JPS5745508A - Method of manufacturing optical lattice - Google Patents
Method of manufacturing optical latticeInfo
- Publication number
- JPS5745508A JPS5745508A JP10432981A JP10432981A JPS5745508A JP S5745508 A JPS5745508 A JP S5745508A JP 10432981 A JP10432981 A JP 10432981A JP 10432981 A JP10432981 A JP 10432981A JP S5745508 A JPS5745508 A JP S5745508A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing optical
- optical lattice
- lattice
- manufacturing
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/001—Phase modulating patterns, e.g. refractive index patterns
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8014839A FR2486251A1 (en) | 1980-07-03 | 1980-07-03 | METHOD FOR PRODUCING AN OPTICAL NETWORK |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5745508A true JPS5745508A (en) | 1982-03-15 |
Family
ID=9243808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10432981A Pending JPS5745508A (en) | 1980-07-03 | 1981-07-03 | Method of manufacturing optical lattice |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5745508A (en) |
CA (1) | CA1155797A (en) |
DE (1) | DE3125998A1 (en) |
FR (1) | FR2486251A1 (en) |
GB (1) | GB2079536B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60123803A (en) * | 1983-12-09 | 1985-07-02 | Pioneer Electronic Corp | Manufacture of micro fresnel lens |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2131229B (en) * | 1982-11-30 | 1986-06-11 | Western Electric Co | Photodetector |
AT382040B (en) * | 1983-03-01 | 1986-12-29 | Guenther Stangl | METHOD FOR PRODUCING OPTICALLY STRUCTURED FILTERS FOR ELECTROMAGNETIC RADIATION AND OPTICALLY STRUCTURED FILTERS |
JPS61149923A (en) * | 1984-12-25 | 1986-07-08 | Sony Corp | Optical low-pass filter of phase type |
US4772539A (en) * | 1987-03-23 | 1988-09-20 | International Business Machines Corporation | High resolution E-beam lithographic technique |
GB9207627D0 (en) * | 1992-04-08 | 1992-05-27 | Northern Telecom Ltd | Manufacture of optical grating structures |
US5836075A (en) * | 1996-12-31 | 1998-11-17 | Westinghouse Electric Corporation | Process for forming combustion turbine components by transient liquid phase bonding |
FR2870041B1 (en) * | 2004-05-06 | 2006-11-03 | Nanoraptor Sa | METHOD FOR MANUFACTURING COMPONENT HAVING NANOMETER RELIEF AND / OR THICKNESS VARIATIONS, COMPONENT AND DERIVATIVES THEREOF, AND APPLICATIONS THEREOF |
PL439368A1 (en) * | 2021-10-30 | 2023-05-02 | Instytut Wysokich Ciśnień Polskiej Akademii Nauk Unipress | Method for generating an area with a regularly varying refractive index in a selected layer of a layered semiconductor structure |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1561784A (en) * | 1976-11-23 | 1980-03-05 | Atomic Energy Authority Uk | Optical components |
-
1980
- 1980-07-03 FR FR8014839A patent/FR2486251A1/en active Granted
-
1981
- 1981-07-01 GB GB8120392A patent/GB2079536B/en not_active Expired
- 1981-07-01 DE DE19813125998 patent/DE3125998A1/en not_active Withdrawn
- 1981-07-02 CA CA000380998A patent/CA1155797A/en not_active Expired
- 1981-07-03 JP JP10432981A patent/JPS5745508A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60123803A (en) * | 1983-12-09 | 1985-07-02 | Pioneer Electronic Corp | Manufacture of micro fresnel lens |
Also Published As
Publication number | Publication date |
---|---|
GB2079536A (en) | 1982-01-20 |
FR2486251A1 (en) | 1982-01-08 |
DE3125998A1 (en) | 1982-02-04 |
GB2079536B (en) | 1984-07-11 |
CA1155797A (en) | 1983-10-25 |
FR2486251B1 (en) | 1983-12-16 |
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