FR2468875A1 - Capteur de toucher piezoelectrique a resonance - Google Patents

Capteur de toucher piezoelectrique a resonance Download PDF

Info

Publication number
FR2468875A1
FR2468875A1 FR8023047A FR8023047A FR2468875A1 FR 2468875 A1 FR2468875 A1 FR 2468875A1 FR 8023047 A FR8023047 A FR 8023047A FR 8023047 A FR8023047 A FR 8023047A FR 2468875 A1 FR2468875 A1 FR 2468875A1
Authority
FR
France
Prior art keywords
casing
rods
piezoelectric
keys
touch sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8023047A
Other languages
English (en)
French (fr)
Other versions
FR2468875B1 (
Inventor
Ramutis Juozo Bansevichus
Vladas-Algis Adolfo Gapshis
Albinas Juozo Kasparaitis
Viktor Vladimirovich Perfilov
Alvidas Juozo Ragauskas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VILNJUSSKY EX
Original Assignee
VILNJUSSKY EX
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VILNJUSSKY EX filed Critical VILNJUSSKY EX
Publication of FR2468875A1 publication Critical patent/FR2468875A1/fr
Application granted granted Critical
Publication of FR2468875B1 publication Critical patent/FR2468875B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G01B5/016—Constructional details of contacts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Transducers For Ultrasonic Waves (AREA)
FR8023047A 1979-11-05 1980-10-28 Capteur de toucher piezoelectrique a resonance Granted FR2468875A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU792830457A SU1095065A2 (ru) 1979-11-05 1979-11-05 Измерительна головка

Publications (2)

Publication Number Publication Date
FR2468875A1 true FR2468875A1 (fr) 1981-05-08
FR2468875B1 FR2468875B1 ( ) 1983-07-08

Family

ID=20855272

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8023047A Granted FR2468875A1 (fr) 1979-11-05 1980-10-28 Capteur de toucher piezoelectrique a resonance

Country Status (8)

Country Link
US (1) US4397188A ( )
JP (1) JPH0243121B2 ( )
DE (1) DE3050013T1 ( )
FR (1) FR2468875A1 ( )
IT (1) IT1133941B ( )
SE (1) SE425437B ( )
SU (1) SU1095065A2 ( )
WO (1) WO1981001334A1 ( )

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3309122A1 (de) * 1983-03-15 1984-09-20 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Tastkopf fuer messeinrichtungen
EP0351713A2 (de) * 1988-07-20 1990-01-24 Firma Carl Zeiss Verfahren und Einrichtung für den Betrieb eines Tastkopfes vom schaltenden Typ
WO1994015171A1 (de) * 1992-12-21 1994-07-07 Carl Zeiss Jena Gmbh Tastelement fur koordinatenmesssysteme
WO1995008093A1 (de) * 1993-09-13 1995-03-23 Carl-Zeiss-Stiftung Handelnd Als Carl Zeiss Koordinatenmessgerät mit einem taster in form eines festkörperschwingers

