FR2371061A1 - Procede pour representer l'image de diffraction dans un microscope a balayage a transmission, a faisceau corpusculaire - Google Patents

Procede pour representer l'image de diffraction dans un microscope a balayage a transmission, a faisceau corpusculaire

Info

Publication number
FR2371061A1
FR2371061A1 FR7732425A FR7732425A FR2371061A1 FR 2371061 A1 FR2371061 A1 FR 2371061A1 FR 7732425 A FR7732425 A FR 7732425A FR 7732425 A FR7732425 A FR 7732425A FR 2371061 A1 FR2371061 A1 FR 2371061A1
Authority
FR
France
Prior art keywords
diffraction image
representing
microscope
scanning microscope
transmission scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7732425A
Other languages
English (en)
French (fr)
Other versions
FR2371061B1 (ref
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of FR2371061A1 publication Critical patent/FR2371061A1/fr
Application granted granted Critical
Publication of FR2371061B1 publication Critical patent/FR2371061B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7732425A 1976-11-12 1977-10-27 Procede pour representer l'image de diffraction dans un microscope a balayage a transmission, a faisceau corpusculaire Granted FR2371061A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2652273A DE2652273C2 (de) 1976-11-12 1976-11-12 Verfahren zur bildlichen Darstellung eines Beugungsbildes bei einem Durchstrahlungs-Raster-Korpuskularstrahlmikroskop

Publications (2)

Publication Number Publication Date
FR2371061A1 true FR2371061A1 (fr) 1978-06-09
FR2371061B1 FR2371061B1 (ref) 1980-10-03

Family

ID=5993324

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7732425A Granted FR2371061A1 (fr) 1976-11-12 1977-10-27 Procede pour representer l'image de diffraction dans un microscope a balayage a transmission, a faisceau corpusculaire

Country Status (6)

Country Link
US (1) US4160162A (ref)
JP (1) JPS5363860A (ref)
DE (1) DE2652273C2 (ref)
FR (1) FR2371061A1 (ref)
GB (1) GB1537631A (ref)
NL (1) NL7711654A (ref)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165255A (en) * 1980-05-26 1981-12-18 Hitachi Ltd Image indicating method for transmission scan electron microscope
US4514629A (en) * 1982-07-07 1985-04-30 National Research Development Corporation Scanning transmission electron microscopes
JPS6056344A (ja) * 1983-09-07 1985-04-01 Hitachi Ltd 走査型反射電子回折顕微装置
JPS614142A (ja) * 1984-06-16 1986-01-10 Jeol Ltd 電子顕微鏡
US4990779A (en) * 1989-06-06 1991-02-05 Nippon Steel Corporation Method and apparatus for evaluating strains in crystals
WO2008060237A1 (en) * 2006-11-15 2008-05-22 Hovmoeller Sven Electron rotation camera
JP5462434B2 (ja) * 2007-07-13 2014-04-02 株式会社日立製作所 荷電粒子ビーム装置、及び荷電粒子ビーム顕微鏡

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE969942C (de) * 1951-09-19 1958-07-31 Zeiss Carl Fa Elektronenbeugungsapparatur
US3849647A (en) * 1972-10-23 1974-11-19 Jeol Ltd Scanning electron microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2354263A (en) * 1942-05-30 1944-07-25 Rca Corp Electron microscope
US3225192A (en) * 1962-12-28 1965-12-21 Hitachi Ltd Apparatus for producing electron microscope and diffraction images separately and simultaneously on the image plane
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE969942C (de) * 1951-09-19 1958-07-31 Zeiss Carl Fa Elektronenbeugungsapparatur
US3849647A (en) * 1972-10-23 1974-11-19 Jeol Ltd Scanning electron microscope

Also Published As

Publication number Publication date
JPS5363860A (en) 1978-06-07
FR2371061B1 (ref) 1980-10-03
GB1537631A (en) 1979-01-04
DE2652273C2 (de) 1978-11-02
DE2652273B1 (de) 1978-03-16
NL7711654A (nl) 1978-05-17
US4160162A (en) 1979-07-03

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Legal Events

Date Code Title Description
ST Notification of lapse