GB2139754B - A pattern examining method - Google Patents
A pattern examining methodInfo
- Publication number
- GB2139754B GB2139754B GB08411625A GB8411625A GB2139754B GB 2139754 B GB2139754 B GB 2139754B GB 08411625 A GB08411625 A GB 08411625A GB 8411625 A GB8411625 A GB 8411625A GB 2139754 B GB2139754 B GB 2139754B
- Authority
- GB
- United Kingdom
- Prior art keywords
- examining method
- pattern
- pattern examining
- examining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/161—Using chemical substances, e.g. colored or fluorescent, for facilitating optical or visual inspection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8095483A JPS59206705A (en) | 1983-05-11 | 1983-05-11 | Inspection of pattern |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8411625D0 GB8411625D0 (en) | 1984-06-13 |
GB2139754A GB2139754A (en) | 1984-11-14 |
GB2139754B true GB2139754B (en) | 1986-10-15 |
Family
ID=13732896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08411625A Expired GB2139754B (en) | 1983-05-11 | 1984-04-08 | A pattern examining method |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS59206705A (en) |
DE (1) | DE3416919A1 (en) |
FR (1) | FR2551210A1 (en) |
GB (1) | GB2139754B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61228302A (en) * | 1985-04-01 | 1986-10-11 | Yanmar Diesel Engine Co Ltd | Detection device |
JPS62180250A (en) * | 1986-02-05 | 1987-08-07 | Omron Tateisi Electronics Co | Inspecting method for component package substrate |
JPS63191041A (en) * | 1987-02-03 | 1988-08-08 | Komori Printing Mach Co Ltd | Density measurement positioning method |
FR2676392A1 (en) * | 1991-05-04 | 1992-11-20 | Heidelberger Druckmasch Ag | Device and method for checking the print quality of printed products from a printing machine |
US6529621B1 (en) * | 1998-12-17 | 2003-03-04 | Kla-Tencor | Mechanisms for making and inspecting reticles |
GB2485337A (en) * | 2010-11-01 | 2012-05-16 | Plastic Logic Ltd | Method for providing device-specific markings on devices |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3645626A (en) * | 1970-06-15 | 1972-02-29 | Ibm | Apparatus for detecting defects by optical scanning |
US3969577A (en) * | 1974-10-15 | 1976-07-13 | Westinghouse Electric Corporation | System for evaluating similar objects |
JPS5413750A (en) * | 1977-07-02 | 1979-02-01 | Hokuriku Elect Ind | Function voltage divider using resistors |
-
1983
- 1983-05-11 JP JP8095483A patent/JPS59206705A/en active Granted
-
1984
- 1984-04-08 GB GB08411625A patent/GB2139754B/en not_active Expired
- 1984-05-08 DE DE19843416919 patent/DE3416919A1/en active Granted
- 1984-05-10 FR FR8407389A patent/FR2551210A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JPH033884B2 (en) | 1991-01-21 |
DE3416919C2 (en) | 1987-07-02 |
JPS59206705A (en) | 1984-11-22 |
GB8411625D0 (en) | 1984-06-13 |
GB2139754A (en) | 1984-11-14 |
FR2551210A1 (en) | 1985-03-01 |
DE3416919A1 (en) | 1984-11-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3478060D1 (en) | Method for forming resist pattern | |
CS1020883A1 (en) | Perforovana mekka kontaktni cocka a zpusob jeji vyroby | |
GB2159430B (en) | A sludge-handling apparatus | |
CS827284A1 (en) | Kovoobrabeci stroj s automatickou vymenou nastroju a nastrojovych zasobniku | |
DE3466074D1 (en) | A ceramic testing method | |
GB2147918B (en) | Knitting apparatus | |
GB2156197B (en) | A fish-beheading apparatus | |
EP0147205A3 (en) | Pattern inspection | |
GB2139754B (en) | A pattern examining method | |
GB2151490B (en) | A regenerating apparatus | |
AU89495S (en) | A rasp | |
GB8407920D0 (en) | High contrast patterning process | |
GB2181257B (en) | A probe | |
GB8327072D0 (en) | Knitting method | |
GB8333254D0 (en) | Fourteen-segment pattern | |
GB8308356D0 (en) | Pattern place | |
BG45933A1 (en) | Method for fermentational preparing a nourzeotrizin | |
AU89375S (en) | A block | |
GB8313146D0 (en) | Knitting apparatus | |
AU89496S (en) | A rasp | |
CS428383A1 (en) | Prisada do zinkovaci galvanicke lazne s nizkym obsahem kyanidu a zinku | |
CS27985A1 (en) | Prisada do krmiv a silazi s obsahem horciku a siry | |
CS320883A1 (en) | Prevodovka s kuzelovymi a celnimi ozubenymi soukolimi | |
CS140783A1 (en) | Protipozarni penotvorna kremicitanova vrstva s hladkym povrchem a kontinualni zpusob jeji pripravy | |
CS650583A1 (en) | Bxpandacne zariadenie s vymennikovym predohrevom perlitu a spalovacieho vzduchu |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19950408 |