FR2637587B1 - Procede pour former un revetement ceramique par irradiation par un faisceau laser - Google Patents

Procede pour former un revetement ceramique par irradiation par un faisceau laser

Info

Publication number
FR2637587B1
FR2637587B1 FR898913363A FR8913363A FR2637587B1 FR 2637587 B1 FR2637587 B1 FR 2637587B1 FR 898913363 A FR898913363 A FR 898913363A FR 8913363 A FR8913363 A FR 8913363A FR 2637587 B1 FR2637587 B1 FR 2637587B1
Authority
FR
France
Prior art keywords
forming
laser beam
beam irradiation
ceramic coating
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR898913363A
Other languages
English (en)
Other versions
FR2637587A1 (fr
Inventor
Haruo Hanagata
Kathuhide Oshima
Hidesato Igarashi
Noboru Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dipsol Chemicals Co Ltd
Original Assignee
Dipsol Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1054074A external-priority patent/JP2802433B2/ja
Priority claimed from JP7464789A external-priority patent/JPH02254174A/ja
Application filed by Dipsol Chemicals Co Ltd filed Critical Dipsol Chemicals Co Ltd
Publication of FR2637587A1 publication Critical patent/FR2637587A1/fr
Application granted granted Critical
Publication of FR2637587B1 publication Critical patent/FR2637587B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/4535—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied as a solution, emulsion, dispersion or suspension
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemically Coating (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
FR898913363A 1988-10-12 1989-10-12 Procede pour former un revetement ceramique par irradiation par un faisceau laser Expired - Fee Related FR2637587B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP25645888 1988-10-12
JP1054074A JP2802433B2 (ja) 1988-10-12 1989-03-07 レーザ照射によるセラミックス被膜の形成方法
JP7464789A JPH02254174A (ja) 1989-03-27 1989-03-27 レーザ照射によるセラミックス被膜の形成方法

Publications (2)

Publication Number Publication Date
FR2637587A1 FR2637587A1 (fr) 1990-04-13
FR2637587B1 true FR2637587B1 (fr) 1992-08-28

Family

ID=27295164

Family Applications (1)

Application Number Title Priority Date Filing Date
FR898913363A Expired - Fee Related FR2637587B1 (fr) 1988-10-12 1989-10-12 Procede pour former un revetement ceramique par irradiation par un faisceau laser

Country Status (4)

Country Link
US (1) US5057335A (fr)
DE (1) DE3933976C2 (fr)
FR (1) FR2637587B1 (fr)
GB (1) GB2227028B (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0832304B2 (ja) * 1989-08-18 1996-03-29 株式会社日立製作所 無機ポリマ薄膜の形成方法
JPH03115586A (ja) * 1989-09-28 1991-05-16 Nkk Corp セラミック膜の形成方法
US5273788A (en) * 1992-07-20 1993-12-28 The University Of Utah Preparation of diamond and diamond-like thin films
ZA983867B (en) * 1997-05-16 1998-11-13 Henkel Corp Lithium and vanadium containing sealing composition and process therewith
US6315823B1 (en) * 1998-05-15 2001-11-13 Henkel Corporation Lithium and vanadium containing sealing composition and process therewith
JP3383838B2 (ja) * 1999-02-25 2003-03-10 独立行政法人産業技術総合研究所 金属酸化物の製造方法及び微細パターンの形成方法
DE10128664A1 (de) * 2001-06-15 2003-01-30 Univ Clausthal Tech Verfahren und Vorrichtung zur Herstellung von keramischen Formförpern
US6753039B2 (en) * 2001-08-03 2004-06-22 Elisha Holding Llc Electrolytic and electroless process for treating metallic surfaces and products formed thereby
JP4666575B2 (ja) * 2004-11-08 2011-04-06 東京エレクトロン株式会社 セラミック溶射部材の製造方法、該方法を実行するためのプログラム、記憶媒体、及びセラミック溶射部材
WO2007013184A1 (fr) * 2005-07-29 2007-02-01 Tocalo Co., Ltd. Element enduit d'un film pulverise thermiquement de y2o3 et son procede de fabrication
US20090130436A1 (en) * 2005-08-22 2009-05-21 Yoshio Harada Spray coating member having excellent heat emmision property and so on and method for producing the same
KR101021459B1 (ko) * 2005-08-22 2011-03-15 도카로 가부시키가이샤 내손상성 등이 우수한 용사 피막 피복 부재 및 그 제조방법
JP4571561B2 (ja) * 2005-09-08 2010-10-27 トーカロ株式会社 耐プラズマエロージョン性に優れる溶射皮膜被覆部材およびその製造方法
US7648782B2 (en) * 2006-03-20 2010-01-19 Tokyo Electron Limited Ceramic coating member for semiconductor processing apparatus
US7850864B2 (en) * 2006-03-20 2010-12-14 Tokyo Electron Limited Plasma treating apparatus and plasma treating method
JP4643478B2 (ja) * 2006-03-20 2011-03-02 トーカロ株式会社 半導体加工装置用セラミック被覆部材の製造方法
DE102016224127B4 (de) * 2016-12-05 2022-05-25 Innovent E.V. Verfahren zum Beschichten eines Substrats
DE102018111014B4 (de) * 2018-05-08 2023-03-30 Ernst-Abbe-Hochschule Jena Verfahren zum dreidimensionalen additiven Aufbau eines Formkörpers aus Wasserglas
MX2022013124A (es) * 2020-04-23 2023-01-11 Sintx Technologies Inc Métodos para revestimiento con láser de nitruro de silicio sobre un substrato metálico.

