FR2370511A1 - Procede de cristallisation progressive par zones, sans creuset et dispositif pour la mise en oeuvre du procede - Google Patents

Procede de cristallisation progressive par zones, sans creuset et dispositif pour la mise en oeuvre du procede

Info

Publication number
FR2370511A1
FR2370511A1 FR7734432A FR7734432A FR2370511A1 FR 2370511 A1 FR2370511 A1 FR 2370511A1 FR 7734432 A FR7734432 A FR 7734432A FR 7734432 A FR7734432 A FR 7734432A FR 2370511 A1 FR2370511 A1 FR 2370511A1
Authority
FR
France
Prior art keywords
rod
crucible
zones
implementing
induction heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7734432A
Other languages
English (en)
Other versions
FR2370511B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siltronic AG
Original Assignee
Wacker Siltronic AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Siltronic AG filed Critical Wacker Siltronic AG
Publication of FR2370511A1 publication Critical patent/FR2370511A1/fr
Application granted granted Critical
Publication of FR2370511B1 publication Critical patent/FR2370511B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Abstract

Procédé de cristallation progressive par zones, sans creuset, d'une baguette polycristalline maintenue verticalement, avec un germe cristallin fixé à son extrémité inférieure, dans laquelle au moyen d'une bobine de chauffage à induction entourant la baguette on crée une zone de fusion qui, par un mouvement relatif entre bobine et baguette, partant du germe cristallin, parcourt toute la longueur la baguette. Après mise en place du germe cristallin sur la baguette, on approche de la baguette, au-dessous de la bobine de chauffage à induction, un corps d'appui qui s'applique mou contre la baguette et qui, après son application, se solidifie en formant un appui rigide de la baguette. Dispositif pour la mise en oeuvre de ce procédé. Application : à la fabrication de composants à semi-conducteurs.
FR7734432A 1976-11-16 1977-11-16 Procede de cristallisation progressive par zones, sans creuset et dispositif pour la mise en oeuvre du procede Granted FR2370511A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2652199A DE2652199C3 (de) 1976-11-16 1976-11-16 Vorrichtung zum Abstützen des Kristallstabes beim tiegelfreien Zonenziehen

Publications (2)

Publication Number Publication Date
FR2370511A1 true FR2370511A1 (fr) 1978-06-09
FR2370511B1 FR2370511B1 (fr) 1980-02-15

Family

ID=5993299

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7734432A Granted FR2370511A1 (fr) 1976-11-16 1977-11-16 Procede de cristallisation progressive par zones, sans creuset et dispositif pour la mise en oeuvre du procede

Country Status (9)

Country Link
US (1) US4140571A (fr)
JP (1) JPS5383907A (fr)
BE (1) BE860862A (fr)
DE (1) DE2652199C3 (fr)
DK (1) DK152061C (fr)
FR (1) FR2370511A1 (fr)
GB (1) GB1567703A (fr)
IT (1) IT1091784B (fr)
NL (1) NL7710441A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4257841A (en) * 1978-01-06 1981-03-24 Monsanto Company Stabilizing and supporting apparatus for float zone refined semiconductor crystal rod
US5092956A (en) * 1987-09-30 1992-03-03 The United States Of America As Represented By The United States National Aeronautics And Space Administration Device for mechanically stabilizing web ribbon buttons during growth initiation
DE102014217605A1 (de) * 2014-09-03 2016-03-03 Siltronic Ag Verfahren zum Abstützen eines wachsenden Einkristalls während des Kristallisierens des Einkristalls gemäß dem FZ-Verfahren

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3234009A (en) * 1953-02-14 1966-02-08 Siemens Ag Method and device for the successive zone melting and resolidifying of extremely pure substances
US3403007A (en) * 1966-04-20 1968-09-24 Materials Research Corp Hollow cathode floating zone melter and process
DE1519901A1 (de) * 1966-09-23 1970-02-12 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes
BE789637A (fr) * 1972-10-03 1973-04-03 Elphiac Sa Procede de fabrication de monocristaux et installation pour executer ceprocede.
DE2358300C3 (de) * 1973-11-22 1978-07-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum senkrechten Halten eines Halbleiterkristallstabes beim tiegelfreien Zonenschmelzen
DE2455173C3 (de) * 1974-11-21 1979-01-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum senkrechten Haltern des den Keimkristall enthaltenden Stabendes beim tiegelfreien Zonenschmelzen

Also Published As

Publication number Publication date
FR2370511B1 (fr) 1980-02-15
BE860862A (fr) 1978-05-16
US4140571A (en) 1979-02-20
DE2652199A1 (de) 1978-05-24
JPS5383907A (en) 1978-07-24
JPS5611672B2 (fr) 1981-03-16
DE2652199B2 (de) 1980-08-14
DK439977A (da) 1978-05-17
DK152061B (da) 1988-01-25
DK152061C (da) 1988-07-11
DE2652199C3 (de) 1982-05-19
NL7710441A (nl) 1978-05-18
IT1091784B (it) 1985-07-06
GB1567703A (en) 1980-05-21

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Legal Events

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