CA1135529A - Semiconductor pressure detector apparatus with zero-point temperature compensation - Google Patents

Semiconductor pressure detector apparatus with zero-point temperature compensation

Info

Publication number
CA1135529A
CA1135529A CA000346336A CA346336A CA1135529A CA 1135529 A CA1135529 A CA 1135529A CA 000346336 A CA000346336 A CA 000346336A CA 346336 A CA346336 A CA 346336A CA 1135529 A CA1135529 A CA 1135529A
Authority
CA
Canada
Prior art keywords
arms
bridge
potential
midpoints
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000346336A
Other languages
English (en)
French (fr)
Inventor
Hideo Sato
Kanji Kawakami
Motohisa Nishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of CA1135529A publication Critical patent/CA1135529A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CA000346336A 1979-02-26 1980-02-25 Semiconductor pressure detector apparatus with zero-point temperature compensation Expired CA1135529A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2084779A JPS55113904A (en) 1979-02-26 1979-02-26 Method of zero point temperature compensation for strain-electric signal transducer
JP20847/1979 1979-02-26

Publications (1)

Publication Number Publication Date
CA1135529A true CA1135529A (en) 1982-11-16

Family

ID=12038467

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000346336A Expired CA1135529A (en) 1979-02-26 1980-02-25 Semiconductor pressure detector apparatus with zero-point temperature compensation

Country Status (6)

