FR2557824B1 - Dispositif d'alimentation en gaz pour appareil de gravure par ions reactifs - Google Patents

Dispositif d'alimentation en gaz pour appareil de gravure par ions reactifs

Info

Publication number
FR2557824B1
FR2557824B1 FR8417313A FR8417313A FR2557824B1 FR 2557824 B1 FR2557824 B1 FR 2557824B1 FR 8417313 A FR8417313 A FR 8417313A FR 8417313 A FR8417313 A FR 8417313A FR 2557824 B1 FR2557824 B1 FR 2557824B1
Authority
FR
France
Prior art keywords
supply device
gas supply
reactive ion
ion etching
etching apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8417313A
Other languages
English (en)
Other versions
FR2557824A1 (fr
Inventor
Frank Joseph Walton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GCA Corp
Original Assignee
GCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GCA Corp filed Critical GCA Corp
Publication of FR2557824A1 publication Critical patent/FR2557824A1/fr
Application granted granted Critical
Publication of FR2557824B1 publication Critical patent/FR2557824B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/935—Gas flow control

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
FR8417313A 1983-11-14 1984-11-13 Dispositif d'alimentation en gaz pour appareil de gravure par ions reactifs Expired FR2557824B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/550,801 US4496423A (en) 1983-11-14 1983-11-14 Gas feed for reactive ion etch system

Publications (2)

Publication Number Publication Date
FR2557824A1 FR2557824A1 (fr) 1985-07-12
FR2557824B1 true FR2557824B1 (fr) 1988-02-12

Family

ID=24198620

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8417313A Expired FR2557824B1 (fr) 1983-11-14 1984-11-13 Dispositif d'alimentation en gaz pour appareil de gravure par ions reactifs

Country Status (5)

Country Link
US (1) US4496423A (fr)
JP (1) JPS60167330A (fr)
DE (1) DE3441470A1 (fr)
FR (1) FR2557824B1 (fr)
GB (1) GB2150744B (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6784033B1 (en) 1984-02-15 2004-08-31 Semiconductor Energy Laboratory Co., Ltd. Method for the manufacture of an insulated gate field effect semiconductor device
JPH0752718B2 (ja) 1984-11-26 1995-06-05 株式会社半導体エネルギー研究所 薄膜形成方法
US6786997B1 (en) 1984-11-26 2004-09-07 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus
JPS6269620A (ja) * 1985-09-24 1987-03-30 Anelva Corp プラズマ処理装置
US6230650B1 (en) 1985-10-14 2001-05-15 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
US6673722B1 (en) 1985-10-14 2004-01-06 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
JP2542580B2 (ja) * 1986-04-03 1996-10-09 益弘 小駒 プラスチック表面改質方法
DE3613181C2 (de) * 1986-04-18 1995-09-07 Siemens Ag Verfahren zum Erzeugen von Gräben mit einstellbarer Steilheit der Grabenwände in aus Silizium bestehenden Halbleitersubstraten
NL8601824A (nl) * 1986-07-11 1988-02-01 Hauzer Holding Werkwijze en inrichting voor het met een geleidend plasmakanaal ontsteken van een boog.
US4904621A (en) * 1987-07-16 1990-02-27 Texas Instruments Incorporated Remote plasma generation process using a two-stage showerhead
JPH0225577A (ja) * 1988-07-15 1990-01-29 Mitsubishi Electric Corp 薄膜形成装置
DE3935189A1 (de) * 1989-10-23 1991-05-08 Leybold Ag Verfahren und vorrichtung zur behandlung von werkstuecken durch reaktives ionenaetzen
JPH04358071A (ja) * 1991-06-05 1992-12-11 Mitsubishi Electric Corp 真空処理装置
DE4202211A1 (de) * 1992-01-28 1993-07-29 Leybold Ag Sputteranlage mit wenigstens einer magnetron-kathode
US6116185A (en) * 1996-05-01 2000-09-12 Rietzel; James G. Gas injector for plasma enhanced chemical vapor deposition
US5996528A (en) * 1996-07-02 1999-12-07 Novellus Systems, Inc. Method and apparatus for flowing gases into a manifold at high potential
JP4104193B2 (ja) * 1997-11-14 2008-06-18 株式会社エフオーアイ プラズマ処理装置
US6146462A (en) * 1998-05-08 2000-11-14 Astenjohnson, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
US6287687B1 (en) 1998-05-08 2001-09-11 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
US7067405B2 (en) * 1999-02-01 2006-06-27 Sigma Laboratories Of Arizona, Inc. Atmospheric glow discharge with concurrent coating deposition
US6118218A (en) * 1999-02-01 2000-09-12 Sigma Technologies International, Inc. Steady-state glow-discharge plasma at atmospheric pressure
US6461973B1 (en) 2000-02-11 2002-10-08 Advanced Micro Devices, Inc. Method for forming high quality multiple thickness oxide layers by reducing descum induced defects
US6432618B1 (en) 2000-02-11 2002-08-13 Advanced Micro Devices, Inc. Method for forming high quality multiple thickness oxide layers by reducing descum induced defects
US6479411B1 (en) 2000-03-21 2002-11-12 Angela T. Hui Method for forming high quality multiple thickness oxide using high temperature descum
DE102004039969A1 (de) * 2004-08-18 2006-02-23 Leybold Optics Gmbh Plasmaquellenvorrichtung, Anordnung mit einer Plasmaquellenvorrichtung sowie Abstrahleinheit für eine Plasmaquellenvorrichtung
JP7394661B2 (ja) * 2020-03-09 2023-12-08 東京エレクトロン株式会社 基板処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4270999A (en) * 1979-09-28 1981-06-02 International Business Machines Corporation Method and apparatus for gas feed control in a dry etching process
JPS5694749A (en) * 1979-12-28 1981-07-31 Matsushita Electronics Corp Plasma heaping device
US4313783A (en) * 1980-05-19 1982-02-02 Branson International Plasma Corporation Computer controlled system for processing semiconductor wafers
JPS57131372A (en) * 1981-02-05 1982-08-14 Seiko Epson Corp Plasma etching device
US4367114A (en) * 1981-05-06 1983-01-04 The Perkin-Elmer Corporation High speed plasma etching system
JPS57195749A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus

Also Published As

Publication number Publication date
GB2150744B (en) 1987-06-24
US4496423A (en) 1985-01-29
JPS60167330A (ja) 1985-08-30
GB2150744A (en) 1985-07-03
GB8428560D0 (en) 1984-12-19
DE3441470A1 (de) 1985-05-23
FR2557824A1 (fr) 1985-07-12

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Legal Events

Date Code Title Description
ST Notification of lapse