GB1441824A - Scanning electronbeam instrument - Google Patents

Scanning electronbeam instrument

Info

Publication number
GB1441824A
GB1441824A GB1914273A GB1914273A GB1441824A GB 1441824 A GB1441824 A GB 1441824A GB 1914273 A GB1914273 A GB 1914273A GB 1914273 A GB1914273 A GB 1914273A GB 1441824 A GB1441824 A GB 1441824A
Authority
GB
United Kingdom
Prior art keywords
electronbeam
scanning
instrument
scanning electronbeam
electronbeam instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1914273A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Scientific Instruments Ltd
Original Assignee
Cambridge Scientific Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Scientific Instruments Ltd filed Critical Cambridge Scientific Instruments Ltd
Priority to GB1914273A priority Critical patent/GB1441824A/en
Priority to DE2418279A priority patent/DE2418279C2/en
Priority to US462295A priority patent/US3900734A/en
Priority to JP49044396A priority patent/JPS5031770A/ja
Publication of GB1441824A publication Critical patent/GB1441824A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB1914273A 1973-04-19 1973-04-19 Scanning electronbeam instrument Expired GB1441824A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB1914273A GB1441824A (en) 1973-04-19 1973-04-19 Scanning electronbeam instrument
DE2418279A DE2418279C2 (en) 1973-04-19 1974-04-16 Electron beam scanning instrument
US462295A US3900734A (en) 1973-04-19 1974-04-18 Scanning electron-beam instrument
JP49044396A JPS5031770A (en) 1973-04-19 1974-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1914273A GB1441824A (en) 1973-04-19 1973-04-19 Scanning electronbeam instrument

Publications (1)

Publication Number Publication Date
GB1441824A true GB1441824A (en) 1976-07-07

Family

ID=10124460

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1914273A Expired GB1441824A (en) 1973-04-19 1973-04-19 Scanning electronbeam instrument

Country Status (4)

Country Link
US (1) US3900734A (en)
JP (1) JPS5031770A (en)
DE (1) DE2418279C2 (en)
GB (1) GB1441824A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4891523A (en) * 1987-11-03 1990-01-02 Siemens Aktiengesellschaft Circuit for image displacement in a particle beam apparatus independently of magnification

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5721830B2 (en) * 1973-06-04 1982-05-10
JPS50158273A (en) * 1974-06-10 1975-12-22
US4057722A (en) * 1975-09-25 1977-11-08 Siemens Aktiengesellschaft Method and apparatus for the generation of distortion-free images with electron microscope
JPS5294768A (en) * 1976-02-04 1977-08-09 Jeol Ltd Electronic microscope
JPS587024B2 (en) * 1976-06-23 1983-02-08 日本電子株式会社 Image display devices such as electron microscopes
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
JPS5773573A (en) * 1980-10-24 1982-05-08 Jeol Ltd Electronic beam scanning circuit
JPS5875748A (en) * 1981-10-30 1983-05-07 Shimadzu Corp Image revolution corrector for scanning type analyzer
JPS58165968U (en) * 1982-04-30 1983-11-05 株式会社島津製作所 Electron beam scanning analyzer
JPS6161357A (en) * 1984-08-31 1986-03-29 Jeol Ltd Scanning rotation device of electron beam equipment
JPS61135457U (en) * 1985-02-14 1986-08-23
JPH0748366B2 (en) * 1988-07-29 1995-05-24 日本電子株式会社 Focused ion beam implanter

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1325540A (en) * 1969-10-10 1973-08-01 Texas Instruments Ltd Electron beam apparatus
NL7114692A (en) * 1970-10-28 1972-05-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4891523A (en) * 1987-11-03 1990-01-02 Siemens Aktiengesellschaft Circuit for image displacement in a particle beam apparatus independently of magnification

Also Published As

Publication number Publication date
US3900734A (en) 1975-08-19
JPS5031770A (en) 1975-03-28
DE2418279C2 (en) 1983-12-08
DE2418279A1 (en) 1974-11-07

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee