FR2368308A1 - Procede et dispositif pour nettoyer des surfaces, notamment des surfaces metalliques - Google Patents

Procede et dispositif pour nettoyer des surfaces, notamment des surfaces metalliques

Info

Publication number
FR2368308A1
FR2368308A1 FR7731172A FR7731172A FR2368308A1 FR 2368308 A1 FR2368308 A1 FR 2368308A1 FR 7731172 A FR7731172 A FR 7731172A FR 7731172 A FR7731172 A FR 7731172A FR 2368308 A1 FR2368308 A1 FR 2368308A1
Authority
FR
France
Prior art keywords
hydrogen
cleaned
tank
cleaning
especially metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7731172A
Other languages
English (en)
French (fr)
Other versions
FR2368308B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Publication of FR2368308A1 publication Critical patent/FR2368308A1/fr
Application granted granted Critical
Publication of FR2368308B1 publication Critical patent/FR2368308B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • ing And Chemical Polishing (AREA)
FR7731172A 1976-10-19 1977-10-17 Procede et dispositif pour nettoyer des surfaces, notamment des surfaces metalliques Granted FR2368308A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2647088A DE2647088B2 (de) 1976-10-19 1976-10-19 Verfahren und Vorrichtung zum Reinigen von Oberflächen

Publications (2)

Publication Number Publication Date
FR2368308A1 true FR2368308A1 (fr) 1978-05-19
FR2368308B1 FR2368308B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-07-06

Family

ID=5990801

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7731172A Granted FR2368308A1 (fr) 1976-10-19 1977-10-17 Procede et dispositif pour nettoyer des surfaces, notamment des surfaces metalliques

Country Status (5)

Country Link
US (1) US4452642A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS6014109B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2647088B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2368308A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1592864A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578482A1 (fr) * 1984-03-06 1986-09-12 Asm Fico Tooling Procede et dispositif pour faciliter le demoulage d'objets moules
WO1987002603A1 (en) * 1985-10-29 1987-05-07 Hughes Aircraft Company Method and apparatus for atomic beam irradiation
FR2631258A1 (fr) * 1988-05-10 1989-11-17 Prestations Services Sps Procede de nettoyage en surface par plasma differe

