FR2449875A1 - Appareil detecteur de pression semi-conducteur a compensateur thermique au zero absolu - Google Patents

Appareil detecteur de pression semi-conducteur a compensateur thermique au zero absolu

Info

Publication number
FR2449875A1
FR2449875A1 FR8003935A FR8003935A FR2449875A1 FR 2449875 A1 FR2449875 A1 FR 2449875A1 FR 8003935 A FR8003935 A FR 8003935A FR 8003935 A FR8003935 A FR 8003935A FR 2449875 A1 FR2449875 A1 FR 2449875A1
Authority
FR
France
Prior art keywords
bridge
amplifier
pressure sensor
absolute zero
feedback amplifiers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8003935A
Other languages
English (en)
French (fr)
Other versions
FR2449875B1 (en, 2012
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2449875A1 publication Critical patent/FR2449875A1/fr
Application granted granted Critical
Publication of FR2449875B1 publication Critical patent/FR2449875B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
FR8003935A 1979-02-26 1980-02-22 Appareil detecteur de pression semi-conducteur a compensateur thermique au zero absolu Granted FR2449875A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2084779A JPS55113904A (en) 1979-02-26 1979-02-26 Method of zero point temperature compensation for strain-electric signal transducer

Publications (2)

Publication Number Publication Date
FR2449875A1 true FR2449875A1 (fr) 1980-09-19
FR2449875B1 FR2449875B1 (en, 2012) 1982-10-29

Family

ID=12038467

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8003935A Granted FR2449875A1 (fr) 1979-02-26 1980-02-22 Appareil detecteur de pression semi-conducteur a compensateur thermique au zero absolu

Country Status (6)

Country Link
US (1) US4337665A (en, 2012)
JP (1) JPS55113904A (en, 2012)
CA (1) CA1135529A (en, 2012)
DE (1) DE3007142C2 (en, 2012)
FR (1) FR2449875A1 (en, 2012)
GB (1) GB2043915B (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0071962A1 (en) * 1981-08-10 1983-02-16 The Foxboro Company Pressure transmitter employing non-linear temperature compensation
FR2549164A1 (fr) * 1983-07-12 1985-01-18 Edison Int Inc Systeme transducteur electropneumatique
FR2602335A1 (fr) * 1986-08-01 1988-02-05 Hitachi Ltd Detecteur de pression a semiconducteurs

