FR2785390B1 - Determination de la forme d'un echantillon par la mesure de la pente d'une surface au moyen d'un microscope electronique a balayage - Google Patents

Determination de la forme d'un echantillon par la mesure de la pente d'une surface au moyen d'un microscope electronique a balayage

Info

Publication number
FR2785390B1
FR2785390B1 FR9913787A FR9913787A FR2785390B1 FR 2785390 B1 FR2785390 B1 FR 2785390B1 FR 9913787 A FR9913787 A FR 9913787A FR 9913787 A FR9913787 A FR 9913787A FR 2785390 B1 FR2785390 B1 FR 2785390B1
Authority
FR
France
Prior art keywords
slope
determination
sample
measuring
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9913787A
Other languages
English (en)
Other versions
FR2785390A1 (fr
Inventor
Stephen Into
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger Technologies Inc
Original Assignee
Schlumberger Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Technologies Inc filed Critical Schlumberger Technologies Inc
Publication of FR2785390A1 publication Critical patent/FR2785390A1/fr
Application granted granted Critical
Publication of FR2785390B1 publication Critical patent/FR2785390B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/04—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring contours or curvatures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2814—Measurement of surface topography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
FR9913787A 1998-11-04 1999-11-04 Determination de la forme d'un echantillon par la mesure de la pente d'une surface au moyen d'un microscope electronique a balayage Expired - Fee Related FR2785390B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/186,495 US6157032A (en) 1998-11-04 1998-11-04 Sample shape determination by measurement of surface slope with a scanning electron microscope

Publications (2)

Publication Number Publication Date
FR2785390A1 FR2785390A1 (fr) 2000-05-05
FR2785390B1 true FR2785390B1 (fr) 2002-08-09

Family

ID=22685179

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9913787A Expired - Fee Related FR2785390B1 (fr) 1998-11-04 1999-11-04 Determination de la forme d'un echantillon par la mesure de la pente d'une surface au moyen d'un microscope electronique a balayage

Country Status (5)

Country Link
US (1) US6157032A (fr)
JP (1) JP2000146558A (fr)
KR (1) KR20000034930A (fr)
DE (1) DE19951147A1 (fr)
FR (1) FR2785390B1 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6627887B1 (en) * 2000-06-20 2003-09-30 Advanced Micro Devices, Inc. System and method for constructing a profile of a structure in an integrated circuit
US6812045B1 (en) 2000-09-20 2004-11-02 Kla-Tencor, Inc. Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation
US7130029B2 (en) * 2000-09-20 2006-10-31 Kla-Tencor Technologies Corp. Methods and systems for determining an adhesion characteristic and a thickness of a specimen
US6673637B2 (en) 2000-09-20 2004-01-06 Kla-Tencor Technologies Methods and systems for determining a presence of macro defects and overlay of a specimen
US6891610B2 (en) * 2000-09-20 2005-05-10 Kla-Tencor Technologies Corp. Methods and systems for determining an implant characteristic and a presence of defects on a specimen
US6782337B2 (en) 2000-09-20 2004-08-24 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension an a presence of defects on a specimen
US6694284B1 (en) 2000-09-20 2004-02-17 Kla-Tencor Technologies Corp. Methods and systems for determining at least four properties of a specimen
US6891627B1 (en) 2000-09-20 2005-05-10 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension and overlay of a specimen
US6919957B2 (en) * 2000-09-20 2005-07-19 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen
US6714892B2 (en) * 2001-03-12 2004-03-30 Agere Systems, Inc. Three dimensional reconstruction metrology
JP3893539B2 (ja) * 2002-04-23 2007-03-14 株式会社日立ハイテクノロジーズ 形状測定方法及びその装置
US6930308B1 (en) * 2002-07-11 2005-08-16 Kla-Tencor Technologies Corporation SEM profile and surface reconstruction using multiple data sets
GB2392149B (en) * 2002-08-23 2006-06-07 Linpac Containers Ltd Blank and associated container
US6832515B2 (en) * 2002-09-09 2004-12-21 Schlumberger Technology Corporation Method for measuring formation properties with a time-limited formation test
US7178392B2 (en) * 2003-08-20 2007-02-20 Schlumberger Technology Corporation Determining the pressure of formation fluid in earth formations surrounding a borehole
JP4272121B2 (ja) 2004-06-23 2009-06-03 株式会社日立ハイテクノロジーズ Ｓｅｍによる立体形状計測方法およびその装置
JP4262690B2 (ja) 2005-03-16 2009-05-13 株式会社日立ハイテクノロジーズ 形状測定装置および形状測定方法
US8136395B2 (en) 2007-12-31 2012-03-20 Schlumberger Technology Corporation Systems and methods for well data analysis
KR101137045B1 (ko) * 2008-03-19 2012-04-19 도판 인사츠 가부시키가이샤 미세 구조체 검사 방법, 미세 구조체 검사 장치, 및 미세 구조체 검사 프로그램 기록 매체
TWI513993B (zh) 2013-03-26 2015-12-21 Ind Tech Res Inst 三軸磁場感測器、製作磁場感測結構的方法與磁場感測電路
FR3016990B1 (fr) * 2014-01-28 2017-05-05 Inst Nat Sciences Appliquees Lyon Procede de cartographie des orientations cristallines d'un echantillon en materiau polycristallin

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法
JPS6275206A (ja) * 1985-09-30 1987-04-07 Hitachi Ltd 電子ビ−ム測長装置
JPH0663758B2 (ja) * 1987-10-14 1994-08-22 株式会社東芝 パターンの測定方法
US4912313A (en) * 1987-11-27 1990-03-27 Hitachi Ltd. Method of measuring surface topography by using scanning electron microscope, and apparatus therefor
JPH01311551A (ja) * 1988-06-08 1989-12-15 Toshiba Corp パターン形状測定装置

Also Published As

Publication number Publication date
US6157032A (en) 2000-12-05
FR2785390A1 (fr) 2000-05-05
JP2000146558A (ja) 2000-05-26
KR20000034930A (ko) 2000-06-26
DE19951147A1 (de) 2000-05-11

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