FR2402303A1 - Traitement de surface de stabilisation de corps semi-conducteurs - Google Patents

Traitement de surface de stabilisation de corps semi-conducteurs

Info

Publication number
FR2402303A1
FR2402303A1 FR7824993A FR7824993A FR2402303A1 FR 2402303 A1 FR2402303 A1 FR 2402303A1 FR 7824993 A FR7824993 A FR 7824993A FR 7824993 A FR7824993 A FR 7824993A FR 2402303 A1 FR2402303 A1 FR 2402303A1
Authority
FR
France
Prior art keywords
semiconductor
glass
stabilization
semiconductor bodies
surface treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7824993A
Other languages
English (en)
Other versions
FR2402303B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semikron GmbH and Co KG
Original Assignee
Semikron GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semikron GmbH and Co KG filed Critical Semikron GmbH and Co KG
Publication of FR2402303A1 publication Critical patent/FR2402303A1/fr
Application granted granted Critical
Publication of FR2402303B1 publication Critical patent/FR2402303B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157—Partial encapsulation or coating
    • H01L23/3178—Coating or filling in grooves made in the semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157—Partial encapsulation or coating
    • H01L23/3192—Multilayer coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02142—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides
    • H01L21/02145—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides the material containing aluminium, e.g. AlSiOx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
    • H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12044—OLED

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Formation Of Insulating Films (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Glass Compositions (AREA)

Abstract

Traitement de passivation de corps semi-conducteurs par application d'un revêtement de verre. Sur une couche mince 3 d'oxyde du matériau semi-conducteur formée directement sur la surface semi-conductrice, on applique successivement une couche de base 40 d'un verre à coefficient de dilatation thermique correspondant à celui du matériau semi-conducteur, puis une couche terminale 43 d'un verre de coefficient plus bas fondu dans une gamme de températures immédiatement supérieure à celle qui est nécessaire pour la couche de base 40. Utilisable pour éléments semi-conducteurs à températures de service atteignant 200 degrés C et d'épaisseur permettant une charge de tension élevée (2500 V).
FR7824993A 1977-09-03 1978-08-30 Traitement de surface de stabilisation de corps semi-conducteurs Granted FR2402303A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2739762A DE2739762C2 (de) 1977-09-03 1977-09-03 Verfahren zur Passivierung von Halbleiterkörpern

Publications (2)

Publication Number Publication Date
FR2402303A1 true FR2402303A1 (fr) 1979-03-30
FR2402303B1 FR2402303B1 (fr) 1984-06-01

Family

ID=6018047

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7824993A Granted FR2402303A1 (fr) 1977-09-03 1978-08-30 Traitement de surface de stabilisation de corps semi-conducteurs

Country Status (8)

Country Link
US (1) US4202916A (fr)
JP (1) JPS5444476A (fr)
BR (1) BR7805571A (fr)
CH (1) CH631291A5 (fr)
DE (1) DE2739762C2 (fr)
FR (1) FR2402303A1 (fr)
GB (1) GB2003662B (fr)
IT (1) IT1098444B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2477771A1 (fr) * 1980-03-07 1981-09-11 Philips Nv Procede pour la realisation d'un dispositif semiconducteur a haute tension de blocage et dispositif semiconducteur ainsi realise

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IN154896B (fr) * 1980-07-10 1984-12-22 Westinghouse Electric Corp
JPS57120341A (en) * 1981-01-17 1982-07-27 Toshiba Corp Glass passivation semiconductor device
US4544576A (en) * 1981-07-27 1985-10-01 International Business Machines Corporation Deep dielectric isolation by fused glass
US4506435A (en) * 1981-07-27 1985-03-26 International Business Machines Corporation Method for forming recessed isolated regions
DE3247938A1 (de) * 1982-12-24 1984-07-05 SEMIKRON Gesellschaft für Gleichrichterbau u. Elektronik mbH, 8500 Nürnberg Halbleiterbauelement hoher sperrspannungsbelastbarkeit
US4515668A (en) * 1984-04-25 1985-05-07 Honeywell Inc. Method of forming a dielectric layer comprising a gettering material
FR2631488B1 (fr) * 1988-05-10 1990-07-27 Thomson Hybrides Microondes Circuit integre hyperfrequence de type planar, comportant au moins un composant mesa, et son procede de fabrication
US5176771A (en) * 1991-12-23 1993-01-05 Hughes Aircraft Company Multilayer ceramic tape substrate having cavities formed in the upper layer thereof and method of fabricating the same by printing and delamination
US5882986A (en) * 1998-03-30 1999-03-16 General Semiconductor, Inc. Semiconductor chips having a mesa structure provided by sawing
WO2003025982A1 (fr) * 2001-09-17 2003-03-27 Advion Biosciences, Inc. Formation de motifs uniformes par gravure ionique reactive profonde
DE102006013076A1 (de) * 2006-03-22 2007-09-27 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleiterbauelement mit Passivierungsschicht und zugehöriges Herstellungsverfahren
US20100025809A1 (en) 2008-07-30 2010-02-04 Trion Technology, Inc. Integrated Circuit and Method of Forming Sealed Trench Junction Termination
US8163624B2 (en) * 2008-07-30 2012-04-24 Bowman Ronald R Discrete semiconductor device and method of forming sealed trench junction termination

