JPS5363860A - Method of displaying diffraction picture of transmissive scan particleeray microscope - Google Patents

Method of displaying diffraction picture of transmissive scan particleeray microscope

Info

Publication number
JPS5363860A
JPS5363860A JP13519177A JP13519177A JPS5363860A JP S5363860 A JPS5363860 A JP S5363860A JP 13519177 A JP13519177 A JP 13519177A JP 13519177 A JP13519177 A JP 13519177A JP S5363860 A JPS5363860 A JP S5363860A
Authority
JP
Japan
Prior art keywords
particleeray
microscope
diffraction picture
displaying
transmissive scan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13519177A
Other languages
English (en)
Japanese (ja)
Inventor
Miyuraa Karuruhaintsu
Rintofuraishiyu Fuorukaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPS5363860A publication Critical patent/JPS5363860A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP13519177A 1976-11-12 1977-11-10 Method of displaying diffraction picture of transmissive scan particleeray microscope Pending JPS5363860A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2652273A DE2652273C2 (de) 1976-11-12 1976-11-12 Verfahren zur bildlichen Darstellung eines Beugungsbildes bei einem Durchstrahlungs-Raster-Korpuskularstrahlmikroskop

Publications (1)

Publication Number Publication Date
JPS5363860A true JPS5363860A (en) 1978-06-07

Family

ID=5993324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13519177A Pending JPS5363860A (en) 1976-11-12 1977-11-10 Method of displaying diffraction picture of transmissive scan particleeray microscope

Country Status (6)

Country Link
US (1) US4160162A (ref)
JP (1) JPS5363860A (ref)
DE (1) DE2652273C2 (ref)
FR (1) FR2371061A1 (ref)
GB (1) GB1537631A (ref)
NL (1) NL7711654A (ref)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056344A (ja) * 1983-09-07 1985-04-01 Hitachi Ltd 走査型反射電子回折顕微装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165255A (en) * 1980-05-26 1981-12-18 Hitachi Ltd Image indicating method for transmission scan electron microscope
US4514629A (en) * 1982-07-07 1985-04-30 National Research Development Corporation Scanning transmission electron microscopes
JPS614142A (ja) * 1984-06-16 1986-01-10 Jeol Ltd 電子顕微鏡
US4990779A (en) * 1989-06-06 1991-02-05 Nippon Steel Corporation Method and apparatus for evaluating strains in crystals
WO2008060237A1 (en) * 2006-11-15 2008-05-22 Hovmoeller Sven Electron rotation camera
JP5462434B2 (ja) * 2007-07-13 2014-04-02 株式会社日立製作所 荷電粒子ビーム装置、及び荷電粒子ビーム顕微鏡

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2354263A (en) * 1942-05-30 1944-07-25 Rca Corp Electron microscope
DE969942C (de) * 1951-09-19 1958-07-31 Zeiss Carl Fa Elektronenbeugungsapparatur
US3225192A (en) * 1962-12-28 1965-12-21 Hitachi Ltd Apparatus for producing electron microscope and diffraction images separately and simultaneously on the image plane
JPS5138578B2 (ref) * 1972-10-23 1976-10-22
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056344A (ja) * 1983-09-07 1985-04-01 Hitachi Ltd 走査型反射電子回折顕微装置

Also Published As

Publication number Publication date
FR2371061B1 (ref) 1980-10-03
GB1537631A (en) 1979-01-04
DE2652273C2 (de) 1978-11-02
DE2652273B1 (de) 1978-03-16
NL7711654A (nl) 1978-05-17
FR2371061A1 (fr) 1978-06-09
US4160162A (en) 1979-07-03

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