FR2487574A1 - Procede et dispositif d'attaque sous plasma d'une couche mince - Google Patents

Procede et dispositif d'attaque sous plasma d'une couche mince Download PDF

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Publication number
FR2487574A1
FR2487574A1 FR8016329A FR8016329A FR2487574A1 FR 2487574 A1 FR2487574 A1 FR 2487574A1 FR 8016329 A FR8016329 A FR 8016329A FR 8016329 A FR8016329 A FR 8016329A FR 2487574 A1 FR2487574 A1 FR 2487574A1
Authority
FR
France
Prior art keywords
pressure
attack
thin layer
plasma
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8016329A
Other languages
English (en)
French (fr)
Other versions
FR2487574B1 (OSRAM
Inventor
Michel Montier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EFCIS
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EFCIS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9244487&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2487574(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by EFCIS filed Critical EFCIS
Priority to FR8016329A priority Critical patent/FR2487574A1/fr
Priority to DE8181401154T priority patent/DE3164715D1/de
Priority to EP81401154A priority patent/EP0045674B1/fr
Priority to US06/285,332 priority patent/US4356055A/en
Priority to JP56115833A priority patent/JPS5741373A/ja
Publication of FR2487574A1 publication Critical patent/FR2487574A1/fr
Application granted granted Critical
Publication of FR2487574B1 publication Critical patent/FR2487574B1/fr
Granted legal-status Critical Current

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Classifications

    • H10P50/242—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Measuring Fluid Pressure (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
FR8016329A 1980-07-24 1980-07-24 Procede et dispositif d'attaque sous plasma d'une couche mince Granted FR2487574A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8016329A FR2487574A1 (fr) 1980-07-24 1980-07-24 Procede et dispositif d'attaque sous plasma d'une couche mince
DE8181401154T DE3164715D1 (en) 1980-07-24 1981-07-21 Process and apparatus for plasma-etching a thin layer
EP81401154A EP0045674B1 (fr) 1980-07-24 1981-07-21 Procédé et dispositif d'attaque sous plasma d'une couche mince
US06/285,332 US4356055A (en) 1980-07-24 1981-07-22 Process and device for monitoring the plasma etching of thin layer utilizing pressure changes in the plasma
JP56115833A JPS5741373A (en) 1980-07-24 1981-07-23 Plasma etching method and apparatus of wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8016329A FR2487574A1 (fr) 1980-07-24 1980-07-24 Procede et dispositif d'attaque sous plasma d'une couche mince

Publications (2)

Publication Number Publication Date
FR2487574A1 true FR2487574A1 (fr) 1982-01-29
FR2487574B1 FR2487574B1 (OSRAM) 1983-01-28

Family

ID=9244487

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8016329A Granted FR2487574A1 (fr) 1980-07-24 1980-07-24 Procede et dispositif d'attaque sous plasma d'une couche mince

Country Status (5)

Country Link
US (1) US4356055A (OSRAM)
EP (1) EP0045674B1 (OSRAM)
JP (1) JPS5741373A (OSRAM)
DE (1) DE3164715D1 (OSRAM)
FR (1) FR2487574A1 (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722151B2 (ja) * 1984-05-23 1995-03-08 株式会社日立製作所 エツチングモニタ−方法
US4616215A (en) * 1984-07-31 1986-10-07 Maddalena's, Inc. Vacuum monitoring and signaling apparatus
GB2257507B (en) * 1991-06-26 1995-03-01 Digital Equipment Corp Semiconductor wafer processing with across-wafer critical dimension monitoring using optical endpoint detection
US5372673A (en) * 1993-01-25 1994-12-13 Motorola, Inc. Method for processing a layer of material while using insitu monitoring and control
US5591300A (en) * 1995-06-07 1997-01-07 Vtc Inc. Single crystal silicon dry-etch endpoint based on dopant-dependent and thermally-assisted etch rates
US5868896A (en) 1996-11-06 1999-02-09 Micron Technology, Inc. Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers
US5854135A (en) * 1997-04-09 1998-12-29 Vanguard International Semiconductor Corporation Optimized dry etching procedure, using an oxygen containing ambient, for small diameter contact holes
US6885466B1 (en) * 1999-07-16 2005-04-26 Denso Corporation Method for measuring thickness of oxide film
WO2014176405A1 (en) * 2013-04-26 2014-10-30 Stc. Unm Determination of etching parameters for pulsed xenon difluoride (xef2) etching of silicon using chamber pressure data

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2364593A1 (fr) * 1976-09-13 1978-04-07 Northern Telecom Ltd Procede de controle du point d'arret dans une attaque par plasma et appareil mettant en oeuvre ce procede
US4198261A (en) * 1977-12-05 1980-04-15 Gould Inc. Method for end point detection during plasma etching
US4208240A (en) * 1979-01-26 1980-06-17 Gould Inc. Method and apparatus for controlling plasma etching
EP0013483A1 (en) * 1979-01-02 1980-07-23 Motorola, Inc. Apparatus and Process for Plasma-etching

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4263088A (en) * 1979-06-25 1981-04-21 Motorola, Inc. Method for process control of a plasma reaction

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2364593A1 (fr) * 1976-09-13 1978-04-07 Northern Telecom Ltd Procede de controle du point d'arret dans une attaque par plasma et appareil mettant en oeuvre ce procede
US4198261A (en) * 1977-12-05 1980-04-15 Gould Inc. Method for end point detection during plasma etching
EP0013483A1 (en) * 1979-01-02 1980-07-23 Motorola, Inc. Apparatus and Process for Plasma-etching
US4208240A (en) * 1979-01-26 1980-06-17 Gould Inc. Method and apparatus for controlling plasma etching

Also Published As

Publication number Publication date
EP0045674B1 (fr) 1984-07-11
FR2487574B1 (OSRAM) 1983-01-28
DE3164715D1 (en) 1984-08-16
US4356055A (en) 1982-10-26
JPS5741373A (en) 1982-03-08
EP0045674A1 (fr) 1982-02-10
JPH0217634B2 (OSRAM) 1990-04-23

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