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1260574B (de) * 1966-03-30 1968-02-08 Telefunken Patent Verfahren zur Herstellung von Glasschichten oder anderen Isolierschichten auf Substratoberflaechen
FR1522201A (fr) * 1961-07-06 1968-04-26 Procédé de fabrication de dispositifs semi-conducteurs à jonction
US3546013A (en) * 1961-09-29 1970-12-08 Ibm Method of providing protective coverings for semiconductors
GB1250099A (fr) * 1969-04-14 1971-10-20
US3895127A (en) * 1974-04-19 1975-07-15 Rca Corp Method of selectively depositing glass on semiconductor devices
US3967310A (en) * 1968-10-09 1976-06-29 Hitachi, Ltd. Semiconductor device having controlled surface charges by passivation films formed thereon

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3212921A (en) * 1961-09-29 1965-10-19 Ibm Method of forming a glass film on an object and the product produced thereby
US3303399A (en) * 1964-01-30 1967-02-07 Ibm Glasses for encapsulating semiconductor devices and resultant devices
US3542572A (en) * 1968-06-24 1970-11-24 Corning Glass Works Germania-silica glasses
NL154622B (nl) * 1968-10-09 1977-09-15 Hitachi Ltd Halfgeleiderinrichting en werkwijze voor het vervaardigen daarvan.
US3632434A (en) * 1969-01-21 1972-01-04 Jerald L Hutson Process for glass passivating silicon semiconductor junctions
US3752701A (en) * 1970-07-27 1973-08-14 Gen Instrument Corp Glass for coating semiconductors, and semiconductor coated therewith
DE2548736C3 (de) * 1975-10-31 1978-05-18 Jenaer Glaswerk Schott & Gen., 6500 Mainz Composit-Passivierungsglas auf der Basis PbO-B2 Okskö-ab O3) m't einem thermischen Ausdehnungskoeffizienten (200-300 Grad C) zwischen 40 und 60 mal 10"7 / Grad C für Silicium-Halbleiterbauelemente mit Aufschmelztemperaturen von höchstens 600 Grad C
JPS5263160A (en) * 1975-11-20 1977-05-25 Toshitaka Yamagata Forming device for arc and annulus
FR2335951A1 (fr) * 1975-12-19 1977-07-15 Radiotechnique Compelec Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivation
JPS535971A (en) * 1976-07-06 1978-01-19 Mitsubishi Electric Corp Semiconductor device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1522201A (fr) * 1961-07-06 1968-04-26 Procédé de fabrication de dispositifs semi-conducteurs à jonction
US3546013A (en) * 1961-09-29 1970-12-08 Ibm Method of providing protective coverings for semiconductors
DE1260574B (de) * 1966-03-30 1968-02-08 Telefunken Patent Verfahren zur Herstellung von Glasschichten oder anderen Isolierschichten auf Substratoberflaechen
US3967310A (en) * 1968-10-09 1976-06-29 Hitachi, Ltd. Semiconductor device having controlled surface charges by passivation films formed thereon
GB1250099A (fr) * 1969-04-14 1971-10-20
US3895127A (en) * 1974-04-19 1975-07-15 Rca Corp Method of selectively depositing glass on semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2477771A1 (fr) * 1980-03-07 1981-09-11 Philips Nv Procede pour la realisation d'un dispositif semiconducteur a haute tension de blocage et dispositif semiconducteur ainsi realise

Also Published As

Publication number Publication date
IT1098444B (it) 1985-09-07
US4202916A (en) 1980-05-13
DE2739762C2 (de) 1982-12-02
CH631291A5 (de) 1982-07-30
IT7827273A0 (it) 1978-09-01
GB2003662A (en) 1979-03-14
JPS5444476A (en) 1979-04-07
GB2003662B (en) 1982-02-24
DE2739762A1 (de) 1979-03-15
FR2402303B1 (fr) 1984-06-01
BR7805571A (pt) 1979-04-10
JPS6120132B2 (fr) 1986-05-21

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