FR2550681B1 - Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs - Google Patents

Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs

Info

Publication number
FR2550681B1
FR2550681B1 FR8313298A FR8313298A FR2550681B1 FR 2550681 B1 FR2550681 B1 FR 2550681B1 FR 8313298 A FR8313298 A FR 8313298A FR 8313298 A FR8313298 A FR 8313298A FR 2550681 B1 FR2550681 B1 FR 2550681B1
Authority
FR
France
Prior art keywords
formation
chemically reactive
ionization chambers
ion source
reactive ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8313298A
Other languages
English (en)
Other versions
FR2550681A1 (fr
Inventor
Claude Lejeune
Jean-Paul Gilles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR8313298A priority Critical patent/FR2550681B1/fr
Priority to DE19843429591 priority patent/DE3429591A1/de
Priority to GB08420372A priority patent/GB2146836B/en
Priority to DK386984A priority patent/DK386984A/da
Publication of FR2550681A1 publication Critical patent/FR2550681A1/fr
Application granted granted Critical
Publication of FR2550681B1 publication Critical patent/FR2550681B1/fr
Priority to US06/914,547 priority patent/US4782235A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
FR8313298A 1983-08-12 1983-08-12 Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs Expired FR2550681B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8313298A FR2550681B1 (fr) 1983-08-12 1983-08-12 Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs
DE19843429591 DE3429591A1 (de) 1983-08-12 1984-08-10 Ionenquelle mit wenigstens zwei ionisationskammern, insbesondere zur bildung von chemisch aktiven ionenstrahlen
GB08420372A GB2146836B (en) 1983-08-12 1984-08-10 A source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams
DK386984A DK386984A (da) 1983-08-12 1984-08-10 Ionkilde med mindst to ioniseringskamre
US06/914,547 US4782235A (en) 1983-08-12 1986-10-01 Source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8313298A FR2550681B1 (fr) 1983-08-12 1983-08-12 Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs

Publications (2)

Publication Number Publication Date
FR2550681A1 FR2550681A1 (fr) 1985-02-15
FR2550681B1 true FR2550681B1 (fr) 1985-12-06

Family

ID=9291611

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8313298A Expired FR2550681B1 (fr) 1983-08-12 1983-08-12 Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs

Country Status (5)

Country Link
US (1) US4782235A (fr)
DE (1) DE3429591A1 (fr)
DK (1) DK386984A (fr)
FR (1) FR2550681B1 (fr)
GB (1) GB2146836B (fr)

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US6249423B1 (en) 1998-04-21 2001-06-19 Cardiac Pacemakers, Inc. Electrolytic capacitor and multi-anodic attachment
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US6275729B1 (en) * 1998-10-02 2001-08-14 Cardiac Pacemakers, Inc. Smaller electrolytic capacitors for implantable defibrillators
US6556863B1 (en) * 1998-10-02 2003-04-29 Cardiac Pacemakers, Inc. High-energy capacitors for implantable defibrillators
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US6385490B1 (en) 1999-12-16 2002-05-07 Cardiac Pacemakers, Inc. Capacitors with recessed rivets allow smaller implantable defibrillators
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RU2208871C1 (ru) * 2002-03-26 2003-07-20 Минаков Валерий Иванович Плазменный источник электронов
US7511246B2 (en) 2002-12-12 2009-03-31 Perkinelmer Las Inc. Induction device for generating a plasma
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US7742167B2 (en) 2005-06-17 2010-06-22 Perkinelmer Health Sciences, Inc. Optical emission device with boost device
US8622735B2 (en) * 2005-06-17 2014-01-07 Perkinelmer Health Sciences, Inc. Boost devices and methods of using them
TWI275327B (en) * 2005-09-13 2007-03-01 Quanta Display Inc Apparatus for producing atomic beam
KR100856527B1 (ko) * 2006-11-07 2008-09-04 한국원자력연구원 대전류 수소음이온 인출장치 및 그 방법
JP5287850B2 (ja) * 2008-04-08 2013-09-11 株式会社島津製作所 プラズマｃｖｄ用のカソード電極、およびプラズマｃｖｄ装置
DE102008022181B4 (de) * 2008-05-05 2019-05-02 Arianegroup Gmbh Ionentriebwerk
EP2342732B1 (fr) * 2008-09-15 2018-03-14 Centre National de la Recherche Scientifique (CNRS) Dispositif de génération d'un faisceau d'ions avec filtre magnétique
DE102009017647A1 (de) * 2009-04-16 2010-10-21 Siemens Aktiengesellschaft Ionenquelle zum Erzeugen eines Partikelstrahls, Elektrode für eine Ionenquelle sowie Verfahren zum Einleiten eines zu ionisierenden Gases in eine Ionenquelle
US8294369B1 (en) * 2009-05-04 2012-10-23 Old Dominion University Low temperature plasma generator having an elongate discharge tube
US9259798B2 (en) 2012-07-13 2016-02-16 Perkinelmer Health Sciences, Inc. Torches and methods of using them
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US9921184B2 (en) * 2016-05-20 2018-03-20 Terrapower, Llc Sodium-cesium ionization detector
CA3016932C (fr) 2016-05-20 2024-04-09 Terrapower, Llc Systeme et procede de piege a vapeur de sodium-cesium
CN207038182U (zh) 2017-03-29 2018-02-23 泰拉能源有限责任公司 铯收集器
CN109209727A (zh) * 2018-10-26 2019-01-15 隆成利达（大连）科技有限公司 双放电模式等离子体点火器的点火方法
EP4018014A1 (fr) 2019-08-23 2022-06-29 TerraPower, LLC Vaporisateur de sodium et procédé d'utilisation d'un vaporisateur de sodium
US11658020B2 (en) * 2020-11-24 2023-05-23 Inficon, Inc. Ion source assembly with multiple ionization volumes for use in a mass spectrometer

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US3472751A (en) * 1965-06-16 1969-10-14 Ion Physics Corp Method and apparatus for forming deposits on a substrate by cathode sputtering using a focussed ion beam
US3474021A (en) * 1966-01-12 1969-10-21 Ibm Method of forming openings using sequential sputtering and chemical etching
US3408283A (en) * 1966-09-15 1968-10-29 Kennecott Copper Corp High current duoplasmatron having an apertured anode positioned in the low pressure region
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FR1572367A (fr) * 1968-04-12 1969-06-27
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US3732158A (en) * 1971-01-14 1973-05-08 Nasa Method and apparatus for sputtering utilizing an apertured electrode and a pulsed substrate bias
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DE3134337A1 (de) * 1981-08-31 1983-03-24 Technics GmbH Europa, 8011 Kirchheim Ionenstrahlkanone

Also Published As

Publication number Publication date
US4782235A (en) 1988-11-01
DE3429591A1 (de) 1985-03-21
DK386984A (da) 1985-02-13
DK386984D0 (da) 1984-08-10
FR2550681A1 (fr) 1985-02-15
GB8420372D0 (en) 1984-09-12
GB2146836A (en) 1985-04-24
GB2146836B (en) 1987-09-16

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Legal Events

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