FR2766616B1 - Procede de fabrication de microstructures metalliques - Google Patents
Procede de fabrication de microstructures metalliquesInfo
- Publication number
- FR2766616B1 FR2766616B1 FR9809474A FR9809474A FR2766616B1 FR 2766616 B1 FR2766616 B1 FR 2766616B1 FR 9809474 A FR9809474 A FR 9809474A FR 9809474 A FR9809474 A FR 9809474A FR 2766616 B1 FR2766616 B1 FR 2766616B1
- Authority
- FR
- France
- Prior art keywords
- manufacturing metallic
- metallic microstructures
- microstructures
- manufacturing
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/0019—Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/08—Perforated or foraminous objects, e.g. sieves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0323—Grooves
- B81B2203/033—Trenches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0102—Surface micromachining
- B81C2201/0105—Sacrificial layer
- B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Metallurgy (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
- Micromachines (AREA)
- Electrodes Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19732250A DE19732250A1 (de) | 1997-07-26 | 1997-07-26 | Verfahren zur Herstellung metallischer Mikrostrukturen |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2766616A1 FR2766616A1 (fr) | 1999-01-29 |
FR2766616B1 true FR2766616B1 (fr) | 2004-03-12 |
Family
ID=7837009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9809474A Expired - Fee Related FR2766616B1 (fr) | 1997-07-26 | 1998-07-24 | Procede de fabrication de microstructures metalliques |
Country Status (6)
Country | Link |
---|---|
US (1) | US6030515A (fr) |
JP (1) | JPH11100689A (fr) |
CH (1) | CH693158A5 (fr) |
DE (1) | DE19732250A1 (fr) |
FR (1) | FR2766616B1 (fr) |
GB (1) | GB2327811B (fr) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19800745A1 (de) * | 1998-01-12 | 1999-07-15 | Bosch Gmbh Robert | Design- und Herstellungsverfahren für eine mikromechanische Vorrichtung |
US6334942B1 (en) * | 1999-02-09 | 2002-01-01 | Tessera, Inc. | Selective removal of dielectric materials and plating process using same |
US6436265B1 (en) * | 1999-03-29 | 2002-08-20 | Canon Kabushiki Kaisha | Microstructure array, and apparatus and method for forming the microstructure array, and a mold for fabricating a microstructure array |
US6440849B1 (en) | 1999-10-18 | 2002-08-27 | Agere Systems Guardian Corp. | Microstructure control of copper interconnects |
US6254593B1 (en) * | 1999-12-10 | 2001-07-03 | Advanced Cardiovascular Systems, Inc. | Bifurcated stent delivery system having retractable sheath |
DE10019408C2 (de) * | 2000-04-19 | 2003-11-13 | Bosch Gmbh Robert | Feldeffekttransistor, insbesondere zur Verwendung als Sensorelement oder Beschleunigungssensor, und Verfahren zu dessen Herstellung |
DE10200869A1 (de) | 2002-01-11 | 2003-07-31 | Infineon Technologies Ag | Verfahren zum Erzeugen einer Schutzabdeckung für ein Bauelement |
US6821901B2 (en) * | 2002-02-28 | 2004-11-23 | Seung-Jin Song | Method of through-etching substrate |
DE10316777B4 (de) | 2003-04-11 | 2005-11-24 | Infineon Technologies Ag | Verfahren zum Erzeugen einer Schutzabdeckung für ein Bauelement |
DE10316776B4 (de) * | 2003-04-11 | 2005-03-17 | Infineon Technologies Ag | Verfahren zum Erzeugen einer Schutzabdeckung für ein Bauelement |
EP2124514A1 (fr) | 2008-05-23 | 2009-11-25 | Nederlandse Centrale Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO | Préparation d'un motif métallique sur un substrat plastique |
EP2230206B1 (fr) * | 2009-03-13 | 2013-07-17 | Nivarox-FAR S.A. | Moule pour galvanoplastie et son procédé de fabrication |
WO2013071060A1 (fr) * | 2011-11-09 | 2013-05-16 | Robert Bosch Gmbh | Procédé de formation de tranchées larges à l'aide d'un lingot de silicium sacrificiel |
JP5786906B2 (ja) | 2013-08-02 | 2015-09-30 | オムロン株式会社 | 電鋳部品の製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3642476A (en) * | 1970-05-21 | 1972-02-15 | Ibm | Method of preparing glass masters |
US4643804A (en) * | 1985-07-25 | 1987-02-17 | At&T Bell Laboratories | Forming thick dielectric at the bottoms of trenches utilized in integrated-circuit devices |
DE3879771D1 (de) * | 1987-05-27 | 1993-05-06 | Siemens Ag | Aetzverfahren zum erzeugen von lochoeffnungen oder graeben in n-dotiertem silizium. |
DE3727142C2 (de) * | 1987-08-14 | 1994-02-24 | Kernforschungsz Karlsruhe | Verfahren zur Herstellung von Mikrosensoren mit integrierter Signalverarbeitung |
US4849370A (en) * | 1987-12-21 | 1989-07-18 | Texas Instruments Incorporated | Anodizable strain layer for SOI semiconductor structures |
JPH0228932A (ja) * | 1988-07-19 | 1990-01-31 | Fujitsu Ltd | 半導体装置 |
US5145571A (en) * | 1990-08-03 | 1992-09-08 | Bipolar Integrated Technology, Inc. | Gold interconnect with sidewall-spacers |
US5061650A (en) * | 1991-01-17 | 1991-10-29 | Micron Technology, Inc. | Method for formation of a stacked capacitor |
JPH04359518A (ja) * | 1991-06-06 | 1992-12-11 | Nec Corp | 半導体装置の製造方法 |
JP3367113B2 (ja) * | 1992-04-27 | 2003-01-14 | 株式会社デンソー | 加速度センサ |
US5412265A (en) * | 1993-04-05 | 1995-05-02 | Ford Motor Company | Planar micro-motor and method of fabrication |
JPH07118849A (ja) * | 1993-10-20 | 1995-05-09 | Matsushita Electric Ind Co Ltd | 導体薄膜パターンの形成方法 |
US5559058A (en) * | 1994-11-15 | 1996-09-24 | Peter S. Zory, Jr. | Method for producing native oxides on compound semiconductors |
-
1997
- 1997-07-26 DE DE19732250A patent/DE19732250A1/de not_active Ceased
-
1998
- 1998-07-03 CH CH01423/98A patent/CH693158A5/de not_active IP Right Cessation
- 1998-07-23 US US09/121,081 patent/US6030515A/en not_active Expired - Fee Related
- 1998-07-23 JP JP10207403A patent/JPH11100689A/ja not_active Withdrawn
- 1998-07-24 GB GB9816240A patent/GB2327811B/en not_active Expired - Fee Related
- 1998-07-24 FR FR9809474A patent/FR2766616B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CH693158A5 (de) | 2003-03-14 |
JPH11100689A (ja) | 1999-04-13 |
GB2327811B (en) | 1999-12-01 |
DE19732250A1 (de) | 1999-01-28 |
FR2766616A1 (fr) | 1999-01-29 |
GB2327811A (en) | 1999-02-03 |
GB9816240D0 (en) | 1998-09-23 |
US6030515A (en) | 2000-02-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20080331 |