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170709A (ja) * 1984-02-16 1985-09-04 Toshiba Corp 形状測定装置
GB8407847D0 (en) * 1984-03-27 1984-05-02 Emi Ltd Sensing apparatus
GB2163570B (en) * 1984-08-24 1988-05-25 Hanger & Co Ltd J E Artificial hand
US4562392A (en) * 1984-08-29 1985-12-31 General Electric Company Stylus type touch probe system
CA1246121A (en) * 1984-11-15 1988-12-06 Westinghouse Electric Corporation Robotic end effector
US4657470A (en) * 1984-11-15 1987-04-14 Westinghouse Electric Corp. Robotic end effector
DE3522581A1 (de) * 1985-06-24 1987-01-02 Eke Robotersysteme Gmbh Verfahren und vorrichtung zum betreiben eines industrieroboters mit sensorkorrektur
JPH04140601A (ja) * 1990-09-29 1992-05-14 Nikon Corp タッチブローブ
US5222034A (en) * 1990-10-10 1993-06-22 Shelton Russell S Measuring method and apparatus
DE4326551C2 (de) * 1993-08-07 1997-04-17 Heidenhain Gmbh Dr Johannes Kalibrier-Verfahren zum Ermitteln und Kompensieren unterschiedlicher Antastkraft-Verhältnisse bei Mehrkoordinaten-Tastsystemen
GB9401692D0 (en) * 1994-01-28 1994-03-23 Renishaw Plc Performing measurement or calibration on positioning machines
DE19547977A1 (de) * 1995-12-21 1997-06-26 Zeiss Carl Fa Tastsystem für Koordinatenmeßgeräte
JP3336196B2 (ja) * 1996-06-25 2002-10-21 株式会社ミツトヨ 振幅抽出装置
DE19708257A1 (de) * 1997-02-28 1998-09-03 Kriwan Ind Elektronik Gmbh Vibrationssensor
JP3197860B2 (ja) * 1997-12-24 2001-08-13 株式会社ミツトヨ タッチ信号プローブ
GB2336433B (en) * 1998-04-14 2002-02-06 Mitutoyo Corp Touch signal probe
JP3130289B2 (ja) * 1998-08-04 2001-01-31 株式会社ミツトヨ タッチ信号プローブ
JP2000121508A (ja) 1998-10-15 2000-04-28 Tlv Co Ltd 電源を内蔵するモニタリング・システム
US6708420B1 (en) * 1999-01-06 2004-03-23 Patrick M. Flanagan Piezoelectric touch probe
JP2000199710A (ja) * 1999-01-06 2000-07-18 Mitsutoyo Corp タッチ信号プロ―ブの接触部位検出構造
JP3819250B2 (ja) * 2000-05-15 2006-09-06 株式会社ミツトヨ 加振型接触検出センサ
US6442857B1 (en) * 2000-11-10 2002-09-03 Toto Ltd. Portable surface inspector
JP3500125B2 (ja) * 2001-02-14 2004-02-23 株式会社ミツトヨ 弾性体の振動検出システム
ITBO20020098A1 (it) * 2002-02-28 2003-08-28 Marposs Spa Sensore acustico
GB0228368D0 (en) * 2002-12-05 2003-01-08 Renishaw Plc Probe for high speed scanning
ES2287730T3 (es) * 2003-06-02 2007-12-16 Novator Ab Procedimiento y aparato para medir la profundidad de agujeros en piezas de trabajo de material compuesto maquinadas por una herramienta de corte orbital.
EP1574830A1 (en) * 2004-03-08 2005-09-14 BALANCE SYSTEMS S.p.A. Precision sensor assembly for rotating members in a machine tool
ATE355935T1 (de) * 2004-07-20 2007-03-15 Balance Systems Spa Gerät zur detektion von werkzeugmaschineschwingung
GB0609022D0 (en) * 2006-05-08 2006-06-14 Renishaw Plc Contact sensing probe
KR101714535B1 (ko) * 2008-12-22 2017-03-09 삼성전자주식회사 탈이온화 장치 및 그 제어방법
CN101502947B (zh) * 2009-03-02 2011-02-09 南京大学 一种声发射传感器
DE102012003223A1 (de) * 2012-02-20 2013-08-22 Carl Zeiss 3D Automation Gmbh Kugel-Schaft-Verbindung
DE102012018417B4 (de) * 2012-09-12 2015-04-23 Hans-Holger Anger Tasteinrichtung und Messeinrichtung mit einer derartigen Tasteinrichtung
JP6613162B2 (ja) * 2016-02-10 2019-11-27 株式会社ミツトヨ 三次元座標測定機用プローブヘッド及び接触検出方法
DE102018103420A1 (de) * 2018-02-15 2019-08-22 Jenoptik Industrial Metrology Germany Gmbh Messgerät zur Oberflächen- oder Konturmessung
DE102020204942B4 (de) 2020-04-20 2024-06-27 Carl Zeiss Industrielle Messtechnik Gmbh Messsensor-Trägeranordnung mit Bewegungsaktor für ein Koordinatenmessgerät
CN112736187B (zh) * 2020-12-30 2024-02-02 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于自激式压电元件的排气装置及方法
CN112834570B (zh) * 2020-12-30 2023-09-22 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于自激式压电元件的气液两相检测装置及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2005022A (en) * 1977-09-27 1979-04-11 Meseltron Sa Contact sensing head
FR2406835A1 (fr) * 1977-10-22 1979-05-18 Renishaw Electrical Ltd Sonde de detection de contact
FR2408813A1 (fr) * 1977-11-10 1979-06-08 Sagem Perfectionnements aux procedes et dispositifs de palpage a contact, notamment pour machines a mesurer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1445977A (en) * 1972-09-21 1976-08-11 Rolls Royce Probes
DE2344462A1 (de) * 1973-07-12 1975-01-30 Bayer Ag Spritzpistole fuer veterinaere zwecke
SU611148A1 (ru) * 1975-12-15 1978-06-15 Всесоюзный Проектно-Конструкторский Технологический Институт Атомного Машиностроения И Котлостроения Устройство дл ввода в изделие импульсных ультразвуковых колебаний
DE2712181C3 (de) * 1977-03-19 1981-01-22 Fa. Carl Zeiss, 7920 Heidenheim Tastsystem
SU679868A1 (ru) * 1977-05-23 1979-08-15 Казахский политехнический институт им. В.И.Ленина Устройство дл ультразвукового контрол бетонных конструкций
US4294121A (en) * 1978-06-06 1981-10-13 Inoue-Japax Research Incorporated Position measuring system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2005022A (en) * 1977-09-27 1979-04-11 Meseltron Sa Contact sensing head
FR2406835A1 (fr) * 1977-10-22 1979-05-18 Renishaw Electrical Ltd Sonde de detection de contact
FR2408813A1 (fr) * 1977-11-10 1979-06-08 Sagem Perfectionnements aux procedes et dispositifs de palpage a contact, notamment pour machines a mesurer

