FR2665033B3 - Dispositif de reglage pour micro-mouvements. - Google Patents

Dispositif de reglage pour micro-mouvements.

Info

Publication number
FR2665033B3
FR2665033B3 FR9109322A FR9109322A FR2665033B3 FR 2665033 B3 FR2665033 B3 FR 2665033B3 FR 9109322 A FR9109322 A FR 9109322A FR 9109322 A FR9109322 A FR 9109322A FR 2665033 B3 FR2665033 B3 FR 2665033B3
Authority
FR
France
Prior art keywords
movements
micro
adjustment device
adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9109322A
Other languages
English (en)
Other versions
FR2665033A1 (fr
Inventor
Thomas Berghaus
Peter Klaede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omicron Vakuumphysik GmbH
Original Assignee
Omicron Vakuumphysik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omicron Vakuumphysik GmbH filed Critical Omicron Vakuumphysik GmbH
Publication of FR2665033A1 publication Critical patent/FR2665033A1/fr
Application granted granted Critical
Publication of FR2665033B3 publication Critical patent/FR2665033B3/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/208—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using shear or torsion displacement, e.g. d15 type devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20264—Piezoelectric devices
FR9109322A 1990-07-21 1991-07-19 Dispositif de reglage pour micro-mouvements. Expired - Lifetime FR2665033B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4023311A DE4023311A1 (de) 1990-07-21 1990-07-21 Verstellvorrichtung fuer mikrobewegungen

Publications (2)

Publication Number Publication Date
FR2665033A1 FR2665033A1 (fr) 1992-01-24
FR2665033B3 true FR2665033B3 (fr) 1992-12-18

Family

ID=6410810

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9109322A Expired - Lifetime FR2665033B3 (fr) 1990-07-21 1991-07-19 Dispositif de reglage pour micro-mouvements.

Country Status (5)

Country Link
US (1) US5237238A (fr)
JP (1) JPH07119814B2 (fr)
DE (1) DE4023311A1 (fr)
FR (1) FR2665033B3 (fr)
GB (1) GB2246236B (fr)

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US6093989A (en) * 1990-06-04 2000-07-25 Joffe; Benjamin Advanced magnetically-stabilized couplings and bearings, for use in mechanical drives
US5986372A (en) * 1990-06-04 1999-11-16 Joffe; Benjamin Advanced magnetically-stabilized couplings and bearings, for use in mechanical drives
EP0552346B1 (fr) * 1991-08-13 1997-04-16 Hans Richter Moteur electro-actorique
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US5380095A (en) * 1992-11-16 1995-01-10 Pryor; Paul L. Bearing arrangement having magnetic attraction between sliders and clearance mechanism
DE4496456D2 (de) * 1993-08-30 1997-07-31 Stm Medtech Starnberg Endoskop mit bewegbarem vorderen Endbereich
US5589723A (en) * 1994-03-29 1996-12-31 Minolta Co., Ltd. Driving apparatus using transducer
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DE4432249C1 (de) * 1994-09-10 1996-01-18 Hommelwerke Gmbh Vorschubeinrichtung
IL111597A (en) * 1994-11-10 1999-03-12 Nanomotion Ltd Piezoelectric propulsion unit for vertical raising and lowering of a window
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US5751090A (en) * 1995-05-17 1998-05-12 Burleigh Instruments Inc Peristaltic driver apparatus
US5786654A (en) * 1995-06-08 1998-07-28 Minolta Co., Ltd. Movable stage utilizing electromechanical transducer
DE19521060A1 (de) * 1995-06-09 1996-12-12 Wolf Gmbh Richard Haltearmsystem, insbesondere für chirurgische Instrumente, mit Armsegmenten und Klemmvorrichtungen zum Arretieren der Armsegmente
DE19542452A1 (de) * 1995-11-14 1996-08-08 Wilhelm Koenig Translations - Rotations - Modul mit Multi-Piezo-Antrieb
RU2153219C2 (ru) * 1996-06-03 2000-07-20 Окатов Юрий Владимирович Пьезоэлектрический шаговый двигатель
RU2167486C2 (ru) * 1996-06-05 2001-05-20 Окатов Юрий Владимирович Пьезоэлектрический шаговый двигатель
RU2161364C2 (ru) * 1996-06-05 2000-12-27 Окатов Юрий Владимирович Пьезоэлектрический шаговый двигатель
RU2156535C2 (ru) * 1996-06-05 2000-09-20 Окатов Юрий Владимирович Пьезоэлектрический линейный шаговый двигатель
RU2167489C2 (ru) * 1996-06-05 2001-05-20 Окатов Юрий Владимирович Пьезоэлектрический шаговый двигатель
RU2101840C1 (ru) * 1996-06-10 1998-01-10 Санкт-Петербургская государственная академия аэрокосмического приборостроения Шаговый двигатель
RU2167487C2 (ru) * 1996-06-05 2001-05-20 Окатов Юрий Владимирович Пьезоэлектрический шаговый двигатель
GB9617076D0 (en) 1996-08-14 1996-09-25 Intelligent Manufacturing Syst Bearings and supports
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JPH1144899A (ja) * 1997-07-25 1999-02-16 Minolta Co Ltd 電気機械変換素子を使用した駆動装置
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AU2001243481A1 (en) 2000-03-07 2001-09-17 Viking Technologies, Inc. Method and system for automatically tuning a stringed instrument
DE10012751B4 (de) * 2000-03-16 2004-05-27 Carl Zeiss Jena Gmbh Verstellvorrichtung zum Verschieben einzelner Elemente von optischen Systemen oder von Meßsystemen
US6548938B2 (en) 2000-04-18 2003-04-15 Viking Technologies, L.C. Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator
US6717332B2 (en) 2000-04-18 2004-04-06 Viking Technologies, L.C. Apparatus having a support structure and actuator
GB2369489B (en) * 2000-11-23 2004-03-10 Khaled Karrai Inertial rotation device
US6759790B1 (en) 2001-01-29 2004-07-06 Viking Technologies, L.C. Apparatus for moving folded-back arms having a pair of opposing surfaces in response to an electrical activation
US6891170B1 (en) 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
US6967335B1 (en) 2002-06-17 2005-11-22 Zyvex Corporation Manipulation system for manipulating a sample under study with a microscope
CA2488481C (fr) * 2002-06-21 2011-09-06 Viking Technologies, L.C. Moteur piezo-electrique monobloc
US6849989B2 (en) * 2002-10-31 2005-02-01 Andreas Schmid Translation and rotation positioning motor
JP4095913B2 (ja) * 2003-02-26 2008-06-04 株式会社日立ハイテクノロジーズ 高精度微小移動装置
WO2004094102A1 (fr) * 2003-04-22 2004-11-04 Bookham Technology Plc Ensemble de chargeur en boucle fermee, a sortie lineaire
