FR2512270B1 - - Google Patents
Info
- Publication number
- FR2512270B1 FR2512270B1 FR8116388A FR8116388A FR2512270B1 FR 2512270 B1 FR2512270 B1 FR 2512270B1 FR 8116388 A FR8116388 A FR 8116388A FR 8116388 A FR8116388 A FR 8116388A FR 2512270 B1 FR2512270 B1 FR 2512270B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32614—Consumable cathodes for arc discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
- Electroluminescent Light Sources (AREA)
- Discharge Heating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/SU1981/000014 WO1982002906A1 (fr) | 1981-02-23 | 1981-02-23 | Cathode consommable pour evaporateur de metal a arc electrique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2512270A1 FR2512270A1 (fr) | 1983-03-04 |
FR2512270B1 true FR2512270B1 (fr) | 1984-01-06 |
Family
ID=21616717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8116388A Granted FR2512270A1 (fr) | 1981-02-23 | 1981-08-27 | Cathode consommable pour evaporateur de metaux a arc electrique |
Country Status (10)
Country | Link |
---|---|
US (1) | US4563262A (fr) |
JP (1) | JPS6011103B2 (fr) |
CA (1) | CA1179972A (fr) |
CH (1) | CH651072A5 (fr) |
DE (1) | DE3152736C2 (fr) |
FR (1) | FR2512270A1 (fr) |
GB (1) | GB2106545B (fr) |
NL (1) | NL8201806A (fr) |
SE (1) | SE452030B (fr) |
WO (1) | WO1982002906A1 (fr) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4351855A (en) * | 1981-02-24 | 1982-09-28 | Eduard Pinkhasov | Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum |
US4609564C2 (en) * | 1981-02-24 | 2001-10-09 | Masco Vt Inc | Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase |
US4537794A (en) * | 1981-02-24 | 1985-08-27 | Wedtech Corp. | Method of coating ceramics |
US4596719A (en) * | 1981-02-24 | 1986-06-24 | Wedtech Corp. | Multilayer coating method and apparatus |
GB2140040B (en) * | 1983-05-09 | 1986-09-17 | Vac Tec Syst | Evaporation arc stabilization |
US4448659A (en) * | 1983-09-12 | 1984-05-15 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization including initial target cleaning |
FR2556373B1 (fr) * | 1983-12-07 | 1989-09-08 | Vac Tec Syst | Procede ameliore et appareil pour la stabilisation d'un arc de pulverisation de cibles non permeables a l'aide d'un anneau d'arret permeable |
US5096558A (en) * | 1984-04-12 | 1992-03-17 | Plasco Dr. Ehrich Plasma - Coating Gmbh | Method and apparatus for evaporating material in vacuum |
IL74360A (en) * | 1984-05-25 | 1989-01-31 | Wedtech Corp | Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase |
US4620913A (en) * | 1985-11-15 | 1986-11-04 | Multi-Arc Vacuum Systems, Inc. | Electric arc vapor deposition method and apparatus |
WO1987005948A1 (fr) * | 1986-04-04 | 1987-10-08 | Regents Of The University Of Minnesota | Revetement a l'arc de composes metalliques refractaires |
GB2202237A (en) * | 1987-03-12 | 1988-09-21 | Vac Tec Syst | Cathodic arc plasma deposition of hard coatings |
US5298136A (en) * | 1987-08-18 | 1994-03-29 | Regents Of The University Of Minnesota | Steered arc coating with thick targets |
DE3901401C2 (de) * | 1988-03-01 | 1996-12-19 | Fraunhofer Ges Forschung | Verfahren zur Steuerung einer Vakuum-Lichtbogenentladung |
CS275226B2 (en) * | 1989-09-13 | 1992-02-19 | Fyzikalni Ustav Csav | Method of arc discharge's cathode vaporization with cathode spots and macroparticles' reduced emission and device for realization of this method |
JPH03106506A (ja) * | 1989-09-19 | 1991-05-07 | Nkk Corp | 圧延機のロールカリバー中心とパスライン中心を一致させる調整方法 |
DE4026494A1 (de) * | 1990-08-22 | 1992-02-27 | Ehrich Plasma Coating | Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren |
US5126030A (en) * | 1990-12-10 | 1992-06-30 | Kabushiki Kaisha Kobe Seiko Sho | Apparatus and method of cathodic arc deposition |
DE4223592C2 (de) * | 1992-06-24 | 2001-05-17 | Leybold Ag | Lichtbogen-Verdampfungsvorrichtung |
DE4336680C2 (de) * | 1993-10-27 | 1998-05-14 | Fraunhofer Ges Forschung | Verfahren zum Elektronenstrahlverdampfen |
EP0658634B1 (fr) * | 1993-12-17 | 1999-03-10 | KABUSHIKI KAISHA KOBE SEIKO SHO also known as Kobe Steel Ltd. | Dispositif de dépÔt par arc sous vide |
US5518597A (en) * | 1995-03-28 | 1996-05-21 | Minnesota Mining And Manufacturing Company | Cathodic arc coating apparatus and method |
DE19924094C2 (de) * | 1999-05-21 | 2003-04-30 | Fraunhofer Ges Forschung | Vakuumbogenverdampfer und Verfahren zu seinem Betrieb |
