FR2427310A1 - Procede de depot de materiau vitreux sous plasma a haute frequence - Google Patents

Procede de depot de materiau vitreux sous plasma a haute frequence

Info

Publication number
FR2427310A1
FR2427310A1 FR7913780A FR7913780A FR2427310A1 FR 2427310 A1 FR2427310 A1 FR 2427310A1 FR 7913780 A FR7913780 A FR 7913780A FR 7913780 A FR7913780 A FR 7913780A FR 2427310 A1 FR2427310 A1 FR 2427310A1
Authority
FR
France
Prior art keywords
high frequency
plasma
frequency plasma
deposit process
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7913780A
Other languages
English (en)
Other versions
FR2427310B1 (fr
Inventor
Henley Frank Sterling
Miles Patrick Drake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Standard Electric Corp
Original Assignee
International Standard Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Standard Electric Corp filed Critical International Standard Electric Corp
Publication of FR2427310A1 publication Critical patent/FR2427310A1/fr
Application granted granted Critical
Publication of FR2427310B1 publication Critical patent/FR2427310B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Procédé de dépôt de matériau vitreux. Le procédé selon la présente invention prévoit le dépôt de verre par réaction de vapeurs chimiques induites par haute fréquence qui fait appel à un plasma maintenu de façon inductive alimenté en gaz sous une pression comprise entre 0,1 et 50 Torr, la décharge du plasma étant telle que sa dimension la plus grande est sensiblement inférieure à la longueur d'onde en espace libre de la haute fréquence utilisée pour maintenir le plasma, la pression du plasma et la densité d'énergie étant telles que le dépôt est non poreux. Application au dépôt de matériau vitreux sur une surface solide, en particulier pour la fabrication de préformes pour fibres optiques.
FR7913780A 1978-05-30 1979-05-30 Procede de depot de materiau vitreux sous plasma a haute frequence Expired FR2427310B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB24187/78A GB1603949A (en) 1978-05-30 1978-05-30 Plasma deposit

Publications (2)

Publication Number Publication Date
FR2427310A1 true FR2427310A1 (fr) 1979-12-28
FR2427310B1 FR2427310B1 (fr) 1985-06-28

Family

ID=10207778

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7913780A Expired FR2427310B1 (fr) 1978-05-30 1979-05-30 Procede de depot de materiau vitreux sous plasma a haute frequence

Country Status (10)

Country Link
US (1) US4349373A (fr)
EP (1) EP0005963B1 (fr)
JP (1) JPS54156828A (fr)
AR (1) AR222334A1 (fr)
AU (1) AU526306B2 (fr)
BE (1) BE876629A (fr)
DE (1) DE2965131D1 (fr)
ES (1) ES481010A1 (fr)
FR (1) FR2427310B1 (fr)
GB (1) GB1603949A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2482081A1 (fr) * 1980-05-12 1981-11-13 Corning Glass Works Appareil pour la fabrication d'une preforme de guide d'ondes optique
EP0086378A1 (fr) * 1982-02-11 1983-08-24 International Standard Electric Corporation Procédé à plasma pour le revêtement intérieur de tubes en verre

