GB2123331B - Plasma treatment apparatus and method - Google Patents

Plasma treatment apparatus and method

Info

Publication number
GB2123331B
GB2123331B GB08311350A GB8311350A GB2123331B GB 2123331 B GB2123331 B GB 2123331B GB 08311350 A GB08311350 A GB 08311350A GB 8311350 A GB8311350 A GB 8311350A GB 2123331 B GB2123331 B GB 2123331B
Authority
GB
United Kingdom
Prior art keywords
treatment apparatus
plasma treatment
plasma
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08311350A
Other versions
GB8311350D0 (en
GB2123331A (en
Inventor
Christopher David Dobson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB08311350A priority Critical patent/GB2123331B/en
Publication of GB8311350D0 publication Critical patent/GB8311350D0/en
Publication of GB2123331A publication Critical patent/GB2123331A/en
Application granted granted Critical
Publication of GB2123331B publication Critical patent/GB2123331B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32422—Arrangement for selecting ions or species in the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
GB08311350A 1982-04-29 1983-04-26 Plasma treatment apparatus and method Expired GB2123331B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08311350A GB2123331B (en) 1982-04-29 1983-04-26 Plasma treatment apparatus and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8212419 1982-04-29
GB08311350A GB2123331B (en) 1982-04-29 1983-04-26 Plasma treatment apparatus and method

Publications (3)

Publication Number Publication Date
GB8311350D0 GB8311350D0 (en) 1983-06-02
GB2123331A GB2123331A (en) 1984-02-01
GB2123331B true GB2123331B (en) 1985-11-27

Family

ID=26282686

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08311350A Expired GB2123331B (en) 1982-04-29 1983-04-26 Plasma treatment apparatus and method

Country Status (1)

Country Link
GB (1) GB2123331B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4631105A (en) * 1985-04-22 1986-12-23 Branson International Plasma Corporation Plasma etching apparatus
GB8622820D0 (en) * 1986-09-23 1986-10-29 Nordiko Ltd Electrode assembly & apparatus
US5298720A (en) * 1990-04-25 1994-03-29 International Business Machines Corporation Method and apparatus for contamination control in processing apparatus containing voltage driven electrode

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3351731A (en) * 1962-10-23 1967-11-07 Jeol Ltd Method and apparatus for treating material with a charged beam
DE2458370C2 (en) * 1974-12-10 1984-05-10 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Energy beam engraving process and equipment for its implementation
US4358338A (en) * 1980-05-16 1982-11-09 Varian Associates, Inc. End point detection method for physical etching process

Also Published As

Publication number Publication date
GB8311350D0 (en) 1983-06-02
GB2123331A (en) 1984-02-01

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20020426