FR2703448B1 - Standard de calibration. - Google Patents

Standard de calibration.

Info

Publication number
FR2703448B1
FR2703448B1 FR9303730A FR9303730A FR2703448B1 FR 2703448 B1 FR2703448 B1 FR 2703448B1 FR 9303730 A FR9303730 A FR 9303730A FR 9303730 A FR9303730 A FR 9303730A FR 2703448 B1 FR2703448 B1 FR 2703448B1
Authority
FR
France
Prior art keywords
calibration standard
calibration
standard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9303730A
Other languages
English (en)
Other versions
FR2703448A1 (fr
Inventor
Ausserre Dominique
Gallot Yves
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ATTM
Original Assignee
ATTM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ATTM filed Critical ATTM
Priority to FR9303730A priority Critical patent/FR2703448B1/fr
Publication of FR2703448A1 publication Critical patent/FR2703448A1/fr
Application granted granted Critical
Publication of FR2703448B1 publication Critical patent/FR2703448B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • G01Q40/02—Calibration standards and methods of fabrication thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
FR9303730A 1993-03-31 1993-03-31 Standard de calibration. Expired - Fee Related FR2703448B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9303730A FR2703448B1 (fr) 1993-03-31 1993-03-31 Standard de calibration.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9303730A FR2703448B1 (fr) 1993-03-31 1993-03-31 Standard de calibration.

Publications (2)

Publication Number Publication Date
FR2703448A1 FR2703448A1 (fr) 1994-10-07
FR2703448B1 true FR2703448B1 (fr) 1995-06-23

Family

ID=9445553

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9303730A Expired - Fee Related FR2703448B1 (fr) 1993-03-31 1993-03-31 Standard de calibration.

Country Status (1)

Country Link
FR (1) FR2703448B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109073358A (zh) * 2016-05-10 2018-12-21 奥博学术大学 用于基于电磁辐射和/或机械波确定成像的分辨率的制品

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19651029C2 (de) * 1996-12-09 1999-12-02 Ibm Kalibrierstandard für Profilometer und Herstellverfahren
DE10356829B3 (de) * 2003-12-05 2005-08-18 Robert Bosch Gmbh Messnormal für interferometrische Systeme
CN105445293B (zh) * 2014-08-26 2018-09-07 中芯国际集成电路制造(上海)有限公司 Tem放大率校准方法及用于校准的样品的形成方法
FI126062B (en) * 2014-11-24 2016-06-15 Åbo Akademi Åbo Akademi University Method for calibrating 3D imaging and system for 3D imaging
FI128204B (en) * 2016-12-28 2019-12-31 Helsingin Yliopisto Reference piece to improve vertical resolution of radiation based imaging
NL2028090B1 (en) * 2021-04-29 2022-11-10 Nearfield Instr B V Method of calibrating in a scanning probe microscopy system an optical microscope, calibration structure and scanning probe microscopy device.
CN114234845B (zh) * 2022-02-23 2022-05-24 板石智能科技(深圳)有限公司 周期纳米结构形貌参数测量方法、装置、设备及介质

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02155156A (ja) * 1988-12-06 1990-06-14 Seiko Instr Inc 標準試料及び位置合わせ方法
JPH03273101A (ja) * 1990-03-23 1991-12-04 Sharp Corp 走査形トンネル顕微鏡による測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109073358A (zh) * 2016-05-10 2018-12-21 奥博学术大学 用于基于电磁辐射和/或机械波确定成像的分辨率的制品

Also Published As

Publication number Publication date
FR2703448A1 (fr) 1994-10-07

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