GB8311350D0 - Plasma treatment apparatus - Google Patents
Plasma treatment apparatusInfo
- Publication number
- GB8311350D0 GB8311350D0 GB838311350A GB8311350A GB8311350D0 GB 8311350 D0 GB8311350 D0 GB 8311350D0 GB 838311350 A GB838311350 A GB 838311350A GB 8311350 A GB8311350 A GB 8311350A GB 8311350 D0 GB8311350 D0 GB 8311350D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- treatment apparatus
- plasma treatment
- plasma
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32422—Arrangement for selecting ions or species in the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08311350A GB2123331B (en) | 1982-04-29 | 1983-04-26 | Plasma treatment apparatus and method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8212419 | 1982-04-29 | ||
GB08311350A GB2123331B (en) | 1982-04-29 | 1983-04-26 | Plasma treatment apparatus and method |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8311350D0 true GB8311350D0 (en) | 1983-06-02 |
GB2123331A GB2123331A (en) | 1984-02-01 |
GB2123331B GB2123331B (en) | 1985-11-27 |
Family
ID=26282686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08311350A Expired GB2123331B (en) | 1982-04-29 | 1983-04-26 | Plasma treatment apparatus and method |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2123331B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4631105A (en) * | 1985-04-22 | 1986-12-23 | Branson International Plasma Corporation | Plasma etching apparatus |
GB8622820D0 (en) * | 1986-09-23 | 1986-10-29 | Nordiko Ltd | Electrode assembly & apparatus |
US5298720A (en) * | 1990-04-25 | 1994-03-29 | International Business Machines Corporation | Method and apparatus for contamination control in processing apparatus containing voltage driven electrode |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3351731A (en) * | 1962-10-23 | 1967-11-07 | Jeol Ltd | Method and apparatus for treating material with a charged beam |
DE2458370C2 (en) * | 1974-12-10 | 1984-05-10 | Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel | Energy beam engraving process and equipment for its implementation |
US4358338A (en) * | 1980-05-16 | 1982-11-09 | Varian Associates, Inc. | End point detection method for physical etching process |
-
1983
- 1983-04-26 GB GB08311350A patent/GB2123331B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB2123331A (en) | 1984-02-01 |
GB2123331B (en) | 1985-11-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20020426 |