FR2511360B1 - Composition de verre sans alcali pour la production de masques de photogravure - Google Patents

Composition de verre sans alcali pour la production de masques de photogravure

Info

Publication number
FR2511360B1
FR2511360B1 FR8214129A FR8214129A FR2511360B1 FR 2511360 B1 FR2511360 B1 FR 2511360B1 FR 8214129 A FR8214129 A FR 8214129A FR 8214129 A FR8214129 A FR 8214129A FR 2511360 B1 FR2511360 B1 FR 2511360B1
Authority
FR
France
Prior art keywords
photograving
masks
production
glass composition
free glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8214129A
Other languages
English (en)
Other versions
FR2511360A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of FR2511360A1 publication Critical patent/FR2511360A1/fr
Application granted granted Critical
Publication of FR2511360B1 publication Critical patent/FR2511360B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/60—Substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/102—Glass compositions containing silica with 40% to 90% silica, by weight containing lead
    • C03C3/105—Glass compositions containing silica with 40% to 90% silica, by weight containing lead containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/11—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen
    • C03C3/112—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Glass Compositions (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
FR8214129A 1981-08-14 1982-08-13 Composition de verre sans alcali pour la production de masques de photogravure Expired FR2511360B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56126805A JPS5832038A (ja) 1981-08-14 1981-08-14 フオトエツチングマスク用無アルカリガラス

Publications (2)

Publication Number Publication Date
FR2511360A1 FR2511360A1 (fr) 1983-02-18
FR2511360B1 true FR2511360B1 (fr) 1985-07-05

Family

ID=14944392

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8214129A Expired FR2511360B1 (fr) 1981-08-14 1982-08-13 Composition de verre sans alcali pour la production de masques de photogravure

Country Status (5)

Country Link
US (1) US4391916A (fr)
JP (1) JPS5832038A (fr)
DE (1) DE3207315C2 (fr)
FR (1) FR2511360B1 (fr)
GB (1) GB2107698B (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4501819A (en) * 1982-12-23 1985-02-26 Kabushiki Kaisha Ohara Kogaku Garasu Seizosho Glass for a photomask
NL8301604A (nl) * 1983-05-06 1984-12-03 Philips Nv Dielektrisch glas in meerlagenschakelingen en hiermee uitgeruste dikke filmschakelingen.
JPS6033556A (ja) * 1983-08-05 1985-02-20 Konishiroku Photo Ind Co Ltd ドライエッチング用フォトマスク素材
JPS6042247A (ja) * 1983-08-16 1985-03-06 Asahi Glass Co Ltd 低膨張性ガラス
US4554259A (en) * 1984-05-08 1985-11-19 Schott Glass Technologies, Inc. Low expansion, alkali-free borosilicate glass suitable for photomask applications
DD262653A1 (de) * 1987-06-15 1988-12-07 Jenaer Glaswerk Veb Photomaskenglas niedriger ausdehnung mit verbesserten hafteigenschaften
GB2310663A (en) * 1996-02-29 1997-09-03 British Tech Group Organic polyacid/base reaction cement
JP2000510803A (ja) * 1996-02-29 2000-08-22 ビーティージー・インターナショナル・リミテッド 有機ポリ酸／塩基反応セメント
JP4677710B2 (ja) * 2003-10-17 2011-04-27 東ソー株式会社 紫外線遮蔽ガラス、その製造方法、これを用いた紫外線遮蔽ガラス部材及び装置
CN105957803A (zh) * 2016-06-13 2016-09-21 四川洪芯微科技有限公司 一种半导体器件的钝化方法及半导体器件
BR102016022710A2 (pt) 2016-09-29 2018-05-02 Brf S.A. Processo de fabricação de um hidrolisado proteico animal, hidrolisado proteico animal e seus usos

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE459597A (fr) * 1943-12-04
US3069294A (en) * 1954-06-03 1962-12-18 Corning Glass Works Electrical metal oxide resistor having a glass enamel coating
NL257758A (fr) * 1958-12-02
DE1421909A1 (de) * 1960-11-14 1968-12-12 Owens Illinois Inc Feuerfeste Glaszusammensetzung
US3450546A (en) * 1966-05-26 1969-06-17 Corning Glass Works Transparent glass-ceramic articles and method for producing
JPS5110844B2 (fr) * 1973-04-24 1976-04-07
GB1408256A (en) * 1974-02-08 1975-10-01 Du Pont Dielectric compositions and glass frits for use as components thereof
DE2615534C3 (de) * 1976-04-09 1978-10-05 Jenaer Glaswerk Schott & Gen., 6500 Mainz Für die Nachrichtenübertragung geeignete Lichtleitfaser mit Gradientenprofil aus Mehrkomponentengläsern mit angepaßtem Ausdehnungskoeffizienten zwischen Glaskern und Glasmantel sowie Verfahren zu ihrer Herstellung
JPS5645870A (en) * 1979-09-17 1981-04-25 Ngk Insulators Ltd Ceramic structure mounted in ceramic cylindrical body with ceramic member having diffrent coefficient of thermal expansion

Also Published As

Publication number Publication date
DE3207315C2 (de) 1987-11-12
FR2511360A1 (fr) 1983-02-18
JPS5832038A (ja) 1983-02-24
GB2107698A (en) 1983-05-05
DE3207315A1 (de) 1983-03-03
JPS615665B2 (fr) 1986-02-20
GB2107698B (en) 1984-11-28
US4391916A (en) 1983-07-05

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