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3026164A1 (de) * 1980-07-08 1982-01-28 Europäische Atomgemeinschaft (EURATOM), Kirchberg Verfahren und vorrichtung zur entladungschemischen behandlung empfindlicher werkstuecke durch einsatz der glimmentladung
JPH01152274A (ja) * 1987-12-09 1989-06-14 Iwatani Internatl Corp 膜形成操作系におけるフッ化塩素クリーニング後の汚染除去方法
JPH0754287B2 (ja) * 1987-12-16 1995-06-07 三菱電機株式会社 不純物検出分析方法
US5236537A (en) * 1989-04-07 1993-08-17 Seiko Epson Corporation Plasma etching apparatus
DE4034842A1 (de) * 1990-11-02 1992-05-07 Thyssen Edelstahlwerke Ag Verfahren zur plasmachemischen reinigung fuer eine anschliessende pvd oder pecvd beschichtung
US5825805A (en) * 1991-10-29 1998-10-20 Canon Spread spectrum communication system
US5409543A (en) * 1992-12-22 1995-04-25 Sandia Corporation Dry soldering with hot filament produced atomic hydrogen
GB2274286B (en) * 1993-01-13 1996-11-06 Singapore Asahi Chemical & Solder Ind Pte Ltd Method of and apparatus for preparing an electric circuit board for a flow or wave soldering process
WO1995012883A1 (en) * 1993-11-01 1995-05-11 Eneco, Inc. Glow discharge apparatus and methods providing prerequisites and testing for nuclear reactions
JP2731730B2 (ja) * 1993-12-22 1998-03-25 インターナショナル・ビジネス・マシーンズ・コーポレイション フォトレジストの除去方法
US5900351A (en) * 1995-01-17 1999-05-04 International Business Machines Corporation Method for stripping photoresist
JP4346741B2 (ja) * 1999-08-05 2009-10-21 キヤノンアネルバ株式会社 発熱体ｃｖｄ装置及び付着膜の除去方法
EP1235258A4 (en) * 1999-10-29 2007-03-28 Matsushita Electric Ind Co Ltd METHOD OF CLEANING A SUBSTRATE AND MANUFACTURING METHOD FOR A SEMICONDUCTOR ARRANGEMENT
RU2213635C2 (ru) * 2001-11-06 2003-10-10 Открытое акционерное общество "Ракетно-космическая корпорация "Энергия" им. С.П.Королева" Способ обезгаживания изделий
US20040011381A1 (en) * 2002-07-17 2004-01-22 Klebanoff Leonard E. Method for removing carbon contamination from optic surfaces
US7361233B2 (en) * 2003-12-10 2008-04-22 General Electric Company Methods of hydrogen cleaning of metallic surfaces
US20100071720A1 (en) * 2008-09-19 2010-03-25 Carl Zeiss Smt Ag Method and system for removing contaminants from a surface
PL3566725T3 (pl) * 2018-05-07 2022-01-17 Waldemar Link Gmbh & Co. Kg Antybakteryjna powłoka implantu
CN108754520A (zh) * 2018-06-29 2018-11-06 四川大学 硬质合金表面涂层去除方法和设备
KR102759821B1 (ko) * 2019-01-30 2025-01-23 어플라이드 머티어리얼스, 인코포레이티드 진공 시스템을 세정하기 위한 방법, 기판의 진공 프로세싱을 위한 방법, 및 기판을 진공 프로세싱하기 위한 장치
JP7239688B2 (ja) * 2019-01-30 2023-03-14 アプライド マテリアルズ インコーポレイテッド 減圧システムを洗浄するための方法、基板の減圧処理のための方法、及び基板を減圧処理するための装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB948554A (en) * 1961-03-22 1964-02-05 Joseph Edmund Harling And Dona Method and apparatus for cleaning metal by plasma arcs
DE1621650A1 (de) * 1966-08-10 1971-06-24 Siemens Ag Verfahren zur Beseitigung von oberflaechlichen Verunreinigungen auf verzinnten Kontaktflaechen,insbesondere auf verzinnten Leitungsbahnen gedruckter Schaltungen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2985756A (en) * 1957-12-09 1961-05-23 Edwards High Vacuum Ltd Ionic bombardment cleaning apparatus
DE1521989A1 (de) * 1966-02-04 1970-02-05 Siemens Ag Verfahren zur Beseitigung von Oxyd-,Sulfid- und Sulfatschichten auf verzinnten Anschlussdraehten elektrischer Bauelemente
US3868271A (en) * 1973-06-13 1975-02-25 Ibm Method of cleaning a glass substrate by ionic bombardment in a wet active gas

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB948554A (en) * 1961-03-22 1964-02-05 Joseph Edmund Harling And Dona Method and apparatus for cleaning metal by plasma arcs
DE1621650A1 (de) * 1966-08-10 1971-06-24 Siemens Ag Verfahren zur Beseitigung von oberflaechlichen Verunreinigungen auf verzinnten Kontaktflaechen,insbesondere auf verzinnten Leitungsbahnen gedruckter Schaltungen

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578482A1 (fr) * 1984-03-06 1986-09-12 Asm Fico Tooling Procede et dispositif pour faciliter le demoulage d'objets moules
WO1987002603A1 (en) * 1985-10-29 1987-05-07 Hughes Aircraft Company Method and apparatus for atomic beam irradiation
FR2631258A1 (fr) * 1988-05-10 1989-11-17 Prestations Services Sps Procede de nettoyage en surface par plasma differe
EP0343038A1 (fr) * 1988-05-10 1989-11-23 Societe De Prestations De Services, S.P.S. Procédé de nettoyage en surface par plasma différé

Also Published As

Publication number Publication date
JPS5351142A (en) 1978-05-10
DE2647088B2 (de) 1979-04-05
FR2368308B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-07-06
JPS6014109B2 (ja) 1985-04-11
DE2647088A1 (de) 1978-04-20
US4452642A (en) 1984-06-05
GB1592864A (en) 1981-07-08

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Legal Events

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