FR2551210A1 - Procede de controle d'un reseau - Google Patents
Procede de controle d'un reseau Download PDFInfo
- Publication number
- FR2551210A1 FR2551210A1 FR8407389A FR8407389A FR2551210A1 FR 2551210 A1 FR2551210 A1 FR 2551210A1 FR 8407389 A FR8407389 A FR 8407389A FR 8407389 A FR8407389 A FR 8407389A FR 2551210 A1 FR2551210 A1 FR 2551210A1
- Authority
- FR
- France
- Prior art keywords
- network
- reflection
- coefficient
- scanning
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 41
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 230000008569 process Effects 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 230000001747 exhibiting effect Effects 0.000 claims abstract 2
- 239000003973 paint Substances 0.000 claims description 15
- 230000006870 function Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000007547 defect Effects 0.000 description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000003223 protective agent Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/161—Using chemical substances, e.g. colored or fluorescent, for facilitating optical or visual inspection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8095483A JPS59206705A (ja) | 1983-05-11 | 1983-05-11 | パタ−ン検査方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2551210A1 true FR2551210A1 (fr) | 1985-03-01 |
Family
ID=13732896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8407389A Pending FR2551210A1 (fr) | 1983-05-11 | 1984-05-10 | Procede de controle d'un reseau |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS59206705A (de) |
| DE (1) | DE3416919A1 (de) |
| FR (1) | FR2551210A1 (de) |
| GB (1) | GB2139754B (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61228302A (ja) * | 1985-04-01 | 1986-10-11 | Yanmar Diesel Engine Co Ltd | 探知装置 |
| JPS62180250A (ja) * | 1986-02-05 | 1987-08-07 | Omron Tateisi Electronics Co | 部品実装基板の検査方法 |
| JPS63191041A (ja) * | 1987-02-03 | 1988-08-08 | Komori Printing Mach Co Ltd | 濃度測定位置合わせ方法 |
| FR2676392A1 (fr) * | 1991-05-04 | 1992-11-20 | Heidelberger Druckmasch Ag | Dispositif et procede pour controler la qualite d'impression de produits imprimes d'une machine d'impression. |
| US6529621B1 (en) * | 1998-12-17 | 2003-03-04 | Kla-Tencor | Mechanisms for making and inspecting reticles |
| GB2485337A (en) * | 2010-11-01 | 2012-05-16 | Plastic Logic Ltd | Method for providing device-specific markings on devices |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3645626A (en) * | 1970-06-15 | 1972-02-29 | Ibm | Apparatus for detecting defects by optical scanning |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3969577A (en) * | 1974-10-15 | 1976-07-13 | Westinghouse Electric Corporation | System for evaluating similar objects |
| JPS5413750A (en) * | 1977-07-02 | 1979-02-01 | Hokuriku Elect Ind | Function voltage divider using resistors |
-
1983
- 1983-05-11 JP JP8095483A patent/JPS59206705A/ja active Granted
-
1984
- 1984-04-08 GB GB08411625A patent/GB2139754B/en not_active Expired
- 1984-05-08 DE DE19843416919 patent/DE3416919A1/de active Granted
- 1984-05-10 FR FR8407389A patent/FR2551210A1/fr active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3645626A (en) * | 1970-06-15 | 1972-02-29 | Ibm | Apparatus for detecting defects by optical scanning |
Non-Patent Citations (1)
| Title |
|---|
| IBM TECHNICAL DISCLOSURE BULLETIN, vol. 25, no. 12, mai 1983, page 6350, New York, US; C.D. ABBOTT et al.: "Templates for substrate inspections" * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59206705A (ja) | 1984-11-22 |
| JPH033884B2 (de) | 1991-01-21 |
| DE3416919C2 (de) | 1987-07-02 |
| DE3416919A1 (de) | 1984-11-29 |
| GB2139754B (en) | 1986-10-15 |
| GB2139754A (en) | 1984-11-14 |
| GB8411625D0 (en) | 1984-06-13 |
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