FR2593424B1 - Pipette a vide notamment pour le transfert de plaquettes de silicium - Google Patents

Pipette a vide notamment pour le transfert de plaquettes de silicium

Info

Publication number
FR2593424B1
FR2593424B1 FR8518635A FR8518635A FR2593424B1 FR 2593424 B1 FR2593424 B1 FR 2593424B1 FR 8518635 A FR8518635 A FR 8518635A FR 8518635 A FR8518635 A FR 8518635A FR 2593424 B1 FR2593424 B1 FR 2593424B1
Authority
FR
France
Prior art keywords
silicon wafers
vacuum pipette
transferring silicon
transferring
pipette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8518635A
Other languages
English (en)
Other versions
FR2593424A1 (fr
Inventor
Bernard Poli
Gerard Chincholle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Recif SA
Original Assignee
Recif SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Recif SA filed Critical Recif SA
Priority to FR8518635A priority Critical patent/FR2593424B1/fr
Priority to FR868616186A priority patent/FR2606311B2/fr
Priority to DE3641727A priority patent/DE3641727C2/de
Priority to US06/940,535 priority patent/US4744594A/en
Priority to JP61294607A priority patent/JP2551418B2/ja
Publication of FR2593424A1 publication Critical patent/FR2593424A1/fr
Application granted granted Critical
Publication of FR2593424B1 publication Critical patent/FR2593424B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B25B11/007—Vacuum work holders portable, e.g. handheld

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)
FR8518635A 1985-12-10 1985-12-10 Pipette a vide notamment pour le transfert de plaquettes de silicium Expired FR2593424B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8518635A FR2593424B1 (fr) 1985-12-10 1985-12-10 Pipette a vide notamment pour le transfert de plaquettes de silicium
FR868616186A FR2606311B2 (fr) 1985-12-10 1986-11-12 Dispositif de fermeture automatique pour une pipette de prehension a vide
DE3641727A DE3641727C2 (de) 1985-12-10 1986-12-06 Vakuumvorrichtung, insbesondere für die Handhabung von Siliziumplättchen
US06/940,535 US4744594A (en) 1985-12-10 1986-12-10 Vacuum handling especially for the use in handling silicon wafers
JP61294607A JP2551418B2 (ja) 1985-12-10 1986-12-10 真空ハンドリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8518635A FR2593424B1 (fr) 1985-12-10 1985-12-10 Pipette a vide notamment pour le transfert de plaquettes de silicium

Publications (2)

Publication Number Publication Date
FR2593424A1 FR2593424A1 (fr) 1987-07-31
FR2593424B1 true FR2593424B1 (fr) 1989-07-21

Family

ID=9325842

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8518635A Expired FR2593424B1 (fr) 1985-12-10 1985-12-10 Pipette a vide notamment pour le transfert de plaquettes de silicium

Country Status (1)

Country Link
FR (1) FR2593424B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2646491B1 (fr) * 1989-04-26 1991-08-23 Recif Sa Dispositif de liaison entre le corps et l'embout d'une pipette a vide

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2966371A (en) * 1957-08-30 1960-12-27 Earl F Bruning Longitudinally yieldable coupling
US3071402A (en) * 1959-09-28 1963-01-01 Air Vac Engineering Company In Vacuum-operated probe tools
US3843183A (en) * 1972-08-16 1974-10-22 C Hutson Vacuum pick-up instrument
JPS5258589A (en) * 1975-11-10 1977-05-14 Hitachi Ltd Vacuum pincette
DE2628488A1 (de) * 1976-06-25 1978-01-05 Siemens Ag Werkzeug-sortiment fuer eine vakuumgreifpinzette
WO1981001666A1 (fr) * 1979-12-10 1981-06-25 Indicon Inc Embout remplacable pour pipette

Also Published As

Publication number Publication date
FR2593424A1 (fr) 1987-07-31

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Legal Events

Date Code Title Description
ST Notification of lapse