FR2759120B1 - Pompe cryogenique, et blindage pour pompe cryogenique - Google Patents

Pompe cryogenique, et blindage pour pompe cryogenique

Info

Publication number
FR2759120B1
FR2759120B1 FR9801359A FR9801359A FR2759120B1 FR 2759120 B1 FR2759120 B1 FR 2759120B1 FR 9801359 A FR9801359 A FR 9801359A FR 9801359 A FR9801359 A FR 9801359A FR 2759120 B1 FR2759120 B1 FR 2759120B1
Authority
FR
France
Prior art keywords
cryogenic pump
shielding
cryogenic
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9801359A
Other languages
English (en)
Other versions
FR2759120A1 (fr
Inventor
Allen J Bartlett
John J Casello
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of FR2759120A1 publication Critical patent/FR2759120A1/fr
Application granted granted Critical
Publication of FR2759120B1 publication Critical patent/FR2759120B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
FR9801359A 1997-02-05 1998-02-05 Pompe cryogenique, et blindage pour pompe cryogenique Expired - Fee Related FR2759120B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/795,981 US5782096A (en) 1997-02-05 1997-02-05 Cryopump with improved shielding

Publications (2)

Publication Number Publication Date
FR2759120A1 FR2759120A1 (fr) 1998-08-07
FR2759120B1 true FR2759120B1 (fr) 2002-02-15

Family

ID=25166947

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9801359A Expired - Fee Related FR2759120B1 (fr) 1997-02-05 1998-02-05 Pompe cryogenique, et blindage pour pompe cryogenique

Country Status (6)

Country Link
US (1) US5782096A (fr)
JP (1) JP2001510523A (fr)
DE (1) DE19881966T1 (fr)
FR (1) FR2759120B1 (fr)
GB (1) GB2335469B (fr)
WO (1) WO1998034029A1 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10184541A (ja) * 1996-12-27 1998-07-14 Anelva Corp 真空排気装置
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
US6318091B1 (en) 1999-10-28 2001-11-20 Helix Technology Corporation Cryopump system with modular electronics
US6263679B1 (en) 2000-04-05 2001-07-24 Helix Technology Corporation Particulate dam for cryopump flange
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
US7389645B2 (en) * 2005-11-04 2008-06-24 Applied Materials, Inc. Radiation shield for cryogenic pump for high temperature physical vapor deposition
JP5254993B2 (ja) 2007-01-17 2013-08-07 ブルックス オートメーション インコーポレイテッド 圧力バーストが生じない大容量クライオポンプ
US20090038319A1 (en) * 2007-08-08 2009-02-12 Sumitomo Heavy Industries, Ltd. Cryopanel and Cryopump Using the Cryopanel
JP2011521201A (ja) * 2008-05-21 2011-07-21 ブルックス オートメーション インコーポレイテッド リニア駆動を利用した極低温冷凍機
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
US8844298B2 (en) 2008-11-18 2014-09-30 S2 Corporation Vibration reducing sample mount with thermal coupling
US8307666B2 (en) * 2009-03-27 2012-11-13 S2 Corporation Methods and apparatus for providing rotational movement and thermal stability to a cooled sample
EP2598814A2 (fr) 2010-07-30 2013-06-05 Brooks Automation, Inc. Cryopompe à haute vitesse pour réfrigérateurs multiples
KR102033142B1 (ko) * 2011-02-09 2019-10-16 브룩스 오토메이션, 인크. 극저온 펌프
JP2011153629A (ja) * 2011-05-17 2011-08-11 Sumitomo Heavy Ind Ltd クライオポンプ
JP5822747B2 (ja) * 2012-02-02 2015-11-24 住友重機械工業株式会社 クライオポンプ
WO2015143219A1 (fr) * 2014-03-21 2015-09-24 Brooks Automation, Inc. Réseau frontal hybride de pompe cryogénique
GB2588826A (en) * 2019-11-11 2021-05-12 Edwards Vacuum Llc Cryopump

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1587077A (fr) * 1968-08-01 1970-03-13
US3721101A (en) * 1971-01-28 1973-03-20 Cryogenic Technology Inc Method and apparatus for cooling a load
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
US4454722A (en) * 1981-05-22 1984-06-19 Helix Technology Corporation Cryopump
US4356701A (en) 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump
DE3232324C2 (de) * 1982-08-31 1986-08-28 Leybold-Heraeus GmbH, 5000 Köln Refrigerator-betriebene Kryopumpe
US4599869A (en) * 1984-03-12 1986-07-15 Ozin Geoffrey A Cryogenic deposition of catalysts
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
US5056319A (en) * 1989-03-18 1991-10-15 Leybold Aktiengesellschaft Refrigerator-operated apparatus
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
US5156007A (en) * 1991-01-30 1992-10-20 Helix Technology Corporation Cryopump with improved second stage passageway
US5231840A (en) * 1991-03-28 1993-08-03 Daikin Industries, Ltd. Cryopump
DE4201755A1 (de) * 1992-01-23 1993-07-29 Leybold Ag Kryopumpe mit einem im wesentlichen topffoermigen gehaeuse
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap

Also Published As

Publication number Publication date
JP2001510523A (ja) 2001-07-31
GB9917520D0 (en) 1999-09-29
FR2759120A1 (fr) 1998-08-07
DE19881966T1 (de) 1999-12-16
US5782096A (en) 1998-07-21
GB2335469A (en) 1999-09-22
GB2335469B (en) 2000-11-15
WO1998034029A1 (fr) 1998-08-06

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20091030