FR2482780A1 - Dispositif a profiler un faisceau electronique - Google Patents
Dispositif a profiler un faisceau electronique Download PDFInfo
- Publication number
- FR2482780A1 FR2482780A1 FR8109840A FR8109840A FR2482780A1 FR 2482780 A1 FR2482780 A1 FR 2482780A1 FR 8109840 A FR8109840 A FR 8109840A FR 8109840 A FR8109840 A FR 8109840A FR 2482780 A1 FR2482780 A1 FR 2482780A1
- Authority
- FR
- France
- Prior art keywords
- opening
- electron beam
- deflection
- openings
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 26
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000009977 dual effect Effects 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 230000004075 alteration Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 229910000859 α-Fe Inorganic materials 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000001459 lithography Methods 0.000 description 3
- 235000012771 pancakes Nutrition 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000002255 enzymatic effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000003902 lesion Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15103080A | 1980-05-19 | 1980-05-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2482780A1 true FR2482780A1 (fr) | 1981-11-20 |
| FR2482780B1 FR2482780B1 (cg-RX-API-DMAC7.html) | 1985-01-04 |
Family
ID=22537042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8109840A Granted FR2482780A1 (fr) | 1980-05-19 | 1981-05-18 | Dispositif a profiler un faisceau electronique |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2482780A1 (cg-RX-API-DMAC7.html) |
| GB (1) | GB2076589B (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE58907191D1 (de) * | 1989-02-09 | 1994-04-14 | Balzers Hochvakuum | Verfahren zum Zentrieren eines Elektronenstrahles. |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1281982A (fr) * | 1960-11-23 | 1962-01-19 | Csf | Modulateur à déflexion pour tubes à rayons cathodiques |
| FR2007186A1 (cg-RX-API-DMAC7.html) * | 1968-04-29 | 1970-01-02 | Stromberg Datagraphix In | |
| FR2015886A1 (cg-RX-API-DMAC7.html) * | 1968-08-19 | 1970-04-30 | Stromberg Datagraphix Inc | |
| FR1596430A (cg-RX-API-DMAC7.html) * | 1967-12-29 | 1970-06-15 | ||
| FR2329069A1 (fr) * | 1975-10-23 | 1977-05-20 | Rikagaku Kenkyusho | Procede de projection d'un faisceau de particules chargees |
-
1981
- 1981-05-12 GB GB8114536A patent/GB2076589B/en not_active Expired
- 1981-05-18 FR FR8109840A patent/FR2482780A1/fr active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1281982A (fr) * | 1960-11-23 | 1962-01-19 | Csf | Modulateur à déflexion pour tubes à rayons cathodiques |
| FR1596430A (cg-RX-API-DMAC7.html) * | 1967-12-29 | 1970-06-15 | ||
| FR2007186A1 (cg-RX-API-DMAC7.html) * | 1968-04-29 | 1970-01-02 | Stromberg Datagraphix In | |
| FR2015886A1 (cg-RX-API-DMAC7.html) * | 1968-08-19 | 1970-04-30 | Stromberg Datagraphix Inc | |
| FR2329069A1 (fr) * | 1975-10-23 | 1977-05-20 | Rikagaku Kenkyusho | Procede de projection d'un faisceau de particules chargees |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2076589A (en) | 1981-12-02 |
| GB2076589B (en) | 1985-03-06 |
| FR2482780B1 (cg-RX-API-DMAC7.html) | 1985-01-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |