FR2616272B1 - Dispositif en materiaux semiconducteurs realise sur un substrat de parametre de maille different, application a un laser et procede de realisation - Google Patents
Dispositif en materiaux semiconducteurs realise sur un substrat de parametre de maille different, application a un laser et procede de realisationInfo
- Publication number
- FR2616272B1 FR2616272B1 FR8707709A FR8707709A FR2616272B1 FR 2616272 B1 FR2616272 B1 FR 2616272B1 FR 8707709 A FR8707709 A FR 8707709A FR 8707709 A FR8707709 A FR 8707709A FR 2616272 B1 FR2616272 B1 FR 2616272B1
- Authority
- FR
- France
- Prior art keywords
- laser
- producing
- application
- semiconductor material
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000463 material Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02376—Carbon, e.g. diamond-like carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02425—Conductive materials, e.g. metallic silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02441—Group 14 semiconducting materials
- H01L21/0245—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
- H01L21/02507—Alternating layers, e.g. superlattice
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
- H01L29/151—Compositional structures
- H01L29/152—Compositional structures with quantum effects only in vertical direction, i.e. layered structures with quantum effects solely resulting from vertical potential variation
- H01L29/155—Comprising only semiconductor materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/26—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys
- H01L29/267—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/17—Semiconductor lasers comprising special layers
- H01S2301/173—The laser chip comprising special buffer layers, e.g. dislocation prevention or reduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
- H01S5/0213—Sapphire, quartz or diamond based substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34306—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000nm, e.g. InP based 1300 and 1500nm lasers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Recrystallisation Techniques (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8707709A FR2616272B1 (fr) | 1987-06-02 | 1987-06-02 | Dispositif en materiaux semiconducteurs realise sur un substrat de parametre de maille different, application a un laser et procede de realisation |
PCT/FR1988/000269 WO1988010007A1 (fr) | 1987-06-02 | 1988-05-27 | Heterostructure, application a un laser et procede de realisation |
EP88904979A EP0316414A1 (fr) | 1987-06-02 | 1988-05-27 | Heterostructure, application a un laser et procede de realisation |
JP63504627A JPH01503583A (ja) | 1987-06-02 | 1988-05-27 | 異なる格子パラメータを有する基板の上に形成された半導体装置、レーザへの応用および製造方法 |
US07/313,974 US5012476A (en) | 1987-06-02 | 1988-05-27 | Device of semiconductor materials formed on a substrate having a different lattice parameter and application to a laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8707709A FR2616272B1 (fr) | 1987-06-02 | 1987-06-02 | Dispositif en materiaux semiconducteurs realise sur un substrat de parametre de maille different, application a un laser et procede de realisation |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2616272A1 FR2616272A1 (fr) | 1988-12-09 |
FR2616272B1 true FR2616272B1 (fr) | 1990-10-26 |
Family
ID=9351670
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8707709A Expired - Lifetime FR2616272B1 (fr) | 1987-06-02 | 1987-06-02 | Dispositif en materiaux semiconducteurs realise sur un substrat de parametre de maille different, application a un laser et procede de realisation |
Country Status (5)
Country | Link |
---|---|
US (1) | US5012476A (fr) |
EP (1) | EP0316414A1 (fr) |
JP (1) | JPH01503583A (fr) |
FR (1) | FR2616272B1 (fr) |
WO (1) | WO1988010007A1 (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2664056B2 (ja) * | 1987-08-10 | 1997-10-15 | 住友電気工業株式会社 | 薄膜単結晶基板 |
US5373171A (en) * | 1987-03-12 | 1994-12-13 | Sumitomo Electric Industries, Ltd. | Thin film single crystal substrate |
EP0420188A1 (fr) * | 1989-09-27 | 1991-04-03 | Sumitomo Electric Industries, Ltd. | Structure semi-conductrice à hétérojonction |
US5371382A (en) * | 1992-04-27 | 1994-12-06 | Kobe Steel Usa, Inc. | Amorphous silicon rectifying contact on diamond and method for making same |
DE4310569A1 (de) * | 1993-03-26 | 1994-09-29 | Daimler Benz Ag | Laserdiode |
DE4310571A1 (de) * | 1993-03-26 | 1994-09-29 | Daimler Benz Ag | Leuchtdiode |
US5665977A (en) * | 1994-02-16 | 1997-09-09 | Sony Corporation | Semiconductor light emitting device with defect decomposing and blocking layers |
DE4415600A1 (de) * | 1994-05-04 | 1995-11-30 | Daimler Benz Ag | Elektronisches Bauteil mit einer Halbleiter-Komposit-Struktur |
FR2724769B1 (fr) * | 1994-09-16 | 1996-12-06 | Thomson Csf | Procede de realisation de diodes laser a emission surfacique |
