FR2344847B1 - - Google Patents

Info

Publication number
FR2344847B1
FR2344847B1 FR7702072A FR7702072A FR2344847B1 FR 2344847 B1 FR2344847 B1 FR 2344847B1 FR 7702072 A FR7702072 A FR 7702072A FR 7702072 A FR7702072 A FR 7702072A FR 2344847 B1 FR2344847 B1 FR 2344847B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7702072A
Other languages
French (fr)
Other versions
FR2344847A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2344847A1 publication Critical patent/FR2344847A1/fr
Application granted granted Critical
Publication of FR2344847B1 publication Critical patent/FR2344847B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
FR7702072A 1976-03-15 1977-01-18 Procede de detection de defauts electriquement actifs dans un substrat de silicium de type n Granted FR2344847A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66723276A 1976-03-15 1976-03-15

Publications (2)

Publication Number Publication Date
FR2344847A1 FR2344847A1 (fr) 1977-10-14
FR2344847B1 true FR2344847B1 (it) 1979-09-28

Family

ID=24677379

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7702072A Granted FR2344847A1 (fr) 1976-03-15 1977-01-18 Procede de detection de defauts electriquement actifs dans un substrat de silicium de type n

Country Status (6)

Country Link
JP (1) JPS52111373A (it)
CA (1) CA1069221A (it)
DE (1) DE2707372C2 (it)
FR (1) FR2344847A1 (it)
GB (1) GB1514697A (it)
IT (1) IT1118013B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532760A1 (fr) * 1982-09-08 1984-03-09 Comp Generale Electricite Procede et dispositif pour obtenir des caracteristiques physiques d'un materiau semi-conducteur
JPS6066920A (ja) * 1983-09-22 1985-04-17 北興化工機株式会社 可搬式サイレ−ジ容器
EP0400387B1 (de) * 1989-05-31 1996-02-21 Siemens Aktiengesellschaft Verfahren zum grossflächigen elektrischen Kontaktieren eines Halbleiterkristallkörpers mit Hilfe von Elektrolyten
DE59006874D1 (de) * 1989-05-31 1994-09-29 Siemens Ag Verfahren zur Bestimmung der Rekombinationsgeschwindigkeit von Minoritätsträgern an Grenzflächen zwischen Halbleitern und anderen Substanzen.
DE3917702A1 (de) * 1989-05-31 1990-12-06 Siemens Ag Verfahren zur ortsaufgeloesten bestimmung der diffusionslaenge von minoritaetsladungstraegern in einem halbleiterkristallkoerper mit hilfe einer elektrolytischen zelle
DE4328083A1 (de) * 1993-08-20 1994-03-31 Ignaz Eisele Verfahren zur mikroskopischen Messung von Topographie und lateralen Potentialverteilungen an einer Oberfläche mit einer Feldeffektanordnung
JP4916249B2 (ja) * 2006-08-10 2012-04-11 新電元工業株式会社 半導体基板の検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3655540A (en) * 1970-06-22 1972-04-11 Bell Telephone Labor Inc Method of making semiconductor device components
US3902979A (en) * 1974-06-24 1975-09-02 Westinghouse Electric Corp Insulator substrate with a thin mono-crystalline semiconductive layer and method of fabrication

Also Published As

Publication number Publication date
JPS52111373A (en) 1977-09-19
FR2344847A1 (fr) 1977-10-14
DE2707372C2 (de) 1985-08-22
IT1118013B (it) 1986-02-24
DE2707372A1 (de) 1977-09-22
JPS5320380B2 (it) 1978-06-26
GB1514697A (en) 1978-06-21
CA1069221A (en) 1980-01-01

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Legal Events

Date Code Title Description
ST Notification of lapse