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2166526A5 (en) * 1971-12-28 1973-08-17 Boudet Jean Concentrated beam particle melting - at focal point of several beams
US4256545A (en) * 1978-09-05 1981-03-17 The Dow Chemical Company Method of oxygen electrode preparation and product thereof
US4224072A (en) * 1978-09-11 1980-09-23 University Of Utah Pit and fissure sealant for teeth
US4380558A (en) * 1979-10-02 1983-04-19 Nippon Electric Co., Ltd. Process for manufacturing a protective polysilicate layer of a record member by a laser beam and a magnetic record member suitably manufactured thereby
US4340617A (en) * 1980-05-19 1982-07-20 Massachusetts Institute Of Technology Method and apparatus for depositing a material on a surface
SU1125228A1 (ru) * 1981-06-30 1984-11-23 Предприятие П/Я Р-6930 Состав дл создани светопоглощающих покрытий на издели х,упрочн емых лазерным излучением
JPS586527A (ja) * 1981-07-02 1983-01-14 Nec Corp 可撓性磁気記録体
US4349583A (en) * 1981-07-28 1982-09-14 International Business Machines Corporation Laser enhanced maskless method for plating and simultaneous plating and etching of patterns
JPS5893811A (ja) * 1981-11-27 1983-06-03 Toyota Central Res & Dev Lab Inc レ−ザ加熱方法
US4514456A (en) * 1982-09-20 1985-04-30 Rca Corporation Method of making a coded marking in a glass workpiece employing a trisilicate coating and product thereof
GB2150158B (en) * 1983-11-19 1986-11-26 Alain James Duggan Treatment of boiler tubes
US4615913A (en) * 1984-03-13 1986-10-07 Kaman Sciences Corporation Multilayered chromium oxide bonded, hardened and densified coatings and method of making same
EP0300846B1 (fr) * 1987-06-30 1991-12-18 Institut Français du Pétrole Procédé de modification superficielle de la surface d'un substrat par formation d'un alliage, application du procédé à la fabrication notamment d'alliages ferreux et de catalyseurs, alliages obtenus par le procédé
FR2618198B1 (fr) * 1987-07-17 1989-12-08 Framatome Sa Dispositif de calage antivibratoire de composants d'une installation et en particulier barres antivibratoires de calage des tubes d'un generateur de vapeur.
JPH10292237A (ja) * 1997-04-10 1998-11-04 Toray Ind Inc 複合加工糸およびその製造方法

Also Published As

Publication number Publication date
GB8922895D0 (en) 1989-11-29
DE3933976C2 (de) 1997-09-18
DE3933976A1 (de) 1990-04-19
FR2637587A1 (fr) 1990-04-13
GB2227028A (en) 1990-07-18
US5057335A (en) 1991-10-15
GB2227028B (en) 1993-01-27

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Legal Events

Date Code Title Description
ST Notification of lapse