FR2465009A1 - Procede pour vaporiser des alliages fondus de metaux ayant des tensions de vapeur differentes - Google Patents

Procede pour vaporiser des alliages fondus de metaux ayant des tensions de vapeur differentes Download PDF

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Publication number
FR2465009A1
FR2465009A1 FR7923147A FR7923147A FR2465009A1 FR 2465009 A1 FR2465009 A1 FR 2465009A1 FR 7923147 A FR7923147 A FR 7923147A FR 7923147 A FR7923147 A FR 7923147A FR 2465009 A1 FR2465009 A1 FR 2465009A1
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FR
France
Prior art keywords
bath
fields
esp
impact
process according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7923147A
Other languages
English (en)
French (fr)
Other versions
FR2465009B1 (Direct
Inventor
Hans Aichert
Walter Dietrich
Alfred Hauff
Peter Sommerkamp
Herbert Stephan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to FR7923147A priority Critical patent/FR2465009A1/fr
Publication of FR2465009A1 publication Critical patent/FR2465009A1/fr
Application granted granted Critical
Publication of FR2465009B1 publication Critical patent/FR2465009B1/fr
Granted legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7923147A 1979-09-17 1979-09-17 Procede pour vaporiser des alliages fondus de metaux ayant des tensions de vapeur differentes Granted FR2465009A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7923147A FR2465009A1 (fr) 1979-09-17 1979-09-17 Procede pour vaporiser des alliages fondus de metaux ayant des tensions de vapeur differentes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7923147A FR2465009A1 (fr) 1979-09-17 1979-09-17 Procede pour vaporiser des alliages fondus de metaux ayant des tensions de vapeur differentes

Publications (2)

Publication Number Publication Date
FR2465009A1 true FR2465009A1 (fr) 1981-03-20
FR2465009B1 FR2465009B1 (Direct) 1984-12-14

Family

ID=9229712

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7923147A Granted FR2465009A1 (fr) 1979-09-17 1979-09-17 Procede pour vaporiser des alliages fondus de metaux ayant des tensions de vapeur differentes

Country Status (1)

Country Link
FR (1) FR2465009A1 (Direct)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1488358A (fr) * 1966-03-15 1967-07-13 Lokomotivbau Elektrotech Procédé de métallisation sous vide de grandes surfaces et dispositif pour sa mise en oeuvre
DE1621244A1 (de) * 1967-02-07 1971-04-29 Fernseh Gmbh Aufdampfverfahren zur Erzeungung duenner Schichten oder Folien
GB1456633A (en) * 1972-09-15 1976-11-24 Secr Defence Alloy production high strength stainless steel having a high resistance to corrosive and abrasive wear in corrosive environments particu

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1488358A (fr) * 1966-03-15 1967-07-13 Lokomotivbau Elektrotech Procédé de métallisation sous vide de grandes surfaces et dispositif pour sa mise en oeuvre
DE1621244A1 (de) * 1967-02-07 1971-04-29 Fernseh Gmbh Aufdampfverfahren zur Erzeungung duenner Schichten oder Folien
GB1456633A (en) * 1972-09-15 1976-11-24 Secr Defence Alloy production high strength stainless steel having a high resistance to corrosive and abrasive wear in corrosive environments particu

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF SCIENTIFIC INSTRUMENTS (JOURNAL OF PHYSICS E), serie 2, vol. 2, no. 2, février 1969 *

Also Published As

Publication number Publication date
FR2465009B1 (Direct) 1984-12-14

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