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4345477A (en) * 1980-12-03 1982-08-24 Honeywell Inc. Semiconduction stress sensing apparatus
US4392382A (en) * 1981-03-09 1983-07-12 Motorola Inc. Linearized electronic capacitive pressure transducer
JPS58140604A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd 温度補償回路付き集積化センサ
US4444056A (en) * 1982-05-05 1984-04-24 Itt Corporation Temperature compensated circuit
JPS59184819A (ja) * 1983-04-06 1984-10-20 Hitachi Ltd 半導体圧力センサ
USRE33028E (en) * 1983-07-12 1989-08-22 Dresser Industries, Inc. Electropneumatic transducer system
CH662421A5 (de) * 1983-07-13 1987-09-30 Suisse Horlogerie Rech Lab Piezoelektrischer kontaminationsdetektor.
GB8407192D0 (en) * 1984-03-20 1984-04-26 Lucas Ind Plc Circuit
DE3511442C2 (de) * 1985-03-29 1987-03-19 Internationale Fluggeräte und Motoren GmbH, 6940 Weinheim Verfahren und Vorrichtung zur berührungslosen Messung statischer und dynamischer Drehmomente
DE3536020A1 (de) * 1985-10-09 1987-04-09 Erwin Halstrup Schaltung zur veraenderung oder linearisierung einer uebertragungskennlinie sowie danach durchgefuehrtes verfahren
US4798093A (en) * 1986-06-06 1989-01-17 Motorola, Inc. Apparatus for sensor compensation
DE3908795A1 (de) * 1989-03-17 1990-09-20 Bosch Gmbh Robert Verfahren und vorrichtung zur messung einer mechanischen verformung
JP3071202B2 (ja) * 1989-07-19 2000-07-31 富士電機株式会社 半導体圧力センサの増巾補償回路
DE3925177A1 (de) * 1989-07-27 1991-02-07 Siemens Ag Schaltungsanordnung zur temperaturstabilen verstaerkung einer differenzspannung
US5184500A (en) * 1990-03-20 1993-02-09 J And N Associates, Inc. Gas detector
US5241850A (en) * 1991-11-01 1993-09-07 Texas Instruments Incorporated Sensor with programmable temperature compensation
DE4308434A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter
DE4308433A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel
US5568815A (en) * 1994-11-21 1996-10-29 Becton Dickinson And Company Self-powered interface circuit for use with a transducer sensor
US5551301A (en) * 1995-06-19 1996-09-03 Cardiometrics, Inc. Piezoresistive pressure transducer circuitry accommodating transducer variability
US5668320A (en) * 1995-06-19 1997-09-16 Cardiometrics, Inc. Piezoresistive pressure transducer circuitry accommodating transducer variability
US10172730B2 (en) * 1999-11-19 2019-01-08 Vactronix Scientific, Llc Stents with metallic covers and methods of making same
RU2196296C2 (ru) * 2000-01-28 2003-01-10 Центральный аэрогидродинамический институт им. проф. Н.Е.Жуковского Способ измерения относительных деформаций конструкций при подключении тензорезисторов к тензометрической системе
US7075520B2 (en) * 2001-12-12 2006-07-11 Zi Technology Corporation Ltd Key press disambiguation using a keypad of multidirectional keys
US20040153963A1 (en) * 2003-02-05 2004-08-05 Simpson Todd G. Information entry mechanism for small keypads
US20040153975A1 (en) * 2003-02-05 2004-08-05 Williams Roland E. Text entry mechanism for small keypads
US7132838B2 (en) * 2004-03-11 2006-11-07 Tao Of Systems Integration, Inc. Active sensor circuit with one or more T-network pairs
US7653503B2 (en) * 2006-04-20 2010-01-26 Tao Of Systems Integration, Inc. Temperature-compensating sensor system
US8878598B2 (en) 2010-12-28 2014-11-04 British Virgin Islands Central Digital Inc. Sensing module
TW201227753A (en) * 2010-12-28 2012-07-01 British Virgin Islands Central Digital Inc Sensor temperature compensation circuit and method thereof
US9157822B2 (en) * 2011-02-01 2015-10-13 Kulite Semiconductor Products, Inc. Electronic interface for LVDT-type pressure transducers using piezoresistive sensors
RU2545089C2 (ru) * 2013-07-12 2015-03-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Косвенный способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом отрицательной нелинейности температурной характеристики выходного сигнала датчика
JP6957367B2 (ja) * 2018-01-18 2021-11-02 株式会社東芝 半導体チップの検査装置、半導体チップの検査システム、インテリジェントパワーモジュール、半導体チップの検査方法及びプログラム
US12345578B2 (en) * 2022-05-18 2025-07-01 Microsoft Technology Licensing, Llc Temperature compensation for strain sensor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3568044A (en) * 1968-09-12 1971-03-02 Bell & Howell Co Linearizing circuit for high output transducers
US3654545A (en) * 1970-08-11 1972-04-04 Honeywell Inc Semiconductor strain gauge amplifier
GB1340635A (en) * 1971-04-30 1973-12-12 Gen Electric Direct current pressure ratio circuit
FR2250105A1 (en, 2012) * 1973-11-02 1975-05-30 Honeywell Inc
DE2841491A1 (de) * 1977-09-28 1979-04-05 Itt Ind Gmbh Deutsche Brueckenschaltung mit dehnmesstreifen
FR2414193A1 (fr) * 1978-01-06 1979-08-03 Hitachi Ltd Appareil transducteur a jauge de contrainte ayant un pont d'impedance ameliore

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3528022A (en) * 1965-10-14 1970-09-08 Gen Electric Temperature compensating networks
GB1414144A (en) * 1972-03-20 1975-11-19 Welwyn Electric Ltd Strain measuring device
US4202218A (en) * 1977-09-28 1980-05-13 International Telephone And Telegraph Corporation Bridge circuit

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3568044A (en) * 1968-09-12 1971-03-02 Bell & Howell Co Linearizing circuit for high output transducers
US3654545A (en) * 1970-08-11 1972-04-04 Honeywell Inc Semiconductor strain gauge amplifier
FR2104177A5 (en, 2012) * 1970-08-11 1972-04-14 Honeywell Inc
GB1340635A (en) * 1971-04-30 1973-12-12 Gen Electric Direct current pressure ratio circuit
FR2250105A1 (en, 2012) * 1973-11-02 1975-05-30 Honeywell Inc
DE2841491A1 (de) * 1977-09-28 1979-04-05 Itt Ind Gmbh Deutsche Brueckenschaltung mit dehnmesstreifen
FR2414193A1 (fr) * 1978-01-06 1979-08-03 Hitachi Ltd Appareil transducteur a jauge de contrainte ayant un pont d'impedance ameliore

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0071962A1 (en) * 1981-08-10 1983-02-16 The Foxboro Company Pressure transmitter employing non-linear temperature compensation
FR2549164A1 (fr) * 1983-07-12 1985-01-18 Edison Int Inc Systeme transducteur electropneumatique
FR2602335A1 (fr) * 1986-08-01 1988-02-05 Hitachi Ltd Detecteur de pression a semiconducteurs

Also Published As

Publication number Publication date
JPS55113904A (en) 1980-09-02
DE3007142C2 (de) 1987-03-26
GB2043915B (en) 1983-04-20
JPS6144242B2 (en, 2012) 1986-10-02
GB2043915A (en) 1980-10-08
FR2449875B1 (en, 2012) 1982-10-29
DE3007142A1 (de) 1980-08-28
US4337665A (en) 1982-07-06
CA1135529A (en) 1982-11-16

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