FR2375577A1 - Interferometre destine a la mesure de deplacements - Google Patents

Interferometre destine a la mesure de deplacements

Info

Publication number
FR2375577A1
FR2375577A1 FR7638917A FR7638917A FR2375577A1 FR 2375577 A1 FR2375577 A1 FR 2375577A1 FR 7638917 A FR7638917 A FR 7638917A FR 7638917 A FR7638917 A FR 7638917A FR 2375577 A1 FR2375577 A1 FR 2375577A1
Authority
FR
France
Prior art keywords
measurement
beams
utilises
interferometer
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7638917A
Other languages
English (en)
French (fr)
Other versions
FR2375577B1 (enrdf_load_stackoverflow
Inventor
Bernard Fillol
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SORO ELECTRO OPTICS
Original Assignee
SORO ELECTRO OPTICS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SORO ELECTRO OPTICS filed Critical SORO ELECTRO OPTICS
Priority to FR7638917A priority Critical patent/FR2375577A1/fr
Publication of FR2375577A1 publication Critical patent/FR2375577A1/fr
Application granted granted Critical
Publication of FR2375577B1 publication Critical patent/FR2375577B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FR7638917A 1976-12-23 1976-12-23 Interferometre destine a la mesure de deplacements Granted FR2375577A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7638917A FR2375577A1 (fr) 1976-12-23 1976-12-23 Interferometre destine a la mesure de deplacements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7638917A FR2375577A1 (fr) 1976-12-23 1976-12-23 Interferometre destine a la mesure de deplacements

Publications (2)

Publication Number Publication Date
FR2375577A1 true FR2375577A1 (fr) 1978-07-21
FR2375577B1 FR2375577B1 (enrdf_load_stackoverflow) 1982-03-05

Family

ID=9181475

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7638917A Granted FR2375577A1 (fr) 1976-12-23 1976-12-23 Interferometre destine a la mesure de deplacements

Country Status (1)

Country Link
FR (1) FR2375577A1 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1979000506A1 (en) * 1978-01-13 1979-08-09 Nat Res Dev Interferometer systems
EP0099940A1 (de) * 1982-07-28 1984-02-08 H. Maihak Ag Verfahren und Vorrichtung zur interferometrischen Messung der geradlinigen Bewegungslänge eines Gegenstands mit Erkennung seiner Bewegungsrichtung
US4583855A (en) * 1984-02-17 1986-04-22 Lockheed Missiles & Space Company, Inc. Optical phase measuring apparatus
US5172186A (en) * 1990-07-03 1992-12-15 Konica Corporation Laser interferometry length measuring an apparatus employing a beam slitter

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1979000506A1 (en) * 1978-01-13 1979-08-09 Nat Res Dev Interferometer systems
EP0099940A1 (de) * 1982-07-28 1984-02-08 H. Maihak Ag Verfahren und Vorrichtung zur interferometrischen Messung der geradlinigen Bewegungslänge eines Gegenstands mit Erkennung seiner Bewegungsrichtung
US4558950A (en) * 1982-07-28 1985-12-17 H. Maihak Ag Interferometric distance and direction measurement
US4583855A (en) * 1984-02-17 1986-04-22 Lockheed Missiles & Space Company, Inc. Optical phase measuring apparatus
US5172186A (en) * 1990-07-03 1992-12-15 Konica Corporation Laser interferometry length measuring an apparatus employing a beam slitter

Also Published As

Publication number Publication date
FR2375577B1 (enrdf_load_stackoverflow) 1982-03-05

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Legal Events

Date Code Title Description
ST Notification of lapse