FR2493041B1 - Dispositif de balayage a faisceau de particules chargees - Google Patents

Dispositif de balayage a faisceau de particules chargees

Info

Publication number
FR2493041B1
FR2493041B1 FR8119964A FR8119964A FR2493041B1 FR 2493041 B1 FR2493041 B1 FR 2493041B1 FR 8119964 A FR8119964 A FR 8119964A FR 8119964 A FR8119964 A FR 8119964A FR 2493041 B1 FR2493041 B1 FR 2493041B1
Authority
FR
France
Prior art keywords
scanning device
particle beam
loaded particle
loaded
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8119964A
Other languages
English (en)
Other versions
FR2493041A1 (fr
Inventor
Setsuo Norioka
Naoki Date
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2493041A1 publication Critical patent/FR2493041A1/fr
Application granted granted Critical
Publication of FR2493041B1 publication Critical patent/FR2493041B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/10—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical
    • H04N3/16—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical by deflecting electron beam in cathode-ray tube, e.g. scanning corrections
    • H04N3/22—Circuits for controlling dimensions, shape or centering of picture on screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Details Of Television Scanning (AREA)
FR8119964A 1980-10-24 1981-10-23 Dispositif de balayage a faisceau de particules chargees Expired FR2493041B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55149165A JPS5773573A (en) 1980-10-24 1980-10-24 Electronic beam scanning circuit

Publications (2)

Publication Number Publication Date
FR2493041A1 FR2493041A1 (fr) 1982-04-30
FR2493041B1 true FR2493041B1 (fr) 1986-10-17

Family

ID=15469212

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8119964A Expired FR2493041B1 (fr) 1980-10-24 1981-10-23 Dispositif de balayage a faisceau de particules chargees

Country Status (5)

Country Link
US (1) US4439681A (fr)
JP (1) JPS5773573A (fr)
DE (1) DE3140869C2 (fr)
FR (1) FR2493041B1 (fr)
GB (1) GB2086182B (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0314947A1 (fr) * 1987-11-03 1989-05-10 Siemens Aktiengesellschaft Circuit permettant un déplacement d'image indépendant du grandissement dans un appareil à faisceau corpusculaire
US5834774A (en) * 1996-07-24 1998-11-10 Jeol Ltd. Scanning electron microscope
US6727911B1 (en) * 1999-04-28 2004-04-27 Jeol Ltd. Method and apparatus for observing specimen image on scanning charged-particle beam instrument
JP4748714B2 (ja) * 2005-10-28 2011-08-17 エスアイアイ・ナノテクノロジー株式会社 荷電粒子ビーム走査照射方法、荷電粒子ビーム装置、試料観察方法、及び、試料加工方法
JP2007123164A (ja) * 2005-10-31 2007-05-17 Sii Nanotechnology Inc 荷電粒子ビーム照射方法及び荷電粒子ビーム装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1398513A (en) * 1971-05-18 1975-06-25 Drayton W B D Electron probe instruments
GB1441824A (en) * 1973-04-19 1976-07-07 Cambridge Scientific Instr Ltd Scanning electronbeam instrument
DE2617159A1 (de) * 1976-04-20 1977-11-10 Siemens Ag Vorrichtung zur erzeugung rasterverzerrungsfreier rem-bilder
US4057722A (en) * 1975-09-25 1977-11-08 Siemens Aktiengesellschaft Method and apparatus for the generation of distortion-free images with electron microscope
JPS5275261A (en) * 1975-12-19 1977-06-24 Jeol Ltd Test piece image dispaly unit

Also Published As

Publication number Publication date
JPS6240815B2 (fr) 1987-08-31
JPS5773573A (en) 1982-05-08
GB2086182A (en) 1982-05-06
DE3140869C2 (de) 1985-04-11
US4439681A (en) 1984-03-27
DE3140869A1 (de) 1982-06-16
GB2086182B (en) 1985-02-20
FR2493041A1 (fr) 1982-04-30

Similar Documents

Publication Publication Date Title
GB8328690D0 (en) Light beam scanning device
FR2518000B1 (fr) Dispositif de soudage
FR2479453B1 (fr) Dispositif detecteur
FR2538597B1 (fr) Dispositif de chargement de disque
FR2415925B1 (fr) Dispositif de formation de faisceau
BE890444A (fr) Dispositif de visee
FR2506072B1 (fr) Accelerateur de faisceau de particules
EP0075964A3 (en) Laser device
ES504242A0 (es) Aparato de carga
GB2044478B (en) Light beam scanning device
JPS556385A (en) Light beam scanning device
DE3279403D1 (en) Partial beam focus sensing device
FR2488231B1 (fr) Dispositif de blocage en matiere de manutention de fardeaux
FR2497350B1 (fr) Detecteur de particules a diffusion vers l'avant
BE889652A (fr) Dispositif perfectionne de retenue de chargement
DE3484191D1 (de) Lichtstrahlabtastvorrichtung.
BE889582A (fr) Dispositif perfectionne de retenue de chargement
JPS5740223A (en) Beam scanning device
FR2476575B1 (fr) Dispositif hydraulique-pneumatique renforcateur de freinage
FR2444264B1 (fr) Dispositif directeur de faisceau optique
FR2505100B1 (fr) Dispositif laser
BE863050A (fr) Dispositif de stockage final de dechets radio-actifs
FR2493041B1 (fr) Dispositif de balayage a faisceau de particules chargees
FR2516252B1 (fr) Dispositif de focalisation automatique
DE68911987D1 (de) Ladungsteilchenstrahlgerät.

Legal Events

Date Code Title Description
ST Notification of lapse