Country Link
US (1) US4337665A (en, 2012)
JP (1) JPS55113904A (en, 2012)
CA (1) CA1135529A (en, 2012)
DE (1) DE3007142C2 (en, 2012)
FR (1) FR2449875A1 (en, 2012)
GB (1) GB2043915B (en, 2012)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4345477A (en) * 1980-12-03 1982-08-24 Honeywell Inc. Semiconduction stress sensing apparatus
US4392382A (en) * 1981-03-09 1983-07-12 Motorola Inc. Linearized electronic capacitive pressure transducer
US4414853A (en) * 1981-08-10 1983-11-15 The Foxboro Company Pressure transmitter employing non-linear temperature compensation
JPS58140604A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd 温度補償回路付き集積化センサ
US4444056A (en) * 1982-05-05 1984-04-24 Itt Corporation Temperature compensated circuit
JPS59184819A (ja) * 1983-04-06 1984-10-20 Hitachi Ltd 半導体圧力センサ
US4527583A (en) * 1983-07-12 1985-07-09 Dresser Industries, Inc. Electropneumatic transducer system
USRE33028E (en) * 1983-07-12 1989-08-22 Dresser Industries, Inc. Electropneumatic transducer system
CH662421A5 (de) * 1983-07-13 1987-09-30 Suisse Horlogerie Rech Lab Piezoelektrischer kontaminationsdetektor.
GB8407192D0 (en) * 1984-03-20 1984-04-26 Lucas Ind Plc Circuit
DE3511442C2 (de) * 1985-03-29 1987-03-19 Internationale Fluggeräte und Motoren GmbH, 6940 Weinheim Verfahren und Vorrichtung zur berührungslosen Messung statischer und dynamischer Drehmomente
DE3536020A1 (de) * 1985-10-09 1987-04-09 Erwin Halstrup Schaltung zur veraenderung oder linearisierung einer uebertragungskennlinie sowie danach durchgefuehrtes verfahren
US4798093A (en) * 1986-06-06 1989-01-17 Motorola, Inc. Apparatus for sensor compensation
JPH0691265B2 (ja) * 1986-08-01 1994-11-14 株式会社日立製作所 半導体圧力センサ
DE3908795A1 (de) * 1989-03-17 1990-09-20 Bosch Gmbh Robert Verfahren und vorrichtung zur messung einer mechanischen verformung
JP3071202B2 (ja) * 1989-07-19 2000-07-31 富士電機株式会社 半導体圧力センサの増巾補償回路
DE3925177A1 (de) * 1989-07-27 1991-02-07 Siemens Ag Schaltungsanordnung zur temperaturstabilen verstaerkung einer differenzspannung
US5184500A (en) * 1990-03-20 1993-02-09 J And N Associates, Inc. Gas detector
US5241850A (en) * 1991-11-01 1993-09-07 Texas Instruments Incorporated Sensor with programmable temperature compensation
DE4308434A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter
DE4308433A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel
US5568815A (en) * 1994-11-21 1996-10-29 Becton Dickinson And Company Self-powered interface circuit for use with a transducer sensor
US5551301A (en) * 1995-06-19 1996-09-03 Cardiometrics, Inc. Piezoresistive pressure transducer circuitry accommodating transducer variability
US5668320A (en) * 1995-06-19 1997-09-16 Cardiometrics, Inc. Piezoresistive pressure transducer circuitry accommodating transducer variability
US10172730B2 (en) * 1999-11-19 2019-01-08 Vactronix Scientific, Llc Stents with metallic covers and methods of making same
RU2196296C2 (ru) * 2000-01-28 2003-01-10 Центральный аэрогидродинамический институт им. проф. Н.Е.Жуковского Способ измерения относительных деформаций конструкций при подключении тензорезисторов к тензометрической системе
US7075520B2 (en) * 2001-12-12 2006-07-11 Zi Technology Corporation Ltd Key press disambiguation using a keypad of multidirectional keys
US20040153963A1 (en) * 2003-02-05 2004-08-05 Simpson Todd G. Information entry mechanism for small keypads
US20040153975A1 (en) * 2003-02-05 2004-08-05 Williams Roland E. Text entry mechanism for small keypads
US7132838B2 (en) * 2004-03-11 2006-11-07 Tao Of Systems Integration, Inc. Active sensor circuit with one or more T-network pairs
US7653503B2 (en) * 2006-04-20 2010-01-26 Tao Of Systems Integration, Inc. Temperature-compensating sensor system
US8878598B2 (en) 2010-12-28 2014-11-04 British Virgin Islands Central Digital Inc. Sensing module
TW201227753A (en) * 2010-12-28 2012-07-01 British Virgin Islands Central Digital Inc Sensor temperature compensation circuit and method thereof
US9157822B2 (en) * 2011-02-01 2015-10-13 Kulite Semiconductor Products, Inc. Electronic interface for LVDT-type pressure transducers using piezoresistive sensors
RU2545089C2 (ru) * 2013-07-12 2015-03-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Косвенный способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом отрицательной нелинейности температурной характеристики выходного сигнала датчика
JP6957367B2 (ja) * 2018-01-18 2021-11-02 株式会社東芝 半導体チップの検査装置、半導体チップの検査システム、インテリジェントパワーモジュール、半導体チップの検査方法及びプログラム
US12345578B2 (en) * 2022-05-18 2025-07-01 Microsoft Technology Licensing, Llc Temperature compensation for strain sensor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3528022A (en) * 1965-10-14 1970-09-08 Gen Electric Temperature compensating networks
US3568044A (en) * 1968-09-12 1971-03-02 Bell & Howell Co Linearizing circuit for high output transducers
US3654545A (en) * 1970-08-11 1972-04-04 Honeywell Inc Semiconductor strain gauge amplifier
US3717038A (en) 1971-04-30 1973-02-20 Gen Electric Direct current pressure ratio circuit
GB1414144A (en) * 1972-03-20 1975-11-19 Welwyn Electric Ltd Strain measuring device
US3841150A (en) * 1973-11-02 1974-10-15 Honeywell Inc Strain gauge transducer signal conditioning circuitry
US4202218A (en) * 1977-09-28 1980-05-13 International Telephone And Telegraph Corporation Bridge circuit
GB2009947B (en) * 1977-09-28 1982-03-24 Itt Bridge circuit
US4233848A (en) * 1978-01-06 1980-11-18 Hitachi, Ltd. Strain gauge pressure transducer apparatus having an improved impedance bridge

Also Published As

Publication number Publication date
JPS55113904A (en) 1980-09-02
DE3007142C2 (de) 1987-03-26
FR2449875A1 (fr) 1980-09-19
GB2043915B (en) 1983-04-20
JPS6144242B2 (en, 2012) 1986-10-02
GB2043915A (en) 1980-10-08
FR2449875B1 (en, 2012) 1982-10-29
DE3007142A1 (de) 1980-08-28
US4337665A (en) 1982-07-06

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