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3010314C2 (de) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen
NL8102149A (nl) * 1981-05-01 1982-12-01 Philips Nv Werkwijze en inrichting voor de inwendige bedekking van een buis door reactieve afscheiding uit een gasmengsel onder invloed van een plasma.
DE3206177A1 (de) * 1982-02-20 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung einer vorform, aus der optische fasern ziehbar sind
DE3206175A1 (de) * 1982-02-20 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung einer vorform, aus der optische fasern ziehbar sind
IT1155119B (it) * 1982-03-05 1987-01-21 Cselt Centro Studi Lab Telecom Procedimento e dispositivo per la produzione di preforme per fibre ottiche
US4440556A (en) * 1982-06-23 1984-04-03 International Telephone And Telegraph Corporation Optical fiber drawing using plasma torch
NL8302127A (nl) * 1983-06-15 1985-01-02 Philips Nv Werkwijze en inrichting voor de vervaardiging van optische vezels.
DE3330910A1 (de) * 1983-08-27 1985-03-07 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zum herstellen eines reaktionsgefaesses fuer kristallzuchtzwecke
US4718929A (en) * 1983-10-21 1988-01-12 Corning Glass Works Vapor phase method for making metal halide glasses
US4557742A (en) * 1984-07-02 1985-12-10 Polaroid Corporation Polarized optical fiber and method of forming same
GB2162168B (en) * 1984-07-25 1988-06-29 Stc Plc Optical fibre manufacture
US4597787A (en) * 1984-11-13 1986-07-01 Ispra Fibroptics Industries Herzlia Ltd. Manufacture of optical fibre preforms
FR2584101B1 (fr) * 1985-06-26 1987-08-07 Comp Generale Electricite Dispositif pour fabriquer un composant optique a gradient d'indice de refraction
US5188648A (en) * 1985-07-20 1993-02-23 U.S. Philips Corp. Method of manufacturing optical fibres
JPH01183432A (ja) * 1988-01-18 1989-07-21 Sumitomo Electric Ind Ltd 石英ガラス管の加熱方法
DE3830089A1 (de) * 1988-09-03 1990-03-15 Schott Glaswerke Verfahren zur herstellung von planaren, mit dielektrischen schichtsystemen versehenen glassubstraten
DE3830364C1 (fr) * 1988-09-07 1990-01-18 Schott Glaswerke, 6500 Mainz, De
DE19959845B4 (de) * 1998-12-10 2012-11-29 Stefan Laure Plasmagenerator
US7142756B2 (en) * 2001-04-12 2006-11-28 Omniguide, Inc. High index-contrast fiber waveguides and applications
ATE254192T1 (de) * 2001-04-27 2003-11-15 Europ Economic Community Verfahren und vorrichtung zur sequentiellen plasmabehandlung
US20040141702A1 (en) * 2002-11-22 2004-07-22 Vladimir Fuflyigin Dielectric waveguide and method of making the same
US20050022561A1 (en) * 2003-08-01 2005-02-03 Guskov Michael I. Ring plasma jet method and apparatus for making an optical fiber preform
US7793612B2 (en) 2003-08-01 2010-09-14 Silica Tech, Llc Ring plasma jet method and apparatus for making an optical fiber preform
KR20060098740A (ko) * 2005-03-07 2006-09-19 삼성전자주식회사 플라즈마 장치와 그를 이용한 광섬유 모재 제작 장치
US8252387B2 (en) * 2007-12-10 2012-08-28 Ofs Fitel, Llc Method of fabricating optical fiber using an isothermal, low pressure plasma deposition technique
US9002162B2 (en) * 2013-03-15 2015-04-07 Ofs Fitel, Llc Large core multimode optical fibers
NL2011077C2 (en) * 2013-07-01 2015-01-05 Draka Comteq Bv A method for manufacturing a precursor for a primary preform for optical fibres by means of an internal plasma chemical vapour deposition (pcvd) process.
US11554978B2 (en) * 2013-11-27 2023-01-17 Corning Incorporated Method for reducing processing time for optical fiber preforms
US20160023939A1 (en) * 2014-07-24 2016-01-28 Ofs Fitel, Llc Isothermal plasma cvd system for reduced taper in optical fiber preforms
WO2016100255A1 (fr) 2014-12-16 2016-06-23 Corning Incorporated Procédé de fabrication d'une préforme de fibre optique et manche destiné à être utilisé dans la fabrication de préforme de fibre optique

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1104935A (en) * 1964-05-08 1968-03-06 Standard Telephones Cables Ltd Improvements in or relating to a method of forming a layer of an inorganic compound
FR2284572A1 (fr) * 1974-09-14 1976-04-09 Philips Nv Procede pour la realisation de tubes en verre a revetement interieur pour l'etirage de fibres optiques
FR2360522A2 (fr) * 1976-03-25 1978-03-03 Western Electric Co Procede de realisation d'une ligne optique de transmission
US4090055A (en) * 1977-02-10 1978-05-16 Northern Telecom Limited Apparatus for manufacturing an optical fibre with plasma activated deposition in a tube

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3655438A (en) * 1969-10-20 1972-04-11 Int Standard Electric Corp Method of forming silicon oxide coatings in an electric discharge
GB1427327A (en) * 1972-06-08 1976-03-10 Standard Telephones Cables Ltd Glass optical fibres
US4145456A (en) * 1974-09-14 1979-03-20 Dieter Kuppers Method of producing internally coated glass tubes for the drawing of fibre optic light conductors
DE2642949C3 (de) * 1976-09-24 1980-11-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern
US4125389A (en) * 1977-02-10 1978-11-14 Northern Telecom Limited Method for manufacturing an optical fibre with plasma activated deposition in a tube
US4262035A (en) * 1980-03-07 1981-04-14 Bell Telephone Laboratories, Incorporated Modified chemical vapor deposition of an optical fiber using an rf plasma

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1104935A (en) * 1964-05-08 1968-03-06 Standard Telephones Cables Ltd Improvements in or relating to a method of forming a layer of an inorganic compound
FR2284572A1 (fr) * 1974-09-14 1976-04-09 Philips Nv Procede pour la realisation de tubes en verre a revetement interieur pour l'etirage de fibres optiques
FR2360522A2 (fr) * 1976-03-25 1978-03-03 Western Electric Co Procede de realisation d'une ligne optique de transmission
US4090055A (en) * 1977-02-10 1978-05-16 Northern Telecom Limited Apparatus for manufacturing an optical fibre with plasma activated deposition in a tube

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2482081A1 (fr) * 1980-05-12 1981-11-13 Corning Glass Works Appareil pour la fabrication d'une preforme de guide d'ondes optique
EP0086378A1 (fr) * 1982-02-11 1983-08-24 International Standard Electric Corporation Procédé à plasma pour le revêtement intérieur de tubes en verre

Also Published As

Publication number Publication date
EP0005963A1 (fr) 1979-12-12
AR222334A1 (es) 1981-05-15
GB1603949A (en) 1981-12-02
DE2965131D1 (en) 1983-05-11
ES481010A1 (es) 1980-02-01
AU4732079A (en) 1979-12-06
AU526306B2 (en) 1983-01-06
FR2427310B1 (fr) 1985-06-28
BE876629A (fr) 1979-11-30
JPS54156828A (en) 1979-12-11
EP0005963B1 (fr) 1983-04-06
US4349373A (en) 1982-09-14

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