FR2786318B1 - Procede de fabrication d'une resistance de charge - Google Patents
Procede de fabrication d'une resistance de chargeInfo
- Publication number
- FR2786318B1 FR2786318B1 FR9814714A FR9814714A FR2786318B1 FR 2786318 B1 FR2786318 B1 FR 2786318B1 FR 9814714 A FR9814714 A FR 9814714A FR 9814714 A FR9814714 A FR 9814714A FR 2786318 B1 FR2786318 B1 FR 2786318B1
- Authority
- FR
- France
- Prior art keywords
- manufacturing
- load resistance
- load
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
- H01L28/24—Resistors with an active material comprising a refractory, transition or noble metal, metal compound or metal alloy, e.g. silicides, oxides, nitrides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/15—Static random access memory [SRAM] devices comprising a resistor load element
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/187,620 US6140198A (en) | 1998-11-06 | 1998-11-06 | Method of fabricating load resistor |
GB9824775A GB2343787B (en) | 1998-11-06 | 1998-11-11 | Method of fabricating load resistor |
JP10321090A JP2000150671A (ja) | 1998-11-06 | 1998-11-11 | 負荷抵抗体の製造方法 |
NL1010614A NL1010614C2 (nl) | 1998-11-06 | 1998-11-20 | Werkwijze voor het fabriceren van een belastingsweerstand. |
DE19853684A DE19853684A1 (de) | 1998-11-06 | 1998-11-20 | Verfahren zur Herstellung eines Lastwiderstands |
FR9814714A FR2786318B1 (fr) | 1998-11-06 | 1998-11-23 | Procede de fabrication d'une resistance de charge |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/187,620 US6140198A (en) | 1998-11-06 | 1998-11-06 | Method of fabricating load resistor |
GB9824775A GB2343787B (en) | 1998-11-06 | 1998-11-11 | Method of fabricating load resistor |
JP10321090A JP2000150671A (ja) | 1998-11-06 | 1998-11-11 | 負荷抵抗体の製造方法 |
NL1010614A NL1010614C2 (nl) | 1998-11-06 | 1998-11-20 | Werkwijze voor het fabriceren van een belastingsweerstand. |
DE19853684A DE19853684A1 (de) | 1998-11-06 | 1998-11-20 | Verfahren zur Herstellung eines Lastwiderstands |
FR9814714A FR2786318B1 (fr) | 1998-11-06 | 1998-11-23 | Procede de fabrication d'une resistance de charge |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2786318A1 FR2786318A1 (fr) | 2000-05-26 |
FR2786318B1 true FR2786318B1 (fr) | 2001-02-16 |
Family
ID=27545103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9814714A Expired - Fee Related FR2786318B1 (fr) | 1998-11-06 | 1998-11-23 | Procede de fabrication d'une resistance de charge |
Country Status (6)
Country | Link |
---|---|
US (1) | US6140198A (fr) |
JP (1) | JP2000150671A (fr) |
DE (1) | DE19853684A1 (fr) |
FR (1) | FR2786318B1 (fr) |
GB (1) | GB2343787B (fr) |
NL (1) | NL1010614C2 (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6228735B1 (en) * | 1998-12-15 | 2001-05-08 | United Microelectronics Corp. | Method of fabricating thin-film transistor |
US6586310B1 (en) * | 1999-08-27 | 2003-07-01 | Agere Systems Inc. | High resistivity film for 4T SRAM |
KR100490575B1 (ko) * | 2001-08-03 | 2005-05-17 | 야마하 가부시키가이샤 | 귀금속 박막 패턴 형성방법 |
US6576544B1 (en) * | 2001-09-28 | 2003-06-10 | Lsi Logic Corporation | Local interconnect |
US6939815B2 (en) * | 2003-08-28 | 2005-09-06 | Intel Corporation | Method for making a semiconductor device having a high-k gate dielectric |
US20060197092A1 (en) * | 2005-03-03 | 2006-09-07 | Randy Hoffman | System and method for forming conductive material on a substrate |
EP2202802B1 (fr) * | 2008-12-24 | 2012-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Circuit de commande et dispositif semi-conducteur |
KR101681884B1 (ko) | 2009-03-27 | 2016-12-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치, 표시장치 및 전자기기 |
DE112010002097T5 (de) * | 2009-05-28 | 2012-04-19 | Ulvac, Inc. | Sputtertarget und Verfahren zur Verarbeitung elnes Sputtertarget |
KR102241249B1 (ko) | 2012-12-25 | 2021-04-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 저항 소자, 표시 장치, 및 전자기기 |
KR102370069B1 (ko) | 2012-12-25 | 2022-03-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US8981374B2 (en) | 2013-01-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6475424B2 (ja) | 2013-06-05 | 2019-02-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3138960A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur erzeugung elektrisch leitender schichten |
US4663825A (en) * | 1984-09-27 | 1987-05-12 | Kabushiki Kaisha Toshiba | Method of manufacturing semiconductor device |
KR900005038B1 (ko) * | 1987-07-31 | 1990-07-18 | 삼성전자 주식회사 | 고저항 다결정 실리콘의 제조방법 |
JP3024143B2 (ja) * | 1989-06-19 | 2000-03-21 | ソニー株式会社 | 半導体装置の製法 |
JPH03218666A (ja) * | 1989-08-31 | 1991-09-26 | Mitsubishi Electric Corp | 半導体記憶装置およびその製造方法 |
JP3082923B2 (ja) * | 1989-12-26 | 2000-09-04 | ソニー株式会社 | 半導体装置の製法 |
WO1993003500A1 (fr) * | 1991-08-01 | 1993-02-18 | Sierra Semiconductor Corporation | Procede de formation d'un element resistant dans un dispositif a semi-conducteur et memoire ram statique obtenue par ce procede |
US5622884A (en) * | 1996-05-30 | 1997-04-22 | Winbond Electronics Corp. | Method for manufacturing a semiconductor memory cell and a polysilicon load resistor of the semiconductor memory cell |
US5883417A (en) * | 1996-06-27 | 1999-03-16 | Winbond Electronics Corporation | Poly-load resistor for SRAM cell |
TW380317B (en) * | 1998-01-17 | 2000-01-21 | Winbond Electronics Corp | Manufacturing method for poly-load resistors of SRAM |
US6017790A (en) * | 1998-07-06 | 2000-01-25 | United Microelectronics Corp. | Method of manufacturing embedded dynamic random access memory |
-
1998
- 1998-11-06 US US09/187,620 patent/US6140198A/en not_active Expired - Fee Related
- 1998-11-11 GB GB9824775A patent/GB2343787B/en not_active Expired - Fee Related
- 1998-11-11 JP JP10321090A patent/JP2000150671A/ja active Pending
- 1998-11-20 DE DE19853684A patent/DE19853684A1/de not_active Withdrawn
- 1998-11-20 NL NL1010614A patent/NL1010614C2/nl not_active IP Right Cessation
- 1998-11-23 FR FR9814714A patent/FR2786318B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2000150671A (ja) | 2000-05-30 |
FR2786318A1 (fr) | 2000-05-26 |
GB9824775D0 (en) | 1999-01-06 |
GB2343787A (en) | 2000-05-17 |
US6140198A (en) | 2000-10-31 |
DE19853684A1 (de) | 2000-05-25 |
NL1010614C2 (nl) | 2000-05-23 |
GB2343787B (en) | 2001-01-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |