FR2657999B1 - Tube a vide micro-miniature et procede de fabrication. - Google Patents

Tube a vide micro-miniature et procede de fabrication.

Info

Publication number
FR2657999B1
FR2657999B1 FR9100964A FR9100964A FR2657999B1 FR 2657999 B1 FR2657999 B1 FR 2657999B1 FR 9100964 A FR9100964 A FR 9100964A FR 9100964 A FR9100964 A FR 9100964A FR 2657999 B1 FR2657999 B1 FR 2657999B1
Authority
FR
France
Prior art keywords
micro
manufacturing
vacuum tube
miniature vacuum
miniature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9100964A
Other languages
English (en)
Other versions
FR2657999A1 (fr
Inventor
Kenji Hosogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of FR2657999A1 publication Critical patent/FR2657999A1/fr
Application granted granted Critical
Publication of FR2657999B1 publication Critical patent/FR2657999B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J21/00—Vacuum tubes
    • H01J21/02—Tubes with a single discharge path
    • H01J21/06—Tubes with a single discharge path having electrostatic control means only
    • H01J21/10—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
    • H01J21/105—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
FR9100964A 1990-01-29 1991-01-29 Tube a vide micro-miniature et procede de fabrication. Expired - Fee Related FR2657999B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012690A JP2968014B2 (ja) 1990-01-29 1990-01-29 微小真空管及びその製造方法

Publications (2)

Publication Number Publication Date
FR2657999A1 FR2657999A1 (fr) 1991-08-09
FR2657999B1 true FR2657999B1 (fr) 1996-11-22

Family

ID=12018430

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9100964A Expired - Fee Related FR2657999B1 (fr) 1990-01-29 1991-01-29 Tube a vide micro-miniature et procede de fabrication.

Country Status (4)

Country Link
US (1) US5245247A (fr)
JP (1) JP2968014B2 (fr)
FR (1) FR2657999B1 (fr)
GB (1) GB2242064B (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2613669B2 (ja) * 1990-09-27 1997-05-28 工業技術院長 電界放出素子及びその製造方法
JP3231528B2 (ja) * 1993-08-17 2001-11-26 株式会社東芝 電界放出型冷陰極およびその製造方法
KR970000963B1 (ko) * 1992-12-22 1997-01-21 재단법인 한국전자통신연구소 광게이트를 갖는 진공 트랜지스터 및 그 제조방법
US5502314A (en) * 1993-07-05 1996-03-26 Matsushita Electric Industrial Co., Ltd. Field-emission element having a cathode with a small radius
US5610471A (en) * 1993-07-07 1997-03-11 Varian Associates, Inc. Single field emission device
US5340997A (en) * 1993-09-20 1994-08-23 Hewlett-Packard Company Electrostatically shielded field emission microelectronic device
US5401963A (en) * 1993-11-01 1995-03-28 Rosemount Analytical Inc. Micromachined mass spectrometer
US5793152A (en) * 1993-12-03 1998-08-11 Frederick M. Mako Gated field-emitters with integrated planar lenses
JPH0850850A (ja) * 1994-08-09 1996-02-20 Agency Of Ind Science & Technol 電界放出型電子放出素子およびその製造方法
DE19609234A1 (de) * 1996-03-09 1997-09-11 Deutsche Telekom Ag Röhrensysteme und Herstellungsverfahren hierzu
US6989631B2 (en) * 2001-06-08 2006-01-24 Sony Corporation Carbon cathode of a field emission display with in-laid isolation barrier and support
US6682382B2 (en) * 2001-06-08 2004-01-27 Sony Corporation Method for making wires with a specific cross section for a field emission display
US6624590B2 (en) * 2001-06-08 2003-09-23 Sony Corporation Method for driving a field emission display
US6756730B2 (en) * 2001-06-08 2004-06-29 Sony Corporation Field emission display utilizing a cathode frame-type gate and anode with alignment method
US6663454B2 (en) * 2001-06-08 2003-12-16 Sony Corporation Method for aligning field emission display components
US7002290B2 (en) * 2001-06-08 2006-02-21 Sony Corporation Carbon cathode of a field emission display with integrated isolation barrier and support on substrate
US6791278B2 (en) * 2002-04-16 2004-09-14 Sony Corporation Field emission display using line cathode structure
US6873118B2 (en) * 2002-04-16 2005-03-29 Sony Corporation Field emission cathode structure using perforated gate
US6747416B2 (en) * 2002-04-16 2004-06-08 Sony Corporation Field emission display with deflecting MEMS electrodes
US7012582B2 (en) * 2002-11-27 2006-03-14 Sony Corporation Spacer-less field emission display
US20040145299A1 (en) * 2003-01-24 2004-07-29 Sony Corporation Line patterned gate structure for a field emission display
US7071629B2 (en) * 2003-03-31 2006-07-04 Sony Corporation Image display device incorporating driver circuits on active substrate and other methods to reduce interconnects
US20040189552A1 (en) * 2003-03-31 2004-09-30 Sony Corporation Image display device incorporating driver circuits on active substrate to reduce interconnects
CA2672554C (fr) 2004-07-20 2012-01-03 Warner-Lambert Company Llc Nouvelles formes de [r-(r*,r*)]-2-(4-fluorophenyl).beta.,.delta.-dihydroxy-5-(isopropyl)-3-phenyl-4-[(phenylamino)carbonyl]-1h-pyrrole-1-heptanoatede calcium (2:1)
JP4811520B2 (ja) * 2009-02-20 2011-11-09 住友金属鉱山株式会社 半導体装置用基板の製造方法、半導体装置の製造方法、半導体装置用基板及び半導体装置
CN110246889B (zh) * 2019-05-10 2021-05-28 西安交通大学 一种双栅型真空场发射三极管结构及其制作方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3814968A (en) * 1972-02-11 1974-06-04 Lucas Industries Ltd Solid state radiation sensitive field electron emitter and methods of fabrication thereof
US4168213A (en) * 1976-04-29 1979-09-18 U.S. Philips Corporation Field emission device and method of forming same
US4578614A (en) * 1982-07-23 1986-03-25 The United States Of America As Represented By The Secretary Of The Navy Ultra-fast field emitter array vacuum integrated circuit switching device
US4513308A (en) * 1982-09-23 1985-04-23 The United States Of America As Represented By The Secretary Of The Navy p-n Junction controlled field emitter array cathode
NL8600676A (nl) * 1986-03-17 1987-10-16 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenstroom.
GB8621600D0 (en) * 1986-09-08 1987-03-18 Gen Electric Co Plc Vacuum devices
US4904895A (en) * 1987-05-06 1990-02-27 Canon Kabushiki Kaisha Electron emission device
GB8720792D0 (en) * 1987-09-04 1987-10-14 Gen Electric Co Plc Vacuum devices
US4855636A (en) * 1987-10-08 1989-08-08 Busta Heinz H Micromachined cold cathode vacuum tube device and method of making
JP2623738B2 (ja) * 1988-08-08 1997-06-25 松下電器産業株式会社 画像表示装置
JPH0340332A (ja) * 1989-07-07 1991-02-21 Matsushita Electric Ind Co Ltd 電界放出型スウィチング素子およびその製造方法

Also Published As

Publication number Publication date
FR2657999A1 (fr) 1991-08-09
GB9101507D0 (en) 1991-03-06
GB2242064B (en) 1994-05-25
JP2968014B2 (ja) 1999-10-25
GB2242064A (en) 1991-09-18
JPH03225725A (ja) 1991-10-04
US5245247A (en) 1993-09-14

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Legal Events

Date Code Title Description
ST Notification of lapse