FR2779274B1 - Circuit integre avec couche d'arret et procede de fabrication associe - Google Patents

Circuit integre avec couche d'arret et procede de fabrication associe

Info

Publication number
FR2779274B1
FR2779274B1 FR9806687A FR9806687A FR2779274B1 FR 2779274 B1 FR2779274 B1 FR 2779274B1 FR 9806687 A FR9806687 A FR 9806687A FR 9806687 A FR9806687 A FR 9806687A FR 2779274 B1 FR2779274 B1 FR 2779274B1
Authority
FR
France
Prior art keywords
manufacturing
integrated circuit
stop layer
stop
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9806687A
Other languages
English (en)
French (fr)
Other versions
FR2779274A1 (fr
Inventor
Philippe Gayet
Eric Granger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR9806687A priority Critical patent/FR2779274B1/fr
Priority to JP11135255A priority patent/JPH11354640A/ja
Priority to EP99401205A priority patent/EP0961318A1/fr
Priority to US09/320,201 priority patent/US6355552B1/en
Publication of FR2779274A1 publication Critical patent/FR2779274A1/fr
Application granted granted Critical
Publication of FR2779274B1 publication Critical patent/FR2779274B1/fr
Priority to US10/046,322 priority patent/US6762497B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/42—Vias, e.g. via plugs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/074—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/081—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/081—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts
    • H10W20/089—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts using processes for implementing desired shapes or dispositions of the openings, e.g. double patterning
FR9806687A 1998-05-27 1998-05-27 Circuit integre avec couche d'arret et procede de fabrication associe Expired - Fee Related FR2779274B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9806687A FR2779274B1 (fr) 1998-05-27 1998-05-27 Circuit integre avec couche d'arret et procede de fabrication associe
JP11135255A JPH11354640A (ja) 1998-05-27 1999-05-17 集積回路を製造するプロセスおよび集積回路
EP99401205A EP0961318A1 (fr) 1998-05-27 1999-05-19 Circuit intégré avec couche d'arrêt
US09/320,201 US6355552B1 (en) 1998-05-27 1999-05-26 Integrated circuit with stop layer and associated fabrication process
US10/046,322 US6762497B2 (en) 1998-05-27 2001-10-23 Integrated circuit with stop layer and associated fabrication process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9806687A FR2779274B1 (fr) 1998-05-27 1998-05-27 Circuit integre avec couche d'arret et procede de fabrication associe

Publications (2)

Publication Number Publication Date
FR2779274A1 FR2779274A1 (fr) 1999-12-03
FR2779274B1 true FR2779274B1 (fr) 2000-08-18

Family

ID=9526773

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9806687A Expired - Fee Related FR2779274B1 (fr) 1998-05-27 1998-05-27 Circuit integre avec couche d'arret et procede de fabrication associe

Country Status (4)

Country Link
US (2) US6355552B1 (https=)
EP (1) EP0961318A1 (https=)
JP (1) JPH11354640A (https=)
FR (1) FR2779274B1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6977224B2 (en) * 2000-12-28 2005-12-20 Intel Corporation Method of electroless introduction of interconnect structures
US7008872B2 (en) * 2002-05-03 2006-03-07 Intel Corporation Use of conductive electrolessly deposited etch stop layers, liner layers and via plugs in interconnect structures
KR20040061817A (ko) * 2002-12-31 2004-07-07 주식회사 하이닉스반도체 반도체소자의 금속배선 형성방법
US7087104B2 (en) 2003-06-26 2006-08-08 Intel Corporation Preparation of electroless deposition solutions
US7767578B2 (en) * 2007-01-11 2010-08-03 United Microelectronics Corp. Damascene interconnection structure and dual damascene process thereof
JP5837754B2 (ja) * 2011-03-23 2015-12-24 Ｄｏｗａメタルテック株式会社 金属−セラミックス接合基板およびその製造方法
JP5923334B2 (ja) * 2012-02-22 2016-05-24 ルネサスエレクトロニクス株式会社 半導体装置
JP6816964B2 (ja) * 2016-03-10 2021-01-20 新光電気工業株式会社 配線基板、半導体装置及び配線基板の製造方法
US10862610B1 (en) 2019-11-11 2020-12-08 X Development Llc Multi-channel integrated photonic wavelength demultiplexer
US11187854B2 (en) * 2019-11-15 2021-11-30 X Development Llc Two-channel integrated photonic wavelength demultiplexer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5110712A (en) * 1987-06-12 1992-05-05 Hewlett-Packard Company Incorporation of dielectric layers in a semiconductor
US5321211A (en) * 1992-04-30 1994-06-14 Sgs-Thomson Microelectronics, Inc. Integrated circuit via structure
JP2934353B2 (ja) * 1992-06-24 1999-08-16 三菱電機株式会社 半導体装置およびその製造方法
US5371047A (en) * 1992-10-30 1994-12-06 International Business Machines Corporation Chip interconnection having a breathable etch stop layer
US5244837A (en) * 1993-03-19 1993-09-14 Micron Semiconductor, Inc. Semiconductor electrical interconnection methods
US5817574A (en) * 1993-12-29 1998-10-06 Intel Corporation Method of forming a high surface area interconnection structure
US5451543A (en) * 1994-04-25 1995-09-19 Motorola, Inc. Straight sidewall profile contact opening to underlying interconnect and method for making the same
JPH08241924A (ja) * 1995-03-06 1996-09-17 Sony Corp 接続孔を有する半導体装置及びその製造方法
US5834845A (en) * 1995-09-21 1998-11-10 Advanced Micro Devices, Inc. Interconnect scheme for integrated circuits
JPH10242271A (ja) * 1997-02-28 1998-09-11 Sony Corp 半導体装置及びその製造方法
US5935868A (en) * 1997-03-31 1999-08-10 Intel Corporation Interconnect structure and method to achieve unlanded vias for low dielectric constant materials
US5891799A (en) * 1997-08-18 1999-04-06 Industrial Technology Research Institute Method for making stacked and borderless via structures for multilevel metal interconnections on semiconductor substrates
US6020255A (en) * 1998-07-13 2000-02-01 Taiwan Semiconductor Manufacturing Company Dual damascene interconnect process with borderless contact
US6048787A (en) * 1998-09-08 2000-04-11 Winbond Electronics Corp. Borderless contacts for dual-damascene interconnect process

Also Published As

Publication number Publication date
US6355552B1 (en) 2002-03-12
FR2779274A1 (fr) 1999-12-03
US20020079589A1 (en) 2002-06-27
JPH11354640A (ja) 1999-12-24
EP0961318A1 (fr) 1999-12-01
US6762497B2 (en) 2004-07-13

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20100129