DK152061C - Apparat til afstivning af krystalstaven ved digelfri zonesmeltning - Google Patents

Apparat til afstivning af krystalstaven ved digelfri zonesmeltning

Info

Publication number
DK152061C
DK152061C DK439977A DK439977A DK152061C DK 152061 C DK152061 C DK 152061C DK 439977 A DK439977 A DK 439977A DK 439977 A DK439977 A DK 439977A DK 152061 C DK152061 C DK 152061C
Authority
DK
Denmark
Prior art keywords
digel
stabilizing
crystal rod
free zone
zone melting
Prior art date
Application number
DK439977A
Other languages
English (en)
Other versions
DK152061B (da
DK439977A (da
Inventor
Heinz Herzer
Helmut Zauhar
Eberhard Muecke
Franz Koehl
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Publication of DK439977A publication Critical patent/DK439977A/da
Publication of DK152061B publication Critical patent/DK152061B/da
Application granted granted Critical
Publication of DK152061C publication Critical patent/DK152061C/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Recrystallisation Techniques (AREA)
DK439977A 1976-11-16 1977-10-04 Apparat til afstivning af krystalstaven ved digelfri zonesmeltning DK152061C (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2652199 1976-11-16
DE2652199A DE2652199C3 (de) 1976-11-16 1976-11-16 Vorrichtung zum Abstützen des Kristallstabes beim tiegelfreien Zonenziehen

Publications (3)

Publication Number Publication Date
DK439977A DK439977A (da) 1978-05-17
DK152061B DK152061B (da) 1988-01-25
DK152061C true DK152061C (da) 1988-07-11

Family

ID=5993299

Family Applications (1)

Application Number Title Priority Date Filing Date
DK439977A DK152061C (da) 1976-11-16 1977-10-04 Apparat til afstivning af krystalstaven ved digelfri zonesmeltning

Country Status (9)

Country Link
US (1) US4140571A (da)
JP (1) JPS5383907A (da)
BE (1) BE860862A (da)
DE (1) DE2652199C3 (da)
DK (1) DK152061C (da)
FR (1) FR2370511A1 (da)
GB (1) GB1567703A (da)
IT (1) IT1091784B (da)
NL (1) NL7710441A (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4257841A (en) * 1978-01-06 1981-03-24 Monsanto Company Stabilizing and supporting apparatus for float zone refined semiconductor crystal rod
US5092956A (en) * 1987-09-30 1992-03-03 The United States Of America As Represented By The United States National Aeronautics And Space Administration Device for mechanically stabilizing web ribbon buttons during growth initiation
DE102014217605A1 (de) * 2014-09-03 2016-03-03 Siltronic Ag Verfahren zum Abstützen eines wachsenden Einkristalls während des Kristallisierens des Einkristalls gemäß dem FZ-Verfahren

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3234009A (en) * 1953-02-14 1966-02-08 Siemens Ag Method and device for the successive zone melting and resolidifying of extremely pure substances
US3403007A (en) * 1966-04-20 1968-09-24 Materials Research Corp Hollow cathode floating zone melter and process
DE1519901A1 (de) * 1966-09-23 1970-02-12 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes
BE789637A (fr) * 1972-10-03 1973-04-03 Elphiac Sa Procede de fabrication de monocristaux et installation pour executer ceprocede.
DE2358300C3 (de) * 1973-11-22 1978-07-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum senkrechten Halten eines Halbleiterkristallstabes beim tiegelfreien Zonenschmelzen
DE2455173C3 (de) * 1974-11-21 1979-01-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum senkrechten Haltern des den Keimkristall enthaltenden Stabendes beim tiegelfreien Zonenschmelzen

Also Published As

Publication number Publication date
JPS5383907A (en) 1978-07-24
DE2652199A1 (de) 1978-05-24
FR2370511A1 (fr) 1978-06-09
NL7710441A (nl) 1978-05-18
BE860862A (fr) 1978-05-16
DE2652199C3 (de) 1982-05-19
DE2652199B2 (de) 1980-08-14
US4140571A (en) 1979-02-20
GB1567703A (en) 1980-05-21
JPS5611672B2 (da) 1981-03-16
FR2370511B1 (da) 1980-02-15
DK152061B (da) 1988-01-25
DK439977A (da) 1978-05-17
IT1091784B (it) 1985-07-06

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Legal Events

Date Code Title Description
PBP Patent lapsed