FR2463504A1 - Source d'ions pour analyseur de masses - Google Patents

Source d'ions pour analyseur de masses Download PDF

Info

Publication number
FR2463504A1
FR2463504A1 FR8012134A FR8012134A FR2463504A1 FR 2463504 A1 FR2463504 A1 FR 2463504A1 FR 8012134 A FR8012134 A FR 8012134A FR 8012134 A FR8012134 A FR 8012134A FR 2463504 A1 FR2463504 A1 FR 2463504A1
Authority
FR
France
Prior art keywords
sample
ion source
energy filter
laser beam
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8012134A
Other languages
English (en)
French (fr)
Other versions
FR2463504B1 (enrdf_load_stackoverflow
Inventor
Eberhard Unsold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STRAHLEN UMWELTFORSCH GmbH
Original Assignee
STRAHLEN UMWELTFORSCH GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STRAHLEN UMWELTFORSCH GmbH filed Critical STRAHLEN UMWELTFORSCH GmbH
Publication of FR2463504A1 publication Critical patent/FR2463504A1/fr
Application granted granted Critical
Publication of FR2463504B1 publication Critical patent/FR2463504B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR8012134A 1979-05-31 1980-05-30 Source d'ions pour analyseur de masses Granted FR2463504A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792922128 DE2922128A1 (de) 1979-05-31 1979-05-31 Ionenquelle fuer einen massenanalysator

Publications (2)

Publication Number Publication Date
FR2463504A1 true FR2463504A1 (fr) 1981-02-20
FR2463504B1 FR2463504B1 (enrdf_load_stackoverflow) 1984-12-28

Family

ID=6072129

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8012134A Granted FR2463504A1 (fr) 1979-05-31 1980-05-30 Source d'ions pour analyseur de masses

Country Status (3)

Country Link
CH (1) CH647893A5 (enrdf_load_stackoverflow)
DE (1) DE2922128A1 (enrdf_load_stackoverflow)
FR (1) FR2463504A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4829178A (en) * 1987-03-30 1989-05-09 Vg Instruments Group Limited Apparatus for surface analysis

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3208618A1 (de) * 1982-03-10 1983-09-22 Leybold-Heraeus GmbH, 5000 Köln Lasermikrosonde fuer festkoerperproben, bei der eine beobachtungsoptik, eine laserlichtoptk und iene ionenoptik auf derselben seite einer probenhalterung angeordnet sind
JPS6093336A (ja) * 1983-10-26 1985-05-25 Mitsubishi Electric Corp レ−ザ微量分析装置
JP4104132B2 (ja) 2003-04-23 2008-06-18 独立行政法人科学技術振興機構 高速粒子発生装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7301496A (enrdf_load_stackoverflow) * 1973-02-02 1974-08-06
DE2347946A1 (de) * 1973-09-24 1975-04-10 Max Planck Gesellschaft Quadrupolfeld-massenanalysator hoher eingangsapertur
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4829178A (en) * 1987-03-30 1989-05-09 Vg Instruments Group Limited Apparatus for surface analysis

Also Published As

Publication number Publication date
DE2922128A1 (de) 1980-12-11
CH647893A5 (en) 1985-02-15
DE2922128C2 (enrdf_load_stackoverflow) 1989-05-18
FR2463504B1 (enrdf_load_stackoverflow) 1984-12-28

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