GB8411625D0 - Pattern examining method - Google Patents

Pattern examining method

Info

Publication number
GB8411625D0
GB8411625D0 GB848411625A GB8411625A GB8411625D0 GB 8411625 D0 GB8411625 D0 GB 8411625D0 GB 848411625 A GB848411625 A GB 848411625A GB 8411625 A GB8411625 A GB 8411625A GB 8411625 D0 GB8411625 D0 GB 8411625D0
Authority
GB
United Kingdom
Prior art keywords
examining method
pattern
pattern examining
examining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB848411625A
Other versions
GB2139754B (en
GB2139754A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of GB8411625D0 publication Critical patent/GB8411625D0/en
Publication of GB2139754A publication Critical patent/GB2139754A/en
Application granted granted Critical
Publication of GB2139754B publication Critical patent/GB2139754B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16—Inspection; Monitoring; Aligning
    • H05K2203/161—Using chemical substances, e.g. colored or fluorescent, for facilitating optical or visual inspection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16—Inspection; Monitoring; Aligning
    • H05K2203/163—Monitoring a manufacturing process
GB08411625A 1983-05-11 1984-04-08 A pattern examining method Expired GB2139754B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8095483A JPS59206705A (en) 1983-05-11 1983-05-11 Inspection of pattern

Publications (3)

Publication Number Publication Date
GB8411625D0 true GB8411625D0 (en) 1984-06-13
GB2139754A GB2139754A (en) 1984-11-14
GB2139754B GB2139754B (en) 1986-10-15

Family

ID=13732896

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08411625A Expired GB2139754B (en) 1983-05-11 1984-04-08 A pattern examining method

Country Status (4)

Country Link
JP (1) JPS59206705A (en)
DE (1) DE3416919A1 (en)
FR (1) FR2551210A1 (en)
GB (1) GB2139754B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61228302A (en) * 1985-04-01 1986-10-11 Yanmar Diesel Engine Co Ltd Detection device
JPS62180250A (en) * 1986-02-05 1987-08-07 Omron Tateisi Electronics Co Inspecting method for component package substrate
JPS63191041A (en) * 1987-02-03 1988-08-08 Komori Printing Mach Co Ltd Density measurement positioning method
FR2676392A1 (en) * 1991-05-04 1992-11-20 Heidelberger Druckmasch Ag Device and method for checking the print quality of printed products from a printing machine
US6529621B1 (en) * 1998-12-17 2003-03-04 Kla-Tencor Mechanisms for making and inspecting reticles
GB2485337A (en) * 2010-11-01 2012-05-16 Plastic Logic Ltd Method for providing device-specific markings on devices

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645626A (en) * 1970-06-15 1972-02-29 Ibm Apparatus for detecting defects by optical scanning
US3969577A (en) * 1974-10-15 1976-07-13 Westinghouse Electric Corporation System for evaluating similar objects
JPS5413750A (en) * 1977-07-02 1979-02-01 Hokuriku Elect Ind Function voltage divider using resistors

Also Published As

Publication number Publication date
JPS59206705A (en) 1984-11-22
DE3416919C2 (en) 1987-07-02
DE3416919A1 (en) 1984-11-29
GB2139754B (en) 1986-10-15
JPH033884B2 (en) 1991-01-21
FR2551210A1 (en) 1985-03-01
GB2139754A (en) 1984-11-14

Similar Documents

Publication Publication Date Title
GB8334625D0 (en) Slit-score method
GB2151155B (en) Thermopervaporation apparatus
GB8331793D0 (en) Process
GB2141283B (en) Auto-playing apparatus
DE3465053D1 (en) Unstrapping apparatus
DE3474540D1 (en) Yarn-threading method
GB2147918B (en) Knitting apparatus
GB8409536D0 (en) Well apparatus
GB2141322B (en) Rice-hulling apparatus
GB8414008D0 (en) Scanning method
DE3470862D1 (en) Polisher-finer apparatus
GB8331794D0 (en) Process
GB2141063B (en) Redrawing-ironing apparatus
EP0147205A3 (en) Pattern inspection
YU215284A (en) Process for obtaining 7-acylamino-9a-metoximitosane
DE3469141D1 (en) Workpiece-handling apparatus
YU187584A (en) Process for obtaining chlorothiophormiate
GB8411625D0 (en) Pattern examining method
DE3469606D1 (en) Photographic-copying apparatus
GB2134002B (en) Vehicle-cleaning apparatus
GB2135943B (en) Load-retaining apparatus
DE3467642D1 (en) Document-reading apparatus
AU2433984A (en) Rope-braking apparatus
YU44992B (en) Process for obtaining 2-halogenresorcynol
GB2137104B (en) Limb - exercising apparatus

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950408