FR2378872A1 - Procede pour la realisation de photomasques d'oxyde de fer et masques ainsi realises - Google Patents

Procede pour la realisation de photomasques d'oxyde de fer et masques ainsi realises

Info

Publication number
FR2378872A1
FR2378872A1 FR7801889A FR7801889A FR2378872A1 FR 2378872 A1 FR2378872 A1 FR 2378872A1 FR 7801889 A FR7801889 A FR 7801889A FR 7801889 A FR7801889 A FR 7801889A FR 2378872 A1 FR2378872 A1 FR 2378872A1
Authority
FR
France
Prior art keywords
photomasks
iron oxide
masks
realization
realized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7801889A
Other languages
English (en)
French (fr)
Other versions
FR2378872B1 (OSRAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2378872A1 publication Critical patent/FR2378872A1/fr
Application granted granted Critical
Publication of FR2378872B1 publication Critical patent/FR2378872B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Laminated Bodies (AREA)
  • ing And Chemical Polishing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Compounds Of Iron (AREA)
  • Soft Magnetic Materials (AREA)
  • Glass Compositions (AREA)
FR7801889A 1977-01-27 1978-01-24 Procede pour la realisation de photomasques d'oxyde de fer et masques ainsi realises Granted FR2378872A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7700808A NL7700808A (nl) 1977-01-27 1977-01-27 Werkwijze voor de vervaardiging van ijzer- oxidefotomaskers en ijzeroxidemaskers verkre- gen volgens deze werkwijze.

Publications (2)

Publication Number Publication Date
FR2378872A1 true FR2378872A1 (fr) 1978-08-25
FR2378872B1 FR2378872B1 (OSRAM) 1983-11-18

Family

ID=19827853

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7801889A Granted FR2378872A1 (fr) 1977-01-27 1978-01-24 Procede pour la realisation de photomasques d'oxyde de fer et masques ainsi realises

Country Status (7)

Country Link
US (1) US4199621A (OSRAM)
JP (1) JPS596056B2 (OSRAM)
CA (1) CA1110507A (OSRAM)
DE (1) DE2802814C2 (OSRAM)
FR (1) FR2378872A1 (OSRAM)
GB (1) GB1592017A (OSRAM)
NL (1) NL7700808A (OSRAM)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2009918A1 (fr) * 1968-05-20 1970-02-13 United Glass Ltd Recipients en verre colore et leur procede d'obtention
FR2046320A5 (OSRAM) * 1969-04-23 1971-03-05 Pilkington Brothers Ltd
DE2363319A1 (de) * 1972-12-21 1974-07-11 Glaverbel Verfahren zur erzeugung eines metalloxydueberzugs auf einem substrat
US3824100A (en) * 1970-06-29 1974-07-16 Corning Glass Works Transparent iron oxide microcircuit mask

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2110622A5 (OSRAM) * 1970-10-23 1972-06-02 Commissariat Energie Atomique

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2009918A1 (fr) * 1968-05-20 1970-02-13 United Glass Ltd Recipients en verre colore et leur procede d'obtention
FR2046320A5 (OSRAM) * 1969-04-23 1971-03-05 Pilkington Brothers Ltd
US3824100A (en) * 1970-06-29 1974-07-16 Corning Glass Works Transparent iron oxide microcircuit mask
DE2363319A1 (de) * 1972-12-21 1974-07-11 Glaverbel Verfahren zur erzeugung eines metalloxydueberzugs auf einem substrat
FR2327207A1 (fr) * 1972-12-21 1977-05-06 Glaverbel Procede de formation d'une couche d'oxyde metallique

Also Published As

Publication number Publication date
JPS5394185A (en) 1978-08-17
DE2802814C2 (de) 1984-10-25
JPS596056B2 (ja) 1984-02-08
CA1110507A (en) 1981-10-13
GB1592017A (en) 1981-07-01
NL7700808A (nl) 1978-07-31
FR2378872B1 (OSRAM) 1983-11-18
US4199621A (en) 1980-04-22
DE2802814A1 (de) 1978-08-03

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Legal Events

Date Code Title Description
ST Notification of lapse