FR2677752A1 - Capteur interferometrique de grands deplacements. - Google Patents

Capteur interferometrique de grands deplacements. Download PDF

Info

Publication number
FR2677752A1
FR2677752A1 FR9107070A FR9107070A FR2677752A1 FR 2677752 A1 FR2677752 A1 FR 2677752A1 FR 9107070 A FR9107070 A FR 9107070A FR 9107070 A FR9107070 A FR 9107070A FR 2677752 A1 FR2677752 A1 FR 2677752A1
Authority
FR
France
Prior art keywords
optical
displacements
sensor according
wedge
corner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR9107070A
Other languages
English (en)
French (fr)
Other versions
FR2677752B1 (enrdf_load_stackoverflow
Inventor
Breda Jean-Marc
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Priority to FR9107070A priority Critical patent/FR2677752A1/fr
Publication of FR2677752A1 publication Critical patent/FR2677752A1/fr
Application granted granted Critical
Publication of FR2677752B1 publication Critical patent/FR2677752B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR9107070A 1991-06-11 1991-06-11 Capteur interferometrique de grands deplacements. Granted FR2677752A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9107070A FR2677752A1 (fr) 1991-06-11 1991-06-11 Capteur interferometrique de grands deplacements.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9107070A FR2677752A1 (fr) 1991-06-11 1991-06-11 Capteur interferometrique de grands deplacements.

Publications (2)

Publication Number Publication Date
FR2677752A1 true FR2677752A1 (fr) 1992-12-18
FR2677752B1 FR2677752B1 (enrdf_load_stackoverflow) 1997-02-28

Family

ID=9413676

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9107070A Granted FR2677752A1 (fr) 1991-06-11 1991-06-11 Capteur interferometrique de grands deplacements.

Country Status (1)

Country Link
FR (1) FR2677752A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10330363B4 (de) * 2003-07-01 2005-08-11 BAM Bundesanstalt für Materialforschung und -prüfung Fabry-Pérot-Faserinterferometer
RU2423663C1 (ru) * 2010-03-09 2011-07-10 Игорь Аркадьевич Ефимович Интерферометр

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1541747A (fr) * 1967-08-28 1968-10-11 Comp Generale Electricite Dispositif de détection et de mesure à distance de déplacements
GB1348640A (en) * 1970-09-04 1974-03-20 Science Res Council Measuring apparatus and systems
CH599551A5 (en) * 1976-11-03 1978-05-31 Charles Barbey Very slow rotary movement measurement system
GB2219393A (en) * 1988-03-15 1989-12-06 Nde Instr Ltd Measuring a variable using interferometry
EP0353647A2 (de) * 1988-08-01 1990-02-07 Deutsches Zentrum für Luft- und Raumfahrt e.V. Einrichtung zur Messung des Drehwinkels oder der Winkelstellung eines rotierenden Objektes

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1541747A (fr) * 1967-08-28 1968-10-11 Comp Generale Electricite Dispositif de détection et de mesure à distance de déplacements
GB1348640A (en) * 1970-09-04 1974-03-20 Science Res Council Measuring apparatus and systems
CH599551A5 (en) * 1976-11-03 1978-05-31 Charles Barbey Very slow rotary movement measurement system
GB2219393A (en) * 1988-03-15 1989-12-06 Nde Instr Ltd Measuring a variable using interferometry
EP0353647A2 (de) * 1988-08-01 1990-02-07 Deutsches Zentrum für Luft- und Raumfahrt e.V. Einrichtung zur Messung des Drehwinkels oder der Winkelstellung eines rotierenden Objektes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10330363B4 (de) * 2003-07-01 2005-08-11 BAM Bundesanstalt für Materialforschung und -prüfung Fabry-Pérot-Faserinterferometer
RU2423663C1 (ru) * 2010-03-09 2011-07-10 Игорь Аркадьевич Ефимович Интерферометр

Also Published As

Publication number Publication date
FR2677752B1 (enrdf_load_stackoverflow) 1997-02-28

Similar Documents

Publication Publication Date Title
JP2865880B2 (ja) 干渉計センサ
CN102322801B (zh) 高信噪比摆动式低相干干涉位移解调装置及其解调方法
US20030086093A1 (en) All fiber autocorrelator
EP3394560A1 (fr) Dispositif et procede de mesure de hauteur en presence de couches minces
JPH0552540A (ja) 干渉計レーザ表面粗さ計
GB2365142A (en) Jamin type interferometer, retroreflector and manufacture of beam splitter
FR2580072A1 (enrdf_load_stackoverflow)
JPH07286939A (ja) 材料の屈折率を測定する装置および測定法
US20240068893A1 (en) Systems and methods for fiber optic fourier spectrometry measurement
JPH0545161B2 (enrdf_load_stackoverflow)
JP2006500571A (ja) 干渉測定装置
EP0481918B1 (fr) Dispositif optique à interférométrie en lumière blanche
KR102656778B1 (ko) 원자 힘 현미경 기반 간섭계
FR2677752A1 (fr) Capteur interferometrique de grands deplacements.
US8253943B2 (en) Interferometer
CN111174735A (zh) 一种二维直线度和直线位移同时测量干涉装置及测量方法
JPH06288735A (ja) 放物面鏡形状検査測定用の位相共役干渉計
FR2765964A1 (fr) Dispositif optique de mesure de distance avec une grande precision
FR2567264A1 (fr) Appareil d'extensometrie, en particulier d'extensometrie multiaxiale, et procede correspondant
CN111121614A (zh) 一种二维直线度和直线位移同时测量干涉装置
WO1991010880A2 (fr) Dispositif de detection a distance d'une grandeur physique, fonctionnant en reflexion
GB2107079A (en) Improvements in or relating to interferometers
JPS6211106A (ja) 干渉法膜厚測定装置
RU2303237C2 (ru) Интерферометрическое устройство для измерения оптической толщины прозрачного слоя или зазора
Pliskin et al. Reflectivity thickness corrections for silicon dioxide films on silicon for VAMFO

Legal Events

Date Code Title Description
ST Notification of lapse