FR2486251A1 - Procede de realisation d'un reseau optique - Google Patents

Procede de realisation d'un reseau optique Download PDF

Info

Publication number
FR2486251A1
FR2486251A1 FR8014839A FR8014839A FR2486251A1 FR 2486251 A1 FR2486251 A1 FR 2486251A1 FR 8014839 A FR8014839 A FR 8014839A FR 8014839 A FR8014839 A FR 8014839A FR 2486251 A1 FR2486251 A1 FR 2486251A1
Authority
FR
France
Prior art keywords
substrate
resin
network
layer
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8014839A
Other languages
English (en)
French (fr)
Other versions
FR2486251B1 (enrdf_load_stackoverflow
Inventor
Anne Ermolieff
Serge Valette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8014839A priority Critical patent/FR2486251A1/fr
Priority to GB8120392A priority patent/GB2079536B/en
Priority to DE19813125998 priority patent/DE3125998A1/de
Priority to CA000380998A priority patent/CA1155797A/fr
Priority to JP10432981A priority patent/JPS5745508A/ja
Publication of FR2486251A1 publication Critical patent/FR2486251A1/fr
Application granted granted Critical
Publication of FR2486251B1 publication Critical patent/FR2486251B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Holo Graphy (AREA)
FR8014839A 1980-07-03 1980-07-03 Procede de realisation d'un reseau optique Granted FR2486251A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8014839A FR2486251A1 (fr) 1980-07-03 1980-07-03 Procede de realisation d'un reseau optique
GB8120392A GB2079536B (en) 1980-07-03 1981-07-01 Process for producing an optical network
DE19813125998 DE3125998A1 (de) 1980-07-03 1981-07-01 Verfahren zur herstellung eines optischen gitters
CA000380998A CA1155797A (fr) 1980-07-03 1981-07-02 Procede de realisation d'un reseau optique
JP10432981A JPS5745508A (en) 1980-07-03 1981-07-03 Method of manufacturing optical lattice

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8014839A FR2486251A1 (fr) 1980-07-03 1980-07-03 Procede de realisation d'un reseau optique

Publications (2)

Publication Number Publication Date
FR2486251A1 true FR2486251A1 (fr) 1982-01-08
FR2486251B1 FR2486251B1 (enrdf_load_stackoverflow) 1983-12-16

Family

ID=9243808

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8014839A Granted FR2486251A1 (fr) 1980-07-03 1980-07-03 Procede de realisation d'un reseau optique

Country Status (5)

Country Link
JP (1) JPS5745508A (enrdf_load_stackoverflow)
CA (1) CA1155797A (enrdf_load_stackoverflow)
DE (1) DE3125998A1 (enrdf_load_stackoverflow)
FR (1) FR2486251A1 (enrdf_load_stackoverflow)
GB (1) GB2079536B (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0291647A3 (en) * 1987-03-23 1991-06-12 International Business Machines Corporation High resolution electron beam lithographic technique
US5836075A (en) * 1996-12-31 1998-11-17 Westinghouse Electric Corporation Process for forming combustion turbine components by transient liquid phase bonding
FR2870041A1 (fr) * 2004-05-06 2005-11-11 Nanoraptor Sa Procede de fabrication d'un composant presentant un relief nanometrique et/ou des variations d'epaisseur, composant et ses derives issus de ce procede et leurs applications

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2536911B1 (fr) * 1982-11-30 1987-09-18 Western Electric Co Photodetecteur
AT382040B (de) * 1983-03-01 1986-12-29 Guenther Stangl Verfahren zur herstellung von optisch strukturierten filtern fuer elektromagnetische strahlung und optisch strukturierter filter
JPS60123803A (ja) * 1983-12-09 1985-07-02 Pioneer Electronic Corp マイクロフレネルレンズの製造方法
JPS61149923A (ja) * 1984-12-25 1986-07-08 Sony Corp 位相型光学的ロ−パスフイルタ
GB9207627D0 (en) * 1992-04-08 1992-05-27 Northern Telecom Ltd Manufacture of optical grating structures
PL439368A1 (pl) * 2021-10-30 2023-05-02 Instytut Wysokich Ciśnień Polskiej Akademii Nauk Unipress Sposób wytwarzania obszaru o regularnie zmiennym współczynniku załamania światła w wybranej warstwie warstwowej struktury półprzewodnikowej