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3309122A1 (de) * 1983-03-15 1984-09-20 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Tastkopf fuer messeinrichtungen
EP0351713A2 (de) * 1988-07-20 1990-01-24 Firma Carl Zeiss Verfahren und Einrichtung für den Betrieb eines Tastkopfes vom schaltenden Typ
EP0351713A3 (en) * 1988-07-20 1990-04-11 Firma Carl Zeiss Method and arrangement for the operation of a feeler head of the switching type
WO1994015171A1 (de) * 1992-12-21 1994-07-07 Carl Zeiss Jena Gmbh Tastelement fur koordinatenmesssysteme
WO1995008093A1 (de) * 1993-09-13 1995-03-23 Carl-Zeiss-Stiftung Handelnd Als Carl Zeiss Koordinatenmessgerät mit einem taster in form eines festkörperschwingers
US5625957A (en) * 1993-09-13 1997-05-06 Carl-Zeiss-Stiftung Coordinate measuring apparatus having a probe in the form of a solid-state oscillator
EP0872706A2 (de) * 1993-09-13 1998-10-21 Carl Zeiss Koordinatenmessgerät mit einem Taster in Form eines Festkörperschwingers
EP0872706A3 (de) * 1993-09-13 2000-10-04 Carl Zeiss Koordinatenmessgerät mit einem Taster in Form eines Festkörperschwingers

Also Published As

Publication number Publication date
SE425437B (sv) 1982-09-27
US4397188A (en) 1983-08-09
DE3050013T1 (de) 1982-03-18
IT8025397A0 (it) 1980-10-16
DE3050013C2 ( ) 1992-07-02
IT1133941B (it) 1986-07-24
WO1981001334A1 (en) 1981-05-14
SE8103613L (sv) 1981-06-09
JPH0243121B2 ( ) 1990-09-27
SU1095065A2 (ru) 1984-05-30
JPS56501462A ( ) 1981-10-08
FR2468875B1 ( ) 1983-07-08

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