EP1111086B1 (fr) * | 1999-12-20 | 2009-04-08 | United Technologies Corporation | Utilisation d'une cathode pour dépôt sous vide avec décharge d'arc |
CN100338255C (zh) * | 2003-10-13 | 2007-09-19 | 沈阳黎明航空发动机(集团)有限责任公司 | 一种铝硅钇扩散合金化涂层的制备方法 |
CH696828A5 (de) * | 2003-11-18 | 2007-12-14 | Oerlikon Trading Ag | Zündvorrichtung. |
US9153422B2 (en) | 2011-08-02 | 2015-10-06 | Envaerospace, Inc. | Arc PVD plasma source and method of deposition of nanoimplanted coatings |
RU2510428C1 (ru) * | 2013-03-15 | 2014-03-27 | Федеральное Государственное Унитарное Предприятие "Научно-Производственное Объединение "Техномаш" | Электродуговой испаритель металлов и сплавов |
US10954594B2 (en) * | 2015-09-30 | 2021-03-23 | Applied Materials, Inc. | High temperature vapor delivery system and method |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1214851A (en) * | 1967-12-05 | 1970-12-09 | Rheinstahl Henschel Ag | Method of producing materials from metal starting materials having different melting temperatures |
FR1594668A (fr) * | 1968-10-15 | 1970-06-08 | ||
US3836451A (en) * | 1968-12-26 | 1974-09-17 | A Snaper | Arc deposition apparatus |
SU284883A1 (ru) * | 1969-01-10 | 1976-05-15 | А. А. Романов, А. А. Андреев , В. Н. Козлов | Электродуговой испаритель |
US3725238A (en) * | 1969-07-28 | 1973-04-03 | Gillette Co | Target element |
SU368807A1 (ru) * | 1970-10-19 | 1978-05-29 | Stupak R I | Электродуговой испаритель |
SU426540A1 (ru) * | 1971-09-20 | 1975-10-05 | Электроразр дное устройство дл нанесени покрытий в вакууме | |
US3854984A (en) * | 1971-12-17 | 1974-12-17 | Gen Electric | Vacuum deposition of multi-element coatings and films with a single source |
US3783231A (en) * | 1972-03-22 | 1974-01-01 | V Gorbunov | Apparatus for vacuum-evaporation of metals under the action of an electric arc |
DE2307649B2 (de) * | 1973-02-16 | 1980-07-31 | Robert Bosch Gmbh, 7000 Stuttgart | Anordnung zum Aufstäuben verschiedener Materialien auf einem Substrat |
US4001461A (en) * | 1973-03-30 | 1977-01-04 | David Grigorievich Bykhovsky | Method of producing electrode units for plasmatrons |
US3974058A (en) * | 1974-09-16 | 1976-08-10 | Basf Wyandotte Corporation | Ruthenium coated cathodes |
JPS54110988A (en) * | 1978-01-31 | 1979-08-30 | Nii Chiefunorogii Afutomobirin | Coating vacuum evaporation apparatus |
JPS5732370A (en) * | 1980-07-31 | 1982-02-22 | Matsushita Electric Ind Co Ltd | Sputtering and vapor-depositing method and formation of magnetic gap by said method |
ZA817441B (en) * | 1980-11-21 | 1982-10-27 | Imi Kynoch Ltd | Anode |
DE3149910A1 (de) * | 1981-12-16 | 1983-06-23 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zur kathodenzerstaeubung von mindestens zwei verschiedenen materialien |
CA1193227A (fr) * | 1982-11-18 | 1985-09-10 | Kovilvila Ramachandran | Appareil de pulverisation cathodique a magnetron |
US4417968A (en) * | 1983-03-21 | 1983-11-29 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
-
1981
- 1981-02-23 JP JP81501238A patent/JPS6011103B2/ja not_active Expired
- 1981-02-23 GB GB08229370A patent/GB2106545B/en not_active Expired
- 1981-02-23 CH CH6144/82A patent/CH651072A5/de not_active IP Right Cessation
- 1981-02-23 DE DE19813152736 patent/DE3152736C2/de not_active Expired
- 1981-02-23 WO PCT/SU1981/000014 patent/WO1982002906A1/fr active Application Filing
- 1981-07-24 CA CA000382518A patent/CA1179972A/fr not_active Expired
- 1981-08-27 FR FR8116388A patent/FR2512270A1/fr active Granted
-
1982
- 1982-02-23 US US06/626,472 patent/US4563262A/en not_active Expired - Fee Related
- 1982-05-01 NL NL8201806A patent/NL8201806A/nl active Search and Examination
- 1982-10-13 SE SE8205821A patent/SE452030B/sv not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPS6011103B2 (ja) | 1985-03-23 |
US4563262A (en) | 1986-01-07 |
SE8205821D0 (sv) | 1982-10-13 |
GB2106545A (en) | 1983-04-13 |
GB2106545B (en) | 1985-06-26 |
JPS58500069A (ja) | 1983-01-13 |
NL8201806A (nl) | 1983-12-01 |
DE3152736T1 (de) | 1983-02-24 |
SE452030B (sv) | 1987-11-09 |
CH651072A5 (de) | 1985-08-30 |
FR2512270A1 (fr) | 1983-03-04 |
DE3152736C2 (de) | 1984-04-05 |
WO1982002906A1 (fr) | 1982-09-02 |
SE8205821L (sv) | 1982-10-13 |
CA1179972A (fr) | 1984-12-27 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |