FR2648955A1 - Procede de regulation de la position du foyer dans un vaporiseur a arc sous vide - Google Patents

Procede de regulation de la position du foyer dans un vaporiseur a arc sous vide Download PDF

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Publication number
FR2648955A1
FR2648955A1 FR9005477A FR9005477A FR2648955A1 FR 2648955 A1 FR2648955 A1 FR 2648955A1 FR 9005477 A FR9005477 A FR 9005477A FR 9005477 A FR9005477 A FR 9005477A FR 2648955 A1 FR2648955 A1 FR 2648955A1
Authority
FR
France
Prior art keywords
cathode
potential
isolated
magnetic field
erosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR9005477A
Other languages
English (en)
French (fr)
Inventor
Dietmar Schulze
Ruediger Wilberg
Bernd Rother
Joerg Vetter
Jan Siegel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochvakuum Dresden VEB
Original Assignee
Hochvakuum Dresden VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochvakuum Dresden VEB filed Critical Hochvakuum Dresden VEB
Publication of FR2648955A1 publication Critical patent/FR2648955A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Plasma Technology (AREA)
FR9005477A 1989-06-22 1990-04-30 Procede de regulation de la position du foyer dans un vaporiseur a arc sous vide Withdrawn FR2648955A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD32985689A DD285463A5 (de) 1989-06-22 1989-06-22 Verfahren zur regelung der brennfleckpostion bei einem vakuumbogenverdampfer

Publications (1)

Publication Number Publication Date
FR2648955A1 true FR2648955A1 (fr) 1990-12-28

Family

ID=5610116

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9005477A Withdrawn FR2648955A1 (fr) 1989-06-22 1990-04-30 Procede de regulation de la position du foyer dans un vaporiseur a arc sous vide

Country Status (3)

Country Link
DD (1) DD285463A5 (de)
DE (1) DE4008850A1 (de)
FR (1) FR2648955A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4223592C2 (de) * 1992-06-24 2001-05-17 Leybold Ag Lichtbogen-Verdampfungsvorrichtung
DE4329155A1 (de) * 1993-08-30 1995-03-02 Bloesch W Ag Magnetfeldkathode
DE10006336C2 (de) * 2000-02-10 2002-01-17 Dresden Ev Inst Festkoerper Verfahren zum Abscheiden dünner Schichten
PL2140476T3 (pl) 2007-04-17 2016-11-30 Źródło do próżniowo-łukowego osadzania z fazy gazowej oraz komora do łukowego osadzania z fazy gazowej ze źródłem do próżniowo-łukowego osadzania z fazy gazowej
US11342168B2 (en) 2017-02-14 2022-05-24 Oerlikon Surface Solutions Ag, Pfaffikon Cathodic arc evaporation with predetermined cathode material removal
RU195652U1 (ru) * 2019-08-05 2020-02-03 Ооо «Инноватехпром» Устройство для распыления металла в вакууме
DE102022118927A1 (de) 2022-07-28 2024-02-08 Rainer Cremer Verfahren zum Verdampfen einer Kathode in einem Vakuumlichtbogenverdampfer

Also Published As

Publication number Publication date
DD285463A5 (de) 1990-12-12
DE4008850A1 (de) 1991-01-03

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ST Notification of lapse