FR2784185B1 (fr) | 1998-10-06 | 2001-02-02 | Thomson Csf | Dispositif pour l'harmonisation entre une voie d'emission laser et une voie passive d'observation |
DE10234704A1 (de) * | 2002-07-30 | 2004-02-19 | Osram Opto Semiconductors Gmbh | Halbleitervorrichtung mit Kühlelement |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2371780A1 (fr) * | 1976-11-22 | 1978-06-16 | Mitsubishi Monsanto Chem | Element electroluminescent et son procede de fabrication |
JPS5837713B2 (ja) * | 1978-12-01 | 1983-08-18 | 富士通株式会社 | 半導体レ−ザ−装置の製造方法 |
JPS5752185A (en) * | 1980-05-20 | 1982-03-27 | De Beers Ind Diamond | Heat sink |
US4639275A (en) * | 1982-04-22 | 1987-01-27 | The Board Of Trustees Of The University Of Illinois | Forming disordered layer by controlled diffusion in heterojunction III-V semiconductor |
JPH06105779B2 (ja) * | 1983-02-28 | 1994-12-21 | 双葉電子工業株式会社 | 半導体装置及びその製造方法 |
US4727555A (en) * | 1983-09-02 | 1988-02-23 | Xerox Corporation | Wavelength tuned quantum well lasers |
JPS6255985A (ja) * | 1985-09-05 | 1987-03-11 | Nec Corp | 半導体発光素子 |
JPH0732280B2 (ja) * | 1985-09-26 | 1995-04-10 | 三菱電機株式会社 | 半導体レーザ装置 |
EP0221531A3 (fr) * | 1985-11-06 | 1992-02-19 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisha | Substrat isolé bon conducteur de chaleur et procédé pour sa fabrication |
-
1987
- 1987-06-02 FR FR8707709A patent/FR2616272B1/fr not_active Expired - Lifetime
-
1988
- 1988-05-27 US US07/313,974 patent/US5012476A/en not_active Expired - Fee Related
- 1988-05-27 EP EP88904979A patent/EP0316414A1/fr not_active Withdrawn
- 1988-05-27 JP JP63504627A patent/JPH01503583A/ja active Pending
- 1988-05-27 WO PCT/FR1988/000269 patent/WO1988010007A1/fr not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
FR2616272A1 (fr) | 1988-12-09 |
JPH01503583A (ja) | 1989-11-30 |
EP0316414A1 (fr) | 1989-05-24 |
US5012476A (en) | 1991-04-30 |
WO1988010007A1 (fr) | 1988-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2567684B1 (fr) | Module ayant un substrat ceramique multicouche et un circuit multicouche sur ce substrat et procede pour sa fabrication | |
FR2655434B1 (fr) | Dispositif optique a puits quantiques et procede de realisation. | |
DE3789424T2 (de) | Vorrichtung um dünne Schichten herzustellen. | |
FR2524709B1 (fr) | Dispositif a semi-conducteur et procede pour sa fabrication | |
PT101354A (pt) | Metodo e aparelho proprios para a producao de dispositivos de circuitos integrados, e dispositivos de circuitos integrados produzidos por meio desse metodo e desse aparelho | |
FR2604562B1 (fr) | Dispositif semi-conducteur silicium-sur-isolant et procede de fabrication | |
FR2517122B1 (fr) | Dispositif semi-conducteur, notamment diode micro-ondes et son procede de fabrication | |
DE59103186D1 (de) | Vorrichtung zum einseitigen ätzen einer halbleiterscheibe. | |
DE69019275T2 (de) | Vorrichtung zum Schneiden von Pflanzen. | |
FR2616272B1 (fr) | Dispositif en materiaux semiconducteurs realise sur un substrat de parametre de maille different, application a un laser et procede de realisation | |
DE69006434T2 (de) | Herstellungsverfahren einer Halbleiteranordnung. | |
IT8323707A0 (it) | Substrato di cablaggio, procedimento per la sua fabbricazione, e dispositivo a semiconduttore utilizzante il substrato stesso. | |
DE3780327T2 (de) | Herstellungsverfahren einer halbleiter-kristallschicht. | |
FR2694657B1 (fr) | Dispositif a semiconducteurs et procede de fabrication. | |
FR2486715B1 (fr) | Procede de realisation d'un dispositif semi-conducteur | |
FR2630617B1 (fr) | Procede de fabrication d'un substrat conducteur multicouche | |
DE3469608D1 (en) | Photosensitive polyamic acid derivative, method of manufacturing polyimide pattern on a substrate, and semiconductor device comprising a polyimide pattern obtained by using the said method | |
FR2486716B1 (fr) | Procede de realisation d'un dispositif semi-conducteur | |
FR2625036B1 (fr) | Procede de realisation d'un reseau de diffraction sur un materiau semi-conducteur, et dispositif opto-electronique comportant un reseau de diffraction realise selon ce procede | |
DE69013444D1 (de) | Vorrichtung zur Bildung einer dünnen Schicht. | |
FR2589281B1 (fr) | Dispositif a laser semiconducteur et son procede de fabrication | |
FR2575185B1 (fr) | Procede et dispositif pour la realisation de depots et rechargements de materiaux metalliques, metalloceramiques et ceramiques sur un substrat | |
DE59108790D1 (de) | Halbleiterbauelement, befestigt an einem keramischen Substrat | |
FR2525031B1 (fr) | Dispositif a semi-conducteur dont le semi-conducteur est forme sur un substrat isolant et son procede de fabrication | |
FR2548450B1 (fr) | Procede de fabrication de diode en film mince ultra-miniature |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |