッドの製造方法 |
US6107726A (en) * | 1997-07-25 | 2000-08-22 | Materials Systems, Inc. | Serpentine cross-section piezoelectric linear actuator |
-
1999
- 1999-06-15 US US09/334,127 patent/US6265139B1/en not_active Expired - Fee Related
- 1999-06-23 DE DE1999128807 patent/DE19928807B4/de not_active Expired - Fee Related
- 1999-06-23 GB GB9914720A patent/GB2345380B/en not_active Expired - Fee Related
- 1999-06-24 FR FR9908082A patent/FR2788386B1/fr not_active Expired - Fee Related
- 1999-07-14 JP JP20055199A patent/JP3393093B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3393093B2 (ja) | 2003-04-07 |
GB9914720D0 (en) | 1999-08-25 |
US6265139B1 (en) | 2001-07-24 |
GB2345380B (en) | 2001-03-07 |
GB2345380A (en) | 2000-07-05 |
DE19928807B4 (de) | 2006-12-28 |
JP2000196163A (ja) | 2000-07-14 |
FR2788386A1 (fr) | 2000-07-13 |
DE19928807A1 (de) | 2000-07-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20080229 |