FR2526090B1 - Dispositif de chauffage pour une turbopompe moleculaire - Google Patents

Dispositif de chauffage pour une turbopompe moleculaire

Info

Publication number
FR2526090B1
FR2526090B1 FR838307316A FR8307316A FR2526090B1 FR 2526090 B1 FR2526090 B1 FR 2526090B1 FR 838307316 A FR838307316 A FR 838307316A FR 8307316 A FR8307316 A FR 8307316A FR 2526090 B1 FR2526090 B1 FR 2526090B1
Authority
FR
France
Prior art keywords
heating device
molecular turbopump
turbopump
molecular
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR838307316A
Other languages
English (en)
Other versions
FR2526090A1 (fr
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PFEIFFER VAKUUMTECHNIK
Original Assignee
PFEIFFER VAKUUMTECHNIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PFEIFFER VAKUUMTECHNIK filed Critical PFEIFFER VAKUUMTECHNIK
Publication of FR2526090A1 publication Critical patent/FR2526090A1/fr
Application granted granted Critical
Publication of FR2526090B1 publication Critical patent/FR2526090B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
    • H05B6/105—Induction heating apparatus, other than furnaces, for specific applications using a susceptor
    • H05B6/109—Induction heating apparatus, other than furnaces, for specific applications using a susceptor using magnets rotating with respect to a susceptor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
    • H05B6/105—Induction heating apparatus, other than furnaces, for specific applications using a susceptor
    • H05B6/108—Induction heating apparatus, other than furnaces, for specific applications using a susceptor for heating a fluid

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
FR838307316A 1982-05-03 1983-05-03 Dispositif de chauffage pour une turbopompe moleculaire Expired - Lifetime FR2526090B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3216404A DE3216404C2 (de) 1982-05-03 1982-05-03 Heizung für eine Turbo-Molekularpumpe

Publications (2)

Publication Number Publication Date
FR2526090A1 FR2526090A1 (fr) 1983-11-04
FR2526090B1 true FR2526090B1 (fr) 1990-01-05

Family

ID=6162517

Family Applications (1)

Application Number Title Priority Date Filing Date
FR838307316A Expired - Lifetime FR2526090B1 (fr) 1982-05-03 1983-05-03 Dispositif de chauffage pour une turbopompe moleculaire

Country Status (6)

Country Link
JP (1) JPS5932697A (fr)
CH (1) CH662691A5 (fr)
DE (1) DE3216404C2 (fr)
FR (1) FR2526090B1 (fr)
GB (1) GB2119609B (fr)
IT (1) IT1161046B (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6411393U (fr) * 1987-07-09 1989-01-20
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
US5914065A (en) * 1996-03-18 1999-06-22 Alavi; Kamal Apparatus and method for heating a fluid by induction heating
JP3982656B2 (ja) * 1998-05-19 2007-09-26 臼井国際産業株式会社 マグネット式ヒーター
DE19858137B4 (de) * 1998-12-16 2016-12-15 BSH Hausgeräte GmbH Heizung zum Erwärmen der Spülflüssigkeit in einer Geschirrspülmaschine
GB2362306A (en) * 2000-02-19 2001-11-14 Malcolm Robert Snowball Eddy current heating of fluid flow impeller
KR20040040435A (ko) * 2001-07-24 2004-05-12 마그텍,엘엘시 자석 히터 장치 및 열생성 방법
US7339144B2 (en) 2001-07-24 2008-03-04 Magtec Llc Magnetic heat generation
US7573009B2 (en) 2001-07-24 2009-08-11 Magtec Energy, Llc Controlled magnetic heat generation
US7420144B2 (en) 2002-07-23 2008-09-02 Magtec Llc Controlled torque magnetic heat generation
EP3441617B1 (fr) * 2017-08-09 2019-12-25 Pfeiffer Vacuum Gmbh Procédé de chauffage d'un rotor d'une pompe à vide
JP2023000891A (ja) 2021-06-18 2023-01-04 エドワーズ株式会社 真空ポンプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2566274A (en) * 1947-06-13 1951-08-28 Eastman Kodak Co Eddy current heating of rotors
US2549362A (en) * 1948-11-27 1951-04-17 Silto S A Soc Heating device of the hot-air type
DE1106440B (de) * 1956-02-04 1961-05-10 Max Baermann Vorrichtung zum Erwaermen des Inhaltes von ganz oder teilweise aus elektrisch bzw. magnetisch gut leitendem Werkstoff bestehenden Behaeltern, insbesondere zum Erhitzen der Speisen in Kochtoepfen, Pfannen od. dgl. mittels eines umlaufenden, mechanisch angetriebenen mehrpoligen Magnetsystems
US3014116A (en) * 1960-06-20 1961-12-19 Macarthur Arthur Magnetic heater
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
JPS5017687A (fr) * 1973-06-13 1975-02-25
JPS5134441A (en) * 1974-09-18 1976-03-24 Tomoya Desaki Ryutai no kanetsuyusohoho

Also Published As

Publication number Publication date
FR2526090A1 (fr) 1983-11-04
JPS5932697A (ja) 1984-02-22
GB8311657D0 (en) 1983-06-02
DE3216404C2 (de) 1984-05-03
IT1161046B (it) 1987-03-11
DE3216404A1 (de) 1983-11-10
IT8320671A0 (it) 1983-04-19
CH662691A5 (de) 1987-10-15
GB2119609B (en) 1985-11-13
GB2119609A (en) 1983-11-16
JPH0368238B2 (fr) 1991-10-25

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