WO2005008796A2 (fr) * 2003-07-11 2005-01-27 Bookham Technology Plc Ensemble actionneur etanche
JP2007506981A (ja) * 2003-09-23 2007-03-22 ザイベックス コーポレーション Ｆｉｂで調製した試料を把持する素子を使用した顕微鏡検査のための方法、システム、および装置
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KR20060043141A (ko) * 2004-02-23 2006-05-15 지벡스 코포레이션 대전 입자 빔 장치 프로브 조작기
US7326293B2 (en) * 2004-03-26 2008-02-05 Zyvex Labs, Llc Patterned atomic layer epitaxy
US7481642B2 (en) * 2004-04-23 2009-01-27 Husky Injection Molding Systems Ltd. Method and apparatus for controlling a vent gap with active material elements
US20050236725A1 (en) * 2004-04-23 2005-10-27 Niewels Joachim J Method and apparatus for countering mold deflection and misalignment using active material elements
US20050236729A1 (en) * 2004-04-23 2005-10-27 Arnott Robin A Method and apparatus for vibrating melt in an injection molding machine using active material elements
US7293981B2 (en) * 2004-04-23 2007-11-13 Husky Injection Molding Systems Ltd. Apparatus for injection molding using active material elements
US20050236727A1 (en) * 2004-04-23 2005-10-27 Niewels Joachim J Method and apparatus for mold component locking using active material elements
US20050238757A1 (en) * 2004-04-23 2005-10-27 Niewels Joachim J Method and apparatus for assisting ejection from an injection molding machine using active material elements
US7072735B2 (en) * 2004-04-23 2006-07-04 Husky Injection Molding Systems Ltd. Control system for utilizing active material elements in a molding system
US7165958B2 (en) * 2004-04-23 2007-01-23 Husky Injection Molding Systems Ltd. Apparatus for adjustable hot runner assembly seals and tip height using active material elements
DE102004049371B4 (de) * 2004-10-09 2015-05-21 Forschungszentrum Jülich GmbH Nanomanipulator zum Analysieren oder Bearbeiten von Objekten
KR100687717B1 (ko) * 2004-12-16 2007-02-27 한국전자통신연구원 압전소자를 채용한 마이크로 스테이지
ATE368941T1 (de) * 2005-02-17 2007-08-15 Agie Sa Piezoelektrisches antriebselement
ATE551733T1 (de) 2005-08-24 2012-04-15 Smaract Gmbh Rotatorische trägheitsantriebsvorrichtung
US7466063B2 (en) * 2006-06-27 2008-12-16 Korea Institute Of Science And Technology Micro manipulator for movement of electrode, driving method thereof, and measuring device of brain signal using the same
WO2008015700A2 (fr) * 2006-07-31 2008-02-07 Hilaal Alam Procédé de nanopositionnement d'un objet et dispositif associé
DE102006052175B4 (de) 2006-11-02 2013-03-07 SmarAct Holding GmbH Trägheitsantriebsvorrichtung
JP4951322B2 (ja) * 2006-12-08 2012-06-13 ペンタックスリコーイメージング株式会社 移動装置
JP5137406B2 (ja) * 2007-01-11 2013-02-06 キヤノン株式会社 振動型駆動装置
KR101017908B1 (ko) * 2008-12-29 2011-03-04 한국과학기술연구원 뇌 신경신호 측정을 위한 전극 이동용 마이크로 매니퓰레이터
US8143763B2 (en) * 2009-05-29 2012-03-27 Rhk Technology, Inc. Linear piezoelectric nano-positioner
GB0914825D0 (en) * 2009-08-26 2009-09-30 Univ Leiden A piezoelectric drive assembly
US8606426B2 (en) * 2009-10-23 2013-12-10 Academia Sinica Alignment and anti-drift mechanism
US8269157B2 (en) * 2009-10-23 2012-09-18 Academia Sinica Optical imaging system
JP2012044832A (ja) * 2010-08-23 2012-03-01 Canon Inc 振動波駆動装置及び画像振れ補正装置
WO2012116168A2 (fr) 2011-02-23 2012-08-30 Rhk Technology, Inc. Microscope intégré, procédés et dispositifs associés
JP5799641B2 (ja) * 2011-07-29 2015-10-28 株式会社村田製作所 弾性波装置
KR20130088479A (ko) * 2012-01-31 2013-08-08 삼성전자주식회사 슬립-스틱방식 압전 구동 장치
EP3537591B1 (fr) * 2018-03-09 2020-11-18 ETA SA Manufacture Horlogère Suisse Moteur piezoelectrique rotatif a precontrainte axiale
CN109378997B (zh) * 2018-10-09 2020-02-21 浙江师范大学 一种永磁控制式磁流变液压电旋转驱动器

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Also Published As

Publication number Publication date
DE4023311C2 (fr) 1992-12-17
JPH06317681A (ja) 1994-11-15
GB2246236A (en) 1992-01-22
US5237238A (en) 1993-08-17
JPH07119814B2 (ja) 1995-12-20
DE4023311A1 (de) 1992-01-23
FR2665033A1 (fr) 1992-01-24
GB9115703D0 (en) 1991-09-04
GB2246236B (en) 1995-03-22

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