FR2528233A1 - Structure de doigt d'emetteur dans un transistor de commutation - Google Patents
Structure de doigt d'emetteur dans un transistor de commutation Download PDFInfo
- Publication number
- FR2528233A1 FR2528233A1 FR8209954A FR8209954A FR2528233A1 FR 2528233 A1 FR2528233 A1 FR 2528233A1 FR 8209954 A FR8209954 A FR 8209954A FR 8209954 A FR8209954 A FR 8209954A FR 2528233 A1 FR2528233 A1 FR 2528233A1
- Authority
- FR
- France
- Prior art keywords
- gold
- emitter
- layer
- atoms
- zones
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910052737 gold Inorganic materials 0.000 claims abstract description 21
- 239000010931 gold Substances 0.000 claims abstract description 21
- 238000009792 diffusion process Methods 0.000 claims abstract description 10
- 238000001465 metallisation Methods 0.000 claims description 18
- 229910052785 arsenic Inorganic materials 0.000 claims description 13
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052698 phosphorus Inorganic materials 0.000 claims description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 8
- 239000011574 phosphorus Substances 0.000 claims description 8
- 230000005496 eutectics Effects 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 2
- 229940091658 arsenic Drugs 0.000 claims 4
- 238000002347 injection Methods 0.000 abstract description 6
- 239000007924 injection Substances 0.000 abstract description 6
- 239000002019 doping agent Substances 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
- H10D62/133—Emitter regions of BJTs
- H10D62/136—Emitter regions of BJTs of heterojunction BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/834—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge further characterised by the dopants
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8209954A FR2528233A1 (fr) | 1982-06-08 | 1982-06-08 | Structure de doigt d'emetteur dans un transistor de commutation |
| DE8383401076T DE3364513D1 (en) | 1982-06-08 | 1983-05-27 | Emitter finger structure in a switching transistor and manufacturing process |
| EP83401076A EP0096625B1 (fr) | 1982-06-08 | 1983-05-27 | Structure de doigt d'émetteur dans un transistor de commutation et procédé de fabrication |
| US06/501,189 US4609414A (en) | 1982-06-08 | 1983-06-06 | Emitter finger structure in a switching transistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8209954A FR2528233A1 (fr) | 1982-06-08 | 1982-06-08 | Structure de doigt d'emetteur dans un transistor de commutation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2528233A1 true FR2528233A1 (fr) | 1983-12-09 |
| FR2528233B1 FR2528233B1 (enExample) | 1985-05-17 |
Family
ID=9274750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8209954A Granted FR2528233A1 (fr) | 1982-06-08 | 1982-06-08 | Structure de doigt d'emetteur dans un transistor de commutation |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4609414A (enExample) |
| EP (1) | EP0096625B1 (enExample) |
| DE (1) | DE3364513D1 (enExample) |
| FR (1) | FR2528233A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2171555A (en) * | 1985-02-20 | 1986-08-28 | Philips Electronic Associated | Bipolar semiconductor device with implanted recombination region |
| JP2775503B2 (ja) * | 1990-03-13 | 1998-07-16 | 三菱電機株式会社 | 接合ゲート型電界効果トランジスタの製造方法 |
| JP5061407B2 (ja) * | 2001-01-31 | 2012-10-31 | 富士電機株式会社 | 半導体装置およびその製造方法 |
| US10199529B2 (en) * | 2008-05-28 | 2019-02-05 | Solar-Tectic, Llc | Methods of growing heteroepitaxial single crystal or large grained semiconductor films and devices thereon |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3258371A (en) * | 1962-02-01 | 1966-06-28 | Semiconductor Res Found | Silicon semiconductor device for high frequency, and method of its manufacture |
| US3728592A (en) * | 1969-05-09 | 1973-04-17 | Ibm | Semiconductor structure having reduced carrier lifetime |
| US3943549A (en) * | 1972-03-15 | 1976-03-09 | Bbc Brown, Boveri & Company, Limited | Thyristor |
| JPS5342234B2 (enExample) * | 1973-02-12 | 1978-11-09 | ||
| US4177477A (en) * | 1974-03-11 | 1979-12-04 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor switching device |
| FR2374742A1 (fr) * | 1976-12-20 | 1978-07-13 | Radiotechnique Compelec | Transistor multicouche pour tensions elevees et son procede de fabrication |
| FR2374743A1 (fr) * | 1976-12-20 | 1978-07-13 | Radiotechnique Compelec | Transistor multicouche a emetteur compose |
| US4345266A (en) * | 1978-07-20 | 1982-08-17 | General Electric Company | Transistor having improved turn-off time and second breakdown characteristics with bi-level emitter structure |
| GB2026236B (en) * | 1978-07-20 | 1983-02-02 | Gen Electric | Power transistor |
| JPS5565460A (en) * | 1978-11-09 | 1980-05-16 | Ibm | Method of manufacturing semiconductor device improved in current gain |
| FR2451106A1 (fr) * | 1979-03-09 | 1980-10-03 | Thomson Csf | Dispositif semi-conducteur de commutation a frequence elevee |
-
1982
- 1982-06-08 FR FR8209954A patent/FR2528233A1/fr active Granted
-
1983
- 1983-05-27 EP EP83401076A patent/EP0096625B1/fr not_active Expired
- 1983-05-27 DE DE8383401076T patent/DE3364513D1/de not_active Expired
- 1983-06-06 US US06/501,189 patent/US4609414A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0096625A1 (fr) | 1983-12-21 |
| FR2528233B1 (enExample) | 1985-05-17 |
| US4609414A (en) | 1986-09-02 |
| EP0096625B1 (fr) | 1986-07-16 |
| DE3364513D1 (en) | 1986-08-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CD | Change of name or company name |