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1561784A (en) * 1976-11-23 1980-03-05 Atomic Energy Authority Uk Optical components

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1561784A (en) * 1976-11-23 1980-03-05 Atomic Energy Authority Uk Optical components

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/79 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0291647A3 (en) * 1987-03-23 1991-06-12 International Business Machines Corporation High resolution electron beam lithographic technique
US5836075A (en) * 1996-12-31 1998-11-17 Westinghouse Electric Corporation Process for forming combustion turbine components by transient liquid phase bonding
FR2870041A1 (fr) * 2004-05-06 2005-11-11 Nanoraptor Sa Procede de fabrication d'un composant presentant un relief nanometrique et/ou des variations d'epaisseur, composant et ses derives issus de ce procede et leurs applications

Also Published As

Publication number Publication date
JPS5745508A (en) 1982-03-15
GB2079536A (en) 1982-01-20
DE3125998A1 (de) 1982-02-04
FR2486251B1 (enrdf_load_stackoverflow) 1983-12-16
GB2079536B (en) 1984-07-11
CA1155797A (fr) 1983-10-25

Similar Documents

Publication Publication Date Title
Dames et al. Efficient optical elements to generate intensity weighted spot arrays: design and fabrication
Bartolini Characteristics of relief phase holograms recorded in photoresists
US6633419B2 (en) Production method and device for hologram
Indutnyi et al. Holographic optical element fabrication using chalcogenide layers
EP0050545B1 (fr) Lentille de Fresnel intégrée et son procédé de fabrication
EP0451047A1 (fr) Composant optique intégré protégé contre l'environnement et son procédé de fabrication
FR3092915A1 (fr) Métasurfaces optiques, procédés et systèmes de fabrication associés
US6521136B1 (en) Method for making three-dimensional photonic band-gap crystals
JP2001516469A (ja) ファイバを集積したフォトニック結晶およびそのシステム
EP0442779A1 (fr) Guide d'onde optique intégré et procédé de réalisation
EP0138668B1 (fr) Dispositif d'enregistrement d'une image cohérente dans une cavité optique multimode
FR2486251A1 (fr) Procede de realisation d'un reseau optique
EP0095960B1 (fr) Dispositif de mise en mémoire d'une image cohérente dans une cavité optique multimode
EP0007268A1 (fr) Source de rayonnement optique destinée à fournir un faisceau divergent d'ouverture angulaire uniformisée
US5105298A (en) Birefringent structures formed by photo-exposure of polymer films and method for fabrication thereof
Johnson Evolution of grating profiles under ion-beam erosion
EP0827621B1 (fr) Memoire de masse optique, ainsi que procedes de fabrication d'une telle memoire et procede d'enregistrement et/ou de lecture de donnees dans une telle memoire
Dan’ko et al. Interference photolithography with the use of resists on the basis of chalcogenide glassy semiconductors
FR2742884A1 (fr) Rejecteur spectral grand champ angulaire et procede de fabrication
US7244369B2 (en) Method for producing active or passive components on a polymer basis for integrated optical devices
Romanenko et al. Blazed holographic diffraction grating fabrication using As2Se3 inorganic photoresist
WO2006003313A1 (fr) Procede de fabrication d’un bloc optique a circuit optique integre par photopolymerisation localisee d’une matrice organique par absorption a deux photons et bloc optique ainsi obtenu
Yamaguchi et al. High Transmittance Multicolor Metasurface Holograms Made of Silicon Nitride
KR102140675B1 (ko) 광간섭을 이용한 준결정 표면 격자 패턴 형성방법 및 이로 형성된 준결정 표면 격자 패턴
EP0445268A1 (en) Optical filters

Legal Events

Date Code Title Description
ST Notification of lapse