FR2585371B1 - Procede et dispositif de revetement de micro-depressions - Google Patents

Procede et dispositif de revetement de micro-depressions

Info

Publication number
FR2585371B1
FR2585371B1 FR8605533A FR8605533A FR2585371B1 FR 2585371 B1 FR2585371 B1 FR 2585371B1 FR 8605533 A FR8605533 A FR 8605533A FR 8605533 A FR8605533 A FR 8605533A FR 2585371 B1 FR2585371 B1 FR 2585371B1
Authority
FR
France
Prior art keywords
depressions
coating micro
micro
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8605533A
Other languages
English (en)
Other versions
FR2585371A1 (fr
Inventor
Marcel Lardon
Rainer Buhl
Hans-Peter Bader
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2585371A1 publication Critical patent/FR2585371A1/fr
Application granted granted Critical
Publication of FR2585371B1 publication Critical patent/FR2585371B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C23C14/5833—Ion beam bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5873—Removal of material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
FR8605533A 1985-07-26 1986-04-17 Procede et dispositif de revetement de micro-depressions Expired - Fee Related FR2585371B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH3256/85A CH665428A5 (de) 1985-07-26 1985-07-26 Verfahren zur beschichtung von mikrovertiefungen.

Publications (2)

Publication Number Publication Date
FR2585371A1 FR2585371A1 (fr) 1987-01-30
FR2585371B1 true FR2585371B1 (fr) 1990-06-15

Family

ID=4252039

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8605533A Expired - Fee Related FR2585371B1 (fr) 1985-07-26 1986-04-17 Procede et dispositif de revetement de micro-depressions

Country Status (6)

Country Link
US (1) US4915806A (fr)
JP (1) JPS6226822A (fr)
CH (1) CH665428A5 (fr)
DE (1) DE3541911C2 (fr)
FR (1) FR2585371B1 (fr)
GB (1) GB2178060B (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246885A (en) * 1989-12-13 1993-09-21 International Business Machines Corporation Deposition method for high aspect ratio features using photoablation
EP0435801A3 (en) * 1989-12-13 1992-11-19 International Business Machines Corporation Deposition method for high aspect ratio features
US5302266A (en) * 1992-03-20 1994-04-12 International Business Machines Corporation Method and apparatus for filing high aspect patterns with metal
JP3169151B2 (ja) * 1992-10-26 2001-05-21 三菱電機株式会社 薄膜形成装置
GB9317170D0 (en) * 1993-08-18 1993-10-06 Applied Vision Ltd Improvements in physical vapour deposition apparatus
JPH07268622A (ja) * 1994-03-01 1995-10-17 Applied Sci & Technol Inc マイクロ波プラズマ付着源
US6287977B1 (en) * 1998-07-31 2001-09-11 Applied Materials, Inc. Method and apparatus for forming improved metal interconnects
JP2002359247A (ja) * 2000-07-10 2002-12-13 Canon Inc 半導体部材、半導体装置およびそれらの製造方法
JP4302933B2 (ja) * 2002-04-22 2009-07-29 株式会社日立ハイテクノロジーズ イオンビームによる穴埋め方法及びイオンビーム装置
US20070257366A1 (en) * 2006-05-03 2007-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Barrier layer for semiconductor interconnect structure
CN101489356B (zh) * 2008-01-16 2011-03-30 富葵精密组件(深圳)有限公司 电路板及其制作方法
TW201408803A (zh) * 2012-06-18 2014-03-01 Oc Oerlikon Balzers Ag 用於方向性材料沉積的pvd設備、方法及工件

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2940873A (en) * 1957-07-18 1960-06-14 Itt Method of increasing the thickness of fine mesh metal screens
US3756193A (en) * 1972-05-01 1973-09-04 Battelle Memorial Institute Coating apparatus
GB1518282A (en) * 1974-07-31 1978-07-19 Atomic Energy Authority Uk Ion beam separators
DE2644208C3 (de) * 1976-09-30 1981-04-30 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung einer einkristallinen Schicht auf einer Unterlage
US4109061A (en) * 1977-12-08 1978-08-22 United Technologies Corporation Method for altering the composition and structure of aluminum bearing overlay alloy coatings during deposition from metallic vapor
US4336118A (en) * 1980-03-21 1982-06-22 Battelle Memorial Institute Methods for making deposited films with improved microstructures
JPS56156767A (en) * 1980-05-02 1981-12-03 Sumitomo Electric Ind Ltd Highly hard substance covering material
DE3116040C2 (de) * 1981-04-22 1983-04-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Bioverträgliche Kohlenstoffschichten zum Beschichten von flexiblen Materialien u. Verfahren zum Aufbringen der Schichten
GB2098793A (en) * 1981-05-18 1982-11-24 Varian Associates Method of and apparatus for deflecting an ion beam of an ion implantater onto an ion absorbing target
US4385975A (en) * 1981-12-30 1983-05-31 International Business Machines Corp. Method of forming wide, deep dielectric filled isolation trenches in the surface of a silicon semiconductor substrate
US4486286A (en) * 1982-09-28 1984-12-04 Nerken Research Corp. Method of depositing a carbon film on a substrate and products obtained thereby
US4601922A (en) * 1983-09-21 1986-07-22 Konishiroku Photo Industry Co., Ltd. Method of forming a layer of thin film on a substrate having a multiplicity of mesh-like holes

Also Published As

Publication number Publication date
GB8607051D0 (en) 1986-04-30
FR2585371A1 (fr) 1987-01-30
DE3541911C2 (de) 1994-08-04
GB2178060A (en) 1987-02-04
CH665428A5 (de) 1988-05-13
JPS6226822A (ja) 1987-02-04
GB2178060B (en) 1989-12-13
US4915806A (en) 1990-04-10
DE3541911A1 (de) 